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The objective of this research dissertation is to design and implement two novel micromachined silicon vibratory gyroscopes, which attempt to incorporate all the necessary attributes of sub-deg/hr noise performance requirements in a single framework: large resonant mass, high drive-mode oscillation amplitudes, large device capacitance (coupled with optimized electronics), and high-Q resonant mode-matched operation. Mode-matching leverages the high-Q (mechanical gain) of the operating modes of the gyroscope and offers significant improvements in mechanical and electronic noise floor, sensitivity, and bias stability. The first micromachined silicon vibratory gyroscope presented in this work is the resonating star gyroscope (RSG): a novel Class-II shell-type structure which utilizes degenerate flexural modes. After an iterative cycle of design optimization, an RSG prototype was implemented using a multiple-shell approach on (111) SOI substrate. Experimental data indicates sub-5 deg/hr Allan deviation bias instability operating under a mode-matched operating Q of 30,000 at 23ºC (in vacuum). The second micromachined silicon vibratory gyroscope presented in this work is the mode-matched tuning fork gyroscope (M2-TFG): a novel Class-I tuning fork structure which utilizes in-plane non-degenerate resonant flexural modes. Operated under vacuum, the M2-TFG represents the first reported high-Q perfectly mode-matched operation in Class-I vibratory microgyroscope. Experimental results of device implemented on (100) SOI substrate demonstrates sub-deg/hr Allan deviation bias instability operating under a mode-matched operating Q of 50,000 at 23ºC. In an effort to increase capacitive aspect ratio, a new fabrication technology was developed that involved the selective deposition of doped-polysilicon inside the capacitive sensing gaps (SPD Process). By preserving the structural composition integrity of the flexural springs, it is possible to accurately predict the operating-mode frequencies while maintaining high-Q operation. Preliminary characterization of vacuum-packaged prototypes was performed. Initial results demonstrated high-Q mode-matched operation, excellent thermal stability, and sub-deg/hr Allan variance bias instability.

Les travaux de cette thèse portent sur le développement (modélisation, conception, réalisation et tests) d’une surface intelligente (smart surface) composée d’un réseau d'actionneurs numériques MEMS, capables de mouvoir des charges posées dessus. Pour la réalisation de ces smart-surfaces, deux voies ont été explorées : un actionnement par voie électromagnétique, constituée d’aimants fixes et mobiles, et un actionnement utilisant des éléments bistables couplés à des alliages à mémoire de forme. Dans le premier cas, la simulation de l’interaction magnétique entre un micro-actionneur et le champ créé par des pistes conductrices placées à proximité a été réalisée. Un réseau de 5x5 micro-actionneurs électromagnétiques quadristables a été ensuite conçu, réalisé et caractérisé. Ce démonstrateur est fonctionnel en convoyage d’objets légers en translation et en rotation. Dans le second cas, la conception et la réalisation d’un actionneur MEMS élémentaire ont été menées : des modèles analytiques ont été confrontés aux résultats obtenus par éléments finis, et enfin comparés aux résultats expérimentaux. Ces travaux ciblent la problématique de la commande des systèmes mécatroniques, à actionneurs multiples, aux échelles méso ou microscopique. La connectique associée est un problème récurrent dans les systèmes fortement miniaturisés, les structures présentées ici présentent un fort potentiel de réduction des connexions filaires, voire leur élimination complète. / The work of this doctoral thesis involves in developing a smart surface (including modelling, design, fabrication and tests), composed of an array of MEMS digital actuators, capable of moving objects placed on it. In order to produce these smart surfaces, two actuation types were explored: electromagnetic actuation on fixed and mobile magnets and optothermal actuation of shape memory alloys on bistable elements. In the first case, simulation of the magnetic interaction between a micro-actuator and the magnetic field generated by nearby current wires was performed. Then, an array of 5x5 quadristable electromagnetic micro-actuators was designed, produced and characterized. This demo prototype is functional for small-weight object conveyance by translation and rotation. In the second case, design and fabrication of an elementary MEMS actuator were carried out: analytical models were confronted with the results from Finite Element Analysis, and at last compared to experimental ones. This work targets at the issue of controlling multiple-actuator mechatronics systems, at meso- or micrometric scale. Since the associated connectors are a recurring problem in highly miniaturized systems, the structures presented herein demonstrate important potential of cabling reduction, even towards complete wireless configurations.

This thesis reports development of three different high performance, low g-sensitive micromachined gyroscopes having single, double, and quadruple masses. The single mass gyroscope (SMG) is developed for comparison of its performance with the double mass gyroscope (DMG) and quadruple mass gyroscope (QMG). DMG is a tuning fork gyroscope, diminishing the effects of unpredictable g-loadings during regular operation, while QMG is a twin tuning fork gyroscope, developed for a uniform and minimized g-sensitivity. DMG and QMG use novel ring spring connections for merging the masses in drive modes, providing uniform and anti-phase drive mode vibrations that minimize the cross-coupling and the effects of intrinsic and extrinsic accelerations on the scale factor and bias levels of the gyroscopes. The sense mode of each mass of the multi-mass gyroscopes is designed to have higher resonance frequencies than that of the drive mode for possible matching requirements, and these sense modes have dedicated frequency tuning electrodes for frequency matching or tuning. Detailed performance simulations are performed with a very sophisticated computer model using the ARCHITECT software. These gyroscopes are fabricated using a standard SOIMUMPs process of MEMSCAP Inc., which provides capacitive gaps of 2 &micro / m and structural layer thickness of 25 &micro / m. Die sizes of the fabricated gyroscope chips are 4.1 mm x 4.1 mm for the single mass, 4.1 mm x 8.9 mm for the double mass, and 8.9 mm x 8.9 mm for the quadruple mass gyroscope. Fabricated gyroscopes are tested with dedicated differential readout electronics constructed with discrete components. Drive mode resonance frequencies of these gyroscopes are in a range of 3.4 kHz to 5.1 kHz. Depending on the drive mode mechanics, the drive mode quality (Q) factors of the fabricated gyroscopes are about 300 at atmospheric pressure and reaches to a value of 2500 at a vacuum ambient of 50 mTorr. Resolvable rates of the fabricated gyroscopes at atmospheric pressure are measured to be 0.109 deg/sec, 0.055 deg/sec, and 1.80 deg/sec for SMG, DMG, and QMG, respectively. At vacuum, the respective resolutions of these gyroscopes improve significantly, reaching to 106 deg/hr with the SMG and 780 deg/hr with the QMG, even though discrete readout electronics are used. Acceleration sensitivity measurements at atmosphere reveal that QMG has the lowest bias g-sensitivity and the scale factor g sensitivity of 1.02deg/sec/g and 1.59(mV/(deg/sec))/g, respectively. The performance levels of these multi-mass gyroscopes can be even further improved with high performance integrated capacitive readout electronics and precise sense mode phase matching.