by Wah-chung Wong. / Thesis (M.Ph.)--Chinese University of Hong Kong, 1987. / Bibliography: leaves 155-162.

by Ho Lai-Ching. / Year shown on spine: 1997. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1996. / Includes bibliographical references (leaves xiii-xvii). / ACKNOWLEDGMENT --- p.I / ABSTRACT --- p.II / CONTENTS --- p.IV / FIGURE CAPTIONS --- p.VI / TABLE CAPTIONS --- p.IX / Chapter CHAPTER 1 --- INTRODUCTION --- p.1 / Chapter CHAPTER 2 --- A BRIEF REVIEW OF ION BEAM SYNTHESIS OF SiC --- p.5 / Chapter CHAPTER 3 --- SAMPLE PREPARATION AND MEASUREMENT METHODS --- p.9 / Chapter 3.1 --- Sample Preparation --- p.9 / Chapter 3.1.1 --- MEVVA Implantation --- p.9 / Chapter 3.1.2 --- Implantation Conditions --- p.12 / Chapter 3.2 --- Characterization Methods --- p.14 / Chapter 3.2.1 --- Spreading Resistance Profiling (SRP) --- p.14 / Chapter 3.2.1.1 --- Principle of SRP Measurement Method --- p.14 / Chapter 3.2.1.2 --- Sample Preparation and Measurement --- p.15 / Chapter 3.2.2 --- Current-Voltage Measurement (I-V) --- p.17 / Chapter 3.2.3 --- Infrared Transmission Measurements (IR) --- p.19 / Chapter CHAPTER 4 --- RESULTS AND DISCUSSIONS --- p.20 / Chapter 4.1 --- Results of SRP Measurements --- p.20 / Chapter 4.2 --- Results of I-V Measurements --- p.27 / Chapter 4.3 --- Results of IR Measurements --- p.34 / Chapter 4.4 --- Discussions --- p.39 / Chapter 4.4.1 --- IR Absorption Results --- p.39 / Chapter 4.4.2 --- Hot Probe Measurement Results --- p.45 / Chapter 4.4.3 --- SRP Depth Profiles --- p.50 / Chapter 4.4.4 --- Current Transport Mechanism --- p.55 / Chapter 4.4.5 --- Ideality Factor and Transport Mechanisms --- p.76 / Chapter CHAPTER 5 --- CONCLUSIONS AND FUTURE WORKS --- p.85 / Chapter 5.1 --- Conclusions --- p.85 / Chapter 5.2 --- Future Works --- p.86 / APPENDIX --- p.i / BIBLIOGRAPHY --- p.xiii

Graduation date: 1998

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