Recent advances in the miniaturization, functionality, and integration of integrated circuits and packages, such as the system-on-package (SOP) methodology, require increasing use of microvias that generates vertical signal paths in a high-density multilayer substrate. A scanning projection excimer laser system has been utilized to fabricate the microvias. In this thesis, a novel technique implementing statistical experimental design and neural networks (NNs) is used to characterize and model the excimer laser ablation process for microvia formation. Vias with diameters from 10 50 micrometer have been ablated in DuPont Kapton(r) E polyimide using an Anvik HexScan(tm) 2150 SXE pulsed excimer laser operating at 308 nm. Accurate NN models, developed from experimental data, are obtained for microvia responses, including ablated thickness, via diameter, wall angle, and resistance. Subsequent to modeling, NNs and genetic algorithms (GAs) are utilized to generate optimal process recipes for the laser tool. Such recipes can be used to produce desired microvia responses, including open vias, specific diameter, steep wall angle, and low resistance. With continuing advancement in the use of excimer laser systems in microsystems packaging has come an increasing need to offset capital equipment investment and lower equipment downtime. In this thesis, an automated in-line failure diagnosis system using NNs and Dempster-Shafer (D-S) theory is implemented. For the sake of comparison, an adaptive neuro-fuzzy approach is applied to achieve the same objective. Both the D-S theory and neuro-fuzzy logic are used to develop an automated inference system to specifically identify failures. Successful results in failure detection and diagnosis are obtained from the two approaches. The result of this investigation will benefit both engineering and management. Engineers will benefit from high yield, reliable production, and low equipment down-time. Business people, on the other hand, will benefit from cost-savings resulting from more production-worthy (i.e., lower maintenance) laser ablation equipment.

Fischer-Tropsch Synthesis (FTS) is a promising technology for the production of ultra-clean fuels and chemical feedstocks from biomass, coal, or natural gas. Iron catalysts are ideal for conversion of coal and biomass. However, precipitated iron catalysts used in slurry-bubble column reactors suffer from high attrition resulting in difficulty separating catalysts from product and increased slurry viscosity. Thus, development of an active and selective-supported iron catalyst to manage attrition is needed. This thesis focuses on the development of a supported iron catalyst and kinetic models of FTS on the catalyst using advanced statistical methods for experimental design and analysis. A high surface area alumina, modified by the addition of approximately 2 wt% lanthanum, was impregnated with approximately 20 wt% Fe and 1% Pt in a two step procedure. Approximately 10 wt% Fe and 0.5 wt% Pt was added in each step. The catalyst had a CO uptake of 702 μmol/g, extent of reduction of 69%, and was reduced at 450°C. The catalyst was stable over H2 partial pressures of 4-10 atm, CO partial pressures of 1-4 atm, and temperatures of 220-260°C. Weisz modulus values were less than 0.15. A Langmuir-Hinshelwood type rate expression, derived from a proposed FTS mechanism, was used with D-optimal criterion to develop experiments sequentially at 220°C and 239°C. Joint likelihood confidence regions for the rate expression parameters with respect to run number indicate rapid convergence to precise-parameter estimates. Difficulty controlling the process at the designed conditions and steep gradients around the D-optimal criterion resulted in consecutive runs having the same optimal condition. In these situations another process condition was chosen to avoid consecutive replication of the same process condition. A kinetic model which incorporated temperature effects was also regressed. Likelihood and bootstrap confidence intervals suggested that the model parameters were precise. Histograms and skewness statistics calculated from Bootstrap resampling show parameter-effect nonlinearities were small.