New environmental regulations enforce the electronic industry to replace Pb-Sn solder due to Pb could contaminate our environment. Pure Sn has good material properties such as solderability, conductivity and anti-corrosion. Pure Sn is a good candidate to replace Pb-Sn solder. One of the disadvantages of pure Sn is the whisker growth phenomenon. Whisker problem has become a major concern in electronic industry due to the trend toward component miniaturization and pitch reduction. It is well understood that the root cause for tin whisker growth is the compressive stress within the tin layer. In the literature, the main stress sources are, (1) the intermetallic layer induced interface stress, (2) the difference of thermal expansion coefficient between Sn layer and substrate and (3) the mechanical residual stress from trim-form operation after tin plating. In our study, we used the electrochemical electrolysis method and Cross-section Polisher (CP) to examine the tin whisker growth mechanism. In the result, we can clearly show the Cu6Sn5 phase grow up in the tin grain boundary regions and demonstrate that the Cu6Sn5 phase formation is the main cause of the tin whisker growth. We also discuss the relationship of tin whisker growth and tin-plating process parameters that include the temperature effect; Ni underlay effect and tin-plating bath effect. For the temperature effect, the Cu6Sn5 is the major phase at 150¢XC aging. The mechanism behind its growth mechanism was grain boundary diffusion at the earlier stage and then the bulk diffusion in the later stage. The application of 150¢XC post-heat treatment could drive the bulk diffusion and form a layer type Cu6Sn5 phase to eliminate the whisker growth. For the Ni underlay effect, the Ni underlay can block the Cu atom diffusion to the tin layer and changed the tin layer stress state from compressive to tensile. Therefore, the tin whisker can be eliminated. For the tin-plating bath effect, in the sulfuric acid base and uses Triton X-100 as the surface active agent, may transform the whisker type to particular tin grain type. Thus, this tin-plating solution can restrain the tin whisker growth.