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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"siliconcontaining copolymer"" "subject:"siliconcontaining bipolymer""

1

Synthesis of Functional Multilayer Coatings by Plasma Enhanced Chemical Vapor Deposition

Xiao, Zhigang 02 July 2004 (has links)
No description available.
PECVD
ECR
Multilayer Coating
Silicon Dioxide
Silicon Nitride
Silicon-Containing Polymer
TiN Thin Film
ZrN Thin Films
CrN Thin Films
Ge Thin Film
ASTM B117
and DLI

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