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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"teflon AF patterning"" "subject:"deflon AF patterning""

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ELECTRON-BEAM PATTERNING OF TEFLON AF FOR SURFACE PLASMON RESONANCE SENSING

Sultan, Mansoor A. 01 January 2015 (has links)
Variable pressure electron beam etching and lithography for Teflon AF has been demonstrated. The relation between dose and etching depth is tested under high vacuum and water vapor. High resolution structures as small as 75 nm half-pitch have been resolved. Several simulation tools were tested for surface plasmon excitation. Grating based dual mode surface plasmon excitation has been shown numerically and experimentally.
Dual Mode Surface Plasmon
Grating Based SPR
VP-EBL
Teflon AF patterning
Simulation
Electrical and Electronics
Electromagnetics and photonics
Nanotechnology fabrication

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