Le moyen infrarouge est la région spectrale comprise entre 2 et 20 µm. Cette gamme de longueurs d'onde présente un fort intérêt scientifique grâce à la présence des transitions vibrationnelles fondamentales caractéristiques d'espèces moléculaires en phase liquide ou gazeuse. Les capteurs en optique intégrée sont devenus une excellente alternative pour la détection in situ car ils présentent certains avantages sur les autres types de capteurs, tels que l'intégration des éléments dans un dispositif compact. Ils sont capables d'effectuer des détections sélectives et quantitative dans divers domaines sociétaux tels que la santé, la défense et l'environnement. Dans cette thèse, nous présentons la conception, la fabrication et la caractérisation à 7.7 µm d'un transducteur spectroscopique intégré à base de verres de chalcogénures. Des couches à base de Ge-Sb-Se ont été déposées par pulvérisation cathodique RF magnétron. Des guides d'onde de type ridge ont ensuite été mise en forme, par photolithographie et gravure sèche (gravure ionique réactive) avec un plasma de CHF3. Différentes structures ont ainsi pu être réalisées : guides droits, jonctions Y, guide en spirale ou encore guides en S. En outre, la propagation guidée a été observé à 7.7 µm et des pertes de propagation égales à 2.5 dB/cm ont été mesurées à cette longueur d'onde. Enfin, des substances chimiques en phase liquide (isopropanol et acide acétique dissous dans du cyclohexane) ont été détectées par onde évanescente. Des limites de détection égales à 2 %v/v et 0.2 %v/v ont été, respectivement, démontrées à 7.7 µm pour l'isopropanol et l'acide acétique. Enfin, des simulations ont démontré le potentiel de ce capteur intégré pour la détection de substances polluantes contenues dans l'eau ou dans l'air avec des limites de détection inférieures à celles imposées par les normes internationales de l'environnement. L'ensemble de ces résultats représente une première étape prometteuse vers le développement d'applications dans le moyen Infrarouge au sein du laboratoire Foton. / The mid-infrared is a spectral range (2-20 µ m) of great scientific and technological interest. Indeed, the strong vibrational absorption bands of numerous molecules overlap this wavelength range. Thus, the mid-infrared has become in the last years a suitable solution for chemical sensing applications in gas or liquid phase. Furthermore, on-chip sensors provide several advantages over other kind of sensors, such as high integration of elements in a compact device and low fabrication cost by an easy-going to mass production. They could allow quantitative, sensitive and selective detection for health, defense and environmental applications. This thesis presents the design, fabrication and optical characterization at 7.7 µ m of a spectroscopic optical integrated sensor based on chalcogenide glasses. Ge-Sb-Se multilayered structures were deposited by RF magnetron sputtering. Using i-line photolithography and fluorine-based reactive ion etching (RIE-ICP), ridge waveguides were processed as straight waveguide, Y-junction, spiral and S-shape waveguides. Single-mode optical propagation at 7.7 µ m was observed by optical near-field imaging and optical propagation losses of 2.5 dB/cm were measured. Finally, chemical substances in liquid phase (isopropanol - and acetic acid, both dissolved in cyclohexane) were detected at 7.7 µ m by evanescent field. Limits of detection of 2 %v/v and 0.2 %v/v are demonstrated, respectively, for isopropanol and acetic acid. Furthermore, simulations were performed to assess the potential of the optical integrated sensor to achieve limits of detection lower than environmental and health standards for air and water pollutants. These results represent a first promising step towards the development of mid-infrared applications at the Foton laboratory.

Monitoring of emulsion properties is important in many applications, like in foods and pharmaceutical products, or in emulsion polymerization processes, since aged and broken emulsions perform worse and may affect product quality. In machining processes, special types of emulsions called metalworking fluids (MWF) are widely used, because of its combined characteristics of cooling and lubrication, increasing the productivity, enabling the use of higher cutting speeds, decreasing the amount of power consumed and increasing tool life. Even though emulsion quality monitoring is a key issue in manufacturing processes, traditional methods are far from accurate and generally fail in providing the tools for determining the optimal useful life of these emulsions, with high impact in costs. The present study is dedicated to the application of a spectroscopic sensor to monitor MWF emulsion destabilization, which is related to changes in its droplet size distribution. Rapeseed oil emulsions, artificially aged MWF and MWF in machining application were evaluated, using optical measurements and multivariate calibration by neural networks, for developing a new method for emulsion destabilization monitoring. The technique has shown good accuracy in rebuilding the droplet size distribution of emulsions for monomodal and bimodal distributions and different proportions of each droplet population, from the spectroscopic measurements, indicating the viability of this method for monitoring such emulsions. This study is part of a joint project between the University of São Paulo and the University of Bremen, within the BRAGECRIM program (Brazilian German Cooperative Research Initiative in Manufacturing) and is financially supported by FAPESP, CAPES, FINEP and CNPq (Brazil), and DFG (Germany). / Sem resumo em português.

Monitoring of emulsion properties is important in many applications, like in foods and pharmaceutical products, or in emulsion polymerization processes, since aged and broken emulsions perform worse and may affect product quality. In machining processes, special types of emulsions called metalworking fluids (MWF) are widely used, because of its combined characteristics of cooling and lubrication, increasing the productivity, enabling the use of higher cutting speeds, decreasing the amount of power consumed and increasing tool life. Even though emulsion quality monitoring is a key issue in manufacturing processes, traditional methods are far from accurate and generally fail in providing the tools for determining the optimal useful life of these emulsions, with high impact in costs. The present study is dedicated to the application of a spectroscopic sensor to monitor MWF emulsion destabilization, which is related to changes in its droplet size distribution. Rapeseed oil emulsions, artificially aged MWF and MWF in machining application were evaluated, using optical measurements and multivariate calibration by neural networks, for developing a new method for emulsion destabilization monitoring. The technique has shown good accuracy in rebuilding the droplet size distribution of emulsions for monomodal and bimodal distributions and different proportions of each droplet population, from the spectroscopic measurements, indicating the viability of this method for monitoring such emulsions. This study is part of a joint project between the University of São Paulo and the University of Bremen, within the BRAGECRIM program (Brazilian German Cooperative Research Initiative in Manufacturing) and is financially supported by FAPESP, CAPES, FINEP and CNPq (Brazil), and DFG (Germany). / Sem resumo em português.

[ES] Esta tesis se ha centrado en el modelado, diseño y demostración experimental de un sensor espectroscópico integrado basado en un AWG (del inglés Arrayed Waveguide Grating). El dispositivo ha sido diseñado y fabricado en una nueva plataforma de nitruro de silico (Si3N4) en oxido de silico (SiO2) desarrollada en España. El trabajo realizado en esta tesis se puede dividir en dos secciones principalmente. En la primera parte, se describe el panorama general de las plataformas de Si3N4 existentes y su estado del arte, junto con la descripción de los procesos de fabricación y caracterización de nuestra plataforma de Si3N4 con 300 nm de altura en la capa de guiado. En la segunda parte, se presenta el dispositivo bautizado como Integrated Optical Spectroscopic Sensor (IOSS). El IOSS consiste en un AWG cuyo conjunto de guías de onda está dividido en dos subgupos diseñados para replicar los canales del AWG. Las guías de uno de los subgrupos contienen ventanas de sensado, que están definidas por secciones en las que el núcleo de las guías está al descubierto y, por tanto, en contacto con el medio que las rodea. De esta manera, el sensado se lleva a cabo mediante la interacción del campo evanescente con la muestra depositada. Las guías del segundo subconjunto permanecen inalteradas. Por lo tanto, el dispositivo proporciona al mismo tiempo los espectros de sensado y de referencia. El modelo matemático del IOSS, su procedimiento de diseño y la prueba de concepto del sensor configurado para espectroscopía de absorción se describen en esta tesis. / [CAT] La present tesi s'ha centrat en el modelatge, disseny i demostració experimental d'un sensor espectroscòpic integrat basat en un AWG (de l'anglès Arrayed Waveguide Grating). El dispositiu ha sigut dissenyat i fabricat en una nova plataforma de nitrur de silici (Si3N4) en òxid de silici (SiO2) desenvolupada a Espanya. El treball realitzat en aquesta tesi es pot dividir en dues seccions principalment. En la primera part, es descriu el panorama general de les plataformes de Si3N4 existents i el seu estat de l'art, juntament amb la descripció dels processos de fabricació i caracterització de la nostra plataforma de Si3N4 amb 300 nm d'altura en la capa de guiat. En la segona part, es presenta el dispositiu batejat com Integrated Optical Spectroscopic Sensor (IOSS). El IOSS consisteix en un AWG en el que el seu conjunt de guies d'ona està dividit en dos subgrups dissenyats per a replicar els canals del AWG. Les guies d'un dels subgrups conté finestres de detecció, que estan definides per seccions en les quals el nucli de les guies d'ona està al descobert i en contacte amb el mitjà que li envolta. D'aquesta manera, la detecció es duu a terme mitjançant la interacció del camp evanescent amb la mostra depositada. Les guies del segon subconjunt romanen inalterades. Per tant, el dispositiu proporciona al mateix temps els espectres de detecció de referència. El model matemàtic del IOSS, el seu procediment de disseny i la prova de concepte del sensor configurat per a espectroscopia d'absorció es descriuen en aquesta tesi. / [EN] This thesis is focused on the model, design and experimental demonstration of an integrated spectroscopic sensor based on a modified Arrayed Waveguide Grating (AWG). The device has been designed and fabricated in a new silicon nitride (Si3N4) on silicon oxide (SiO2) platform developed in Spain. The work performed for this thesis can be then divided into two main sections. In the first part, an overview of the existing Si3N4 platforms and their state of art is described, alongside the report on the fabrication and characterization of our 300 nm guiding film height Si3N4 platform. On the second part, the device named Integrated Optical Spectroscopic Sensor (IOSS) is presented. The IOSS consists of an AWG which arrayed waveguides are divided into two sub-sets engineered to replicate the AWG channels. The waveguides of one of the sub-sets contain sensing windows, defined as waveguides sections which core is in contact with the surrounding media. Thus, the sensing is performed through evanescent field interaction with the sample deposited. The waveguides from the second sub-set remain isolated. Therefore, the device provides both sensing and reference spectra. The IOSS mathematical model, design procedure and proof of concept configured for absorption spectroscopy are reported in this thesis. / Micó Cabanes, G. (2020). Integrated Spectroscopic Sensor fabricated in a novel Si3N4 platform [Tesis doctoral]. Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/159381