In order to meet the demands of the continuous scaling of electronic devices, new technologies have been developed over the years. As we approach the newest levels of miniaturization, current technologies, such as physical vapor deposition and chemical vapor deposition, are reaching a limitation in their ability to successfully fabricate nano sized electronic devices. Supercritical fluid deposition (SFD) is a demonstrated technology that provides excellent step coverage for the deposition of metals and metal oxides within narrow, high aspect ratio features. This technique shows the potential to satisfy the demands of integrated circuit miniaturization while maintaining a cost effective process needed to keep the technology competitive. In order to complement SFD technology heuristics for scale-up, an understanding of the deposition mechanism and kinetics and resolution of integration issues such as interfacial film adhesion must be resolved. It is critical to have a fundamental understanding of the chemistry behind the reaction process in supercritical fluid deposition. For this purpose, a detailed kinetic study of the deposition of ruthenium from bis(2,2,6,6-tetramethyl-3,5-heptanedionato) (1,5-cyclooctadiene) ruthenium(II) is carried out so that growth rate orders and a mechanism can be established. These predictive kinetic results provide the means to control the reaction which allows for overall optimization of the process. Reliability is of the utmost importance for fabricated devices since they must withstand harsh steps in the fabrication process as well as perform and last under standard and extreme usage conditions. One issue of reliability is assessed by addressing the adhesion of the metallization layers deposited by SFD. A quantitative determination of the interfacial adhesion energy of as deposited and pretreated copper metallization layers from SFD onto barrier layers is used to determine the potential for integration of these films for industry standards. Extension of the basics of SFD by performing co-deposition of multiple compounds, layer-by-layer deposition for device fabrication and integration with other unique technologies for novel applications demonstrates the ability of this technique to satisfy a wide range of commercial applications and be used as the basis for new technologies. Co-depositions of Ce/Pt, Co/Pt, Ba/Ti and Nd/Ni for the fabrication of functional direct methanol fuel cell electrodes, magnetic alloys for media storage applications, high k dielectric films for alternative energy storage devices and alternative materials for solid oxide fuel cell cathodes, respectively, are performed. Layer-by-layer deposition with masking is used to fabricate nanometer scale capacitors. Finally, plasma spray technology is combined with the rapid expansion of supercritical solvents technique to form a novel, patent pending, process that is used to fabricate next generation photovoltaic cells.

The applications of dense gas technology (DGT) in modern particle engineering have shown promising results in producing submicron particles with uniform particle morphology. In this study, two configurations of dense gas antisolvent processes were employed for the micronization, encapsulation and co-precipitation of pharmaceutical compounds. The encapsulation of superparamagnetic iron oxide nanoparticles (SPIONs) by a pH-responsive polymer (Eudragit?? S100) was successfully performed using the supercritical antisolvent (SAS) process. Nanocomposites of less than 200nm in diameter with encapsulated SPIONs content as high as 16 wt% were achieved. Magnetic characterization of the product was also performed and the data were fitted by the Langevin equation. The superparamagnetic properties of the composites were preserved and the effective magnetic size was about 10 nm. The magnetically and pH-responsive nanocomposites can be potentially utilized as magnetic resonance imaging contrast agents and drug carriers. Screening experiments of 8 active pharmaceutical ingredients and 5 pharmaceutical excipients were performed using the recently patented atomized rapid injection solvent extraction (ARISE) process. Candidates with promising product morphology and recovery were selected for co-precipitation studies. The co-precipitation of the anti-cancer drug 5-fluorouracil (5FU) and poly l-lactic acid (PLLA) was conducted to develop a controlled release system. Experiments were designed based on a two-level, three-factor factorial design, in order to investigate the effects of processing parameters on product characteristics. Submicron PLLA-5FU composites (diameter<0.8 ??m) with a drug loading of 7.4 wt% were produced.

Title from PDF of title page (University of Missouri--Columbia, viewed on March 2, 2010). The entire thesis text is included in the research.pdf file; the official abstract appears in the short.pdf file; a non-technical public abstract appears in the public.pdf file. Dr. Sunggyu Lee, Dissertation Advisor. Vita. Includes bibliographical references.

Thesis (Ph. D.)--Ohio State University, 2007. / Title from first page of PDF file. Includes bibliographical references (p. 213-223).

Thesis (m.S. Ch. E.)--University of Puerto Rico, Mayagüez Campus, 2004. / Tables. Printout. Includes bibliographical references (leaves 88-91.)

Structurer les matériaux composites, pour au moins une des phases, à l’échelle nanométrique, c’est-à-dire former des matériaux nanocomposites, est une voie pour optimiser nombre de leurs propriétés. Le domaine de la propulsion et des propergols n’échappe pas à cette règle. C’est dans ce contexte que s’est déroulée cette thèse sur la synthèse de nanocomposites ‘nanoparticules métalliques/polymère’ en milieux fluides supercritiques (FSCs). Les principales étapes rencontrées dans l’élaboration de nanocomposites en milieu scCO2 ont été étudiées : i) Etude thermodynamique des systèmes polymère/scCO2, ii) Mesure de leur viscosité et iii) Synthèse de nanoparticules inorganiques dans des polymères en milieux FSCs. De plus, une partie importante de la thèse a concerné la synthèse de nanoparticules d’aluminium en milieux fluides supercritiques en vue de leur intégration dans des matrices polymères pour des applications propergols. / Structuring composite materials, at least for one phase, at the nanometer scale, that is to say synthesize nanocomposite materials, is an interesting way to optimize their properties. The field of propulsion and propellants follows this rule. This is the context of this PhD dealing with the synthesis of nanocomposites constituted of metallic nanoparticles and polymer in supercritical fluids. The main steps for the formation of nanocomposites in scCO2 have been studied: i) Thermodynamical study of polymer/scCO2 systems, ii) Viscosity measurements of polymer/scCO2 systems and iii) Synthesis of inorganic nanoparticles in polymers in supercritical fluids. Moreover, an important part of this work has concerned the synthesis of aluminum nanoparticles in supercritical fluids in order to incorporate them in polymer matrixes for applications to propellants.

L'oxyde de zinc (ZnO) est un matériau connu et intensivement étudié pour des applications optoélectroniques dans le domaine de l’ultraviolet en raison de son large gap énergétique (3,34 eV). Cependant, les applications UV basées sur des matériaux nanostructurés représentent un véritable défi : la diminution en taille des particules obtenues généralement par des voie de chimie en solution permet d’accroître la surface spécifique mais en stabilisant des défauts à l’origine d’émissions visibles. Au cours des dernières décennies, des progrès concernant la qualité des particules ont été enregistrés au moyen des techniques physiques basées sur les dépôts en phase gazeuse à haute température. Cependant, la taille et le contrôle de la morphologie des particules restent difficiles. En prenant en compte l'état de l'art portant sur les propriétés optiques des particules de ZnO, c’est la voie supercritique qui a été mise en œuvre dans cette étude. Tout d'abord des réacteurs micro/millifluidiques ont été développés de façon à accroître la quantité de matériaux produits (gramme/jour) tout en conservant des propriétés d’émission dans l’ultraviolet. Puis les caractéristiques physico-chimiques des particules ont été étudiées au regard de l'influence de la dimension des réacteurs et de l'hydrodynamique des systèmes. Les propriétés de luminescence sont reportées à température ambiante et basses températures et comparées expérimentalement à la réponse d’un monocristal et des données de la littérature. Les mécanismes de formation (nucléation et croissance) des nanoparticules ont été élucidés et ont permis de comprendre les réponses optiques uniques de ces particules. / Zinc oxide (ZnO) is a well-known and intensively studied material for optoelectronic applications in the ultraviolet (UV) spectrum region due to its wide band gap energy - 3.34 eV. However, the UV applications based on nanostructured ZnO present a big challenge due to the small size of the nanostructures i.e. a large surface-to-volume ratio resulting the appearance of the visible emission originated from the surface defects. In the last decades, the progress concerning the fabrication of UV-emitting ZnO nanostructures was carried out through the high temperature gas phase based approach. However, the size and shape control of ZnO nanostructures obtained with this approach is still difficult. Taking into account the state of the art in the optics based on ZnO nanomaterials, this Ph.D. thesis demonstrates the development of new supercritical fluids based approach for the synthesis of ZnO nanostructures with UV-emitting only PL properties. First of all in this thesis, we have developed continuous supercritical set up from micro- up to millifluidic reactor dimension for the synthesis of a larger quantity of UV-emitting ZnO nanocrystals (a gram scale per day). The influence of reactor dimension associated with hydrodynamics on physico-chemical characteristics was investigated. ZnO nanocrystals formation mechanism was studied as a function of the residence time in our continuous supercritical fluids process for the understanding of the nucleation and growth of the nanocrystals. Moreover, ZnO nanocrystals formation mechanism determines UV-emitting properties of this material. The optical properties at room and low temperature were deeply investigated with comparing to the PL emission of several types of ZnO particles and single crystal for the understanding of the nature of UV emission.

Dans un contexte environnemental où les législations concernant la teneur ensoufre présent dans les coupes pétrolières sont de plus en plus drastiques, le développementde nouveaux catalyseurs toujours plus actifs est donc nécessaire. Cette augmentation del´activité catalytique est possible à plusieurs niveaux dont, par exemple, par l´utilisation denouveaux procédés de synthèse tel que l´emploi de la voie fluides supercritiques. Dans unpremier temps, l´objectif est d´étudier les éléments utilisés pour préparer ces catalyseurs afind´avoir une vision plus large des réserves, des utilisations, des possibilités de substitutions…La criticité de ces éléments a donc été évaluée par le biais de plusieurs indicateurs. Dans unsecond temps, la compréhension de la synthèse de catalyseurs d´hydrodésulfuration (HDS) aété étudiée. Pour cela des expériences utilisant différents solvants et précurseurs métalliquesont été suivies via des analyses in situ Raman. Après avoir défini les résultats les plusprobants, le procédé de préparation de catalyseurs HDS assisté par le CO2 supercritique(scCO2) a été optimisé à travers une étude paramétrique. Pour cela, la température, lapression, le solvant d´imprégnation, le ratio entre CO2 et solvant d´imprégnation, le temps deréaction et le chargement en métaux ont été variés. Les matériaux obtenus ont ensuite étéfinement caractérisés (microscopie, DRX, Raman, ICP, microsonde) avant d´être activés parsulfuration et testés dans différentes réactions catalytiques (hydrogénation du toluène,hydrodésulfuration du dibenzothiophène et du 4,6-diméthyldibenzothiophène). / In an environmental context where legislations concerning the sulfur content in oilare increasingly drastic, the research for new and ever more active catalysts is necessary. Thisincrease of the catalytic activity is possible at several levels, for example, with the use of novelsynthetic processes such as the use of the supercritical fluids route. In a first stage, theobjective is to study the elements used to prepare these catalysts in order to have a broaderview of the reserves, the uses, the possibility of substitutions ... The criticality of these elementshas therefore been evaluated by means of several indicators. In a second stage, theunderstanding of the synthesis of hydrodesulfurization catalysts (HDS) was studied. For thispurpose, experiments using different solvents and metallic precursors were followed by in situRaman analyses. After defining the most convincing results, the process for preparing HDScatalysts assisted by supercritical CO2 medium (scCO2) was optimized through a parametricstudy. For this, temperature, pressure, impregnation solvent, ratio of CO2 to impregnationsolvent, reaction time and metal loading were varied. The materials obtained were thencharacterized (microscopy, DRX, Raman, ICP, microprobe) before being activated bysulfidation and tested in various catalytic reactions (hydrogenation of toluene,hydrodesulfurization of dibenzothiophene and 4,6-dimethyldibenzothiophene).

Neste trabalho estudamos as propriedades estruturais e eletrônicas do CO2 supercrítico, iniciando com a avaliação de campos de força balizados por aplicações anteriores de simulação quântica do tipo Dinâmica Molecular de Born-Oppenheimer (BOMD). A aplicação principal é a descrição do espectro de absorção da paranitroanilina (pNA) em CO2 supercrítico. O CO2 supercrítico pode ser considerado como uma ``alternativa verde para os solventes orgânicos convencionais e a busca por solventes mais seguros, juntamente com a crescente consciência sobre a questão ambiental, tem levado a uma ``química verde com o intuito de se buscar soluções sustentáveis. A princípio estudamos três campos de força tradicionais para o CO2, aplicados na região supercrítica. Estes campos de força podem ser validados por meio de simulação de primeiros principios. Iniciamos considerando a condição supercrítica para o CO2 como T = 315 K, = 0.81 g/cm³ e o campo de força clássico de Zhang e Duan. Depois fizemos uma análise consistindo de uma alteração de cargas e também da geometria do CO2, que seria um caso não linear no qual foi considerado um ângulo (O-C-O) = 176° . O estudo do solvatocromismo da pNA em CO2 supercrítico foi feito considerando todas estas situações descritas para o campo de força, avaliando os resultados experimentais e teóricos já existentes. A simulação gera estruturas usando Monte Carlo e são usadas em cálculos de Mecânica Quântica do tipo DFT (CAM-B3LYP). Por fim, para verificar a importância da geometria do sistema, ou seja, a propriedade estrutural, consideramos uma outra geometria para a pNA, diferente da geometria que utilizamos a princípio nas simulações com o CO2 supercrítico. Essa ``geometria modificada\" da pNA foi obtida de uma simulação existente de Born-Oppenheimer e a utilizamos numa simulação Monte Carlo com o caso não linear para o CO2 supercrítico. Os resultados de todas essas simulações nos indicaram que a alteração das cargas e por consequência a alteração da polarização do solvente, não possui muita importância na mudança do espectro de absorção da pNA. Ao se considerar o CO2 não linear, obtivemos resultados um pouco melhor, mas não muito, comparados com a previsão teórica. Mas os resultados mais significativos são os obtidos para a situação em que utilizamos a geometria modificada da pNA. Uma parte do deslocamento do máximo da banda de absorção no espectro da pNA vem com a contribuição eletrostática da interação soluto-solvente e a outra parte vem da mudança estrutural. / In this work we study the structural and electronic properties of CO2 supercritical starting with the evaluation of force fields based on previous ab initio Born-Oppenheimer molecular dynamics (BOMD). The main application is the description of the absorption spectrum of paranitroanilina (pNA) in supercritical CO2. The supercritical CO2 is considered a ``green alternative\" to conventional organic solvents and the search for safer solvents, along with the increasing awareness of environmental issues has led to the interest in ``green chemistry\", seeking sustainable solutions. At first we studied three traditional force fields for CO2, applied in the supercritical region. These force fields can be validated by first principles simulation. We considered the supercritical condition for CO2 as T=315K, =0.81g/cm³ and the classical force field of Zhang and Duan. We also did an analysis consisting of a change of the atomic point charges and the geometry of CO2, including a non-linear case in which an angle (O-C-O)=176° was considered. The study of the solvatochromism of pNA in supercritical CO2 was made considering all these situations, evaluating the theoretical outcome and the experimental results. The simulation generates structures using Monte Carlo and are used in quantum mechanics calculations of DFT (CAM-B3LYP). To verify the importance of geometry in the system, that is, the structural property, we considered another geometry for the pNA geometry different from that we used initially in the simulations with supercritical CO2. This ``modified geometry\" of pNA was obtained from a previous Born-Oppenheimer simulation and was used in a Monte Carlo simulation with the non-linear case for supercritical CO2. The results of all these simulations indicated that the alterations of charge and thus the change in the polarization of the solvent, has no great importance in the change of the absorption spectrum of the pNA. When considering the nonlinear CO2, we obtained slightly better results. But the most significant results are obtained for the situation in which we use the modified geometry of pNA. Part of the shift in the absorption spectrum of the pNA comes with the electrostatic contribution of solute-solvent interaction and the other part comes from the structural change.

Conselho Nacional de Desenvolvimento CientÃfico e TecnolÃgico / FundaÃÃo de Amparo à Pesquisa do Estado do Cearà / CoordenaÃÃo de AperfeiÃoamento de Pessoal de NÃvel Superior / A produÃÃo de biodiesel pela reaÃÃo de esterificaÃÃo enzimÃtica por intermÃdio de fluidos supercrÃticos pode ser usado na sÃntese de biocombustÃveis. O objetivo deste trabalho foi avaliar parÃmetros operacionais de sÃntese enzimÃtica de oleato de etila em meio supercrÃtico. A primeira etapa foi a preparaÃÃo do biocatalisador atravÃs da imobilizaÃÃo da lipase de Candida antarctica tipo B (CalB), por ligaÃÃo covalente, utilizando quitosana como suporte. No procedimento de imobilizaÃÃo, realizou-se a ativaÃÃo do suporte, utilizando como agentes ativantes: glicidol, glutaraldeÃdo e/ou etilenodiamina (EDA). O segundo passo consistiu da medida da hidrÃlise da enzima imobilizada, que foi avaliada pela hidrÃlise do butirato de para-nitrofenila (pNPB). Em ordem para determinar a melhor condiÃÃo operacional da reaÃÃo, foi conduzido um planejamento experimental (2^3), com os seguintes parÃmetros: razÃo molar Ãlcool:Ãcido graxo, temperatura, e tempo de reaÃÃo, entÃo o melhor resultado foi obtido usando quitosana 5% (m/V) - Glioxil-EDA-GlutaraldeÃdo, de 18,95 U/g. No terceiro passo, realizou-se as reaÃÃes de esterificaÃÃo utilizando Ãcido oleico, Ãlcool etÃlico e diÃxido de carbono como fluido supercrÃtico. A quantidade de Ãleo usada nestas reaÃÃes foi constante, com 1,0 g de biocatalisador correspondendo a 10% da massa de Ãleo. Um planejamento experimental foi realizado para se avaliar as condiÃÃes operacionais (razÃo molar, tempo de reaÃÃo e temperatura). O maior valor de conversÃo foi de 46,9% para uma temperatura de 29,9 ÂC, razÃo molar etanol: Ãcido oleico igual 4,50: 1 e tempo reacional de 6,5 horas. O aumento da temperatura influenciou a conversÃo positivamente, dentro do intervalo estudado. O parÃmetro razÃo molar Ãlcool: Ãcido oleico nos intervalos estudados (2,5:1; 4,5:1; 6,5:1) mostrou que os valores com a menor relaÃÃo de razÃo molar possuem as maiores taxas de conversÃo. Ocorreu a perda de atividade catalÃtica durante os procedimentos de reciclo. Adicionalmente, a baixa conversÃo de Ãsteres etÃlicos pode ser solucionada com o uso de zeÃlita para remoÃÃo de Ãgua do meio, uma vez que se acredita que a presenÃa de Ãgua impossibilita a mÃxima conversÃo. / Biodiesel production by enzymatic esterification reaction using supercritical fluids can be used for the synthesis of biofuel. The objective of this study was to evaluate the operational parameters of enzymatic synthesis in supercritical medium. The 1st step was the preparation of the biocatalyst by immobilization of lipase from Candida antarctica type B (Calb) by covalent bond using chitosan as support. In the immobilization procedure, it was the following as activating agents: glycidol, glutaraldehyde and ethylenediamine (EDA). The 2nd step was the measurement of hydrolysis of the immobilized enzyme, this was evaluated by hydrolysis of butyrate p.nitrophenyl butyrate (PNPB). In order to determine the best operational conditions of the reacton, it was enzyme suport conducted a experimental design (2^3), in the following parameters: molar rather alcohol oil, temperature, and then the best result was obtained when using chitosan 5% (w/v) - glyoxyl -EDA-glutaraldehyde, of 18.95 U / g. In Step 3, we carried out the esterification reactions using oleic acid, ethanol and carbon dioxide as supercritical fluid. It should be noticed that the amount of oleic acid used in these reactions was constant, with 1 g of immobilized enzyme, corresponding to 10% by weight oleic acid. An experimental design was conducted to evaluate the operational conditions molar ratio, reaction time and temperature. The highest rate was 46.9% at a temperature of 29.9 ÂC, molar ratio ethanol: oleic acid equal to 4.50:1, and a reaction time of 6.50 hours. The temperature affected the conversion within the range studied. The parameter molar ratio alcohol: oleic acid in the intervals studied (2.5:1, 4.5:1, 6.5:1) showed that the values with the lowest ratio of molar ratio with the highest conversion rates. It was observed a lost of catalytic activity during the recycling procedure. Additionally, it should be mentioned that a low conversion of ethyl esters, might be solved with the use of zeolite to remove water from medium, once it believed that that the presence of water precludes the maximum conversion.