Nanofabrication is the process of making functional structures with arbitrary patterns having nanoscale dimensions. Nanofabrication has been widely implemented in industry for improving microelectronic devices and data storage technology, to increase the component density, to lower the cost and to increase the performance. Other areas of applications include optics, cell biology and biomedicine. One of the most critical challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. In this thesis work, we demonstrate the possibility to parallelize the thermochemical nanolithography (TCNL) by creating nanoscale patterns with a tip array, containing five identical thermal cantilevers. The versatility of our technique is demonstrated by creating nanopatterns simultaneously on multiple surfaces, including graphene oxide and conjugated polymers. This work also involves the study of the reduction process of graphene fluoride through TCNL and the study of the local anodic oxidation of epitaxial graphene, to create high quality graphene nanoribbons.

A system for the patterning of amines through the thermal decomposition of a thin polymer film was proposed. The polymer was synthesized and films were produced by spin coating. The pyrolysis of both the polymer and the films was studied. The physical properties of the film, such as Tg, were controlled through crosslinking of the polymer and the crosslinking conditions were optimized. Analyses of the reactions that occur on the film as a result of thermal decomposition were studied. These studies seem to indicate that the thin film system studied is viable option toward the patterning of amines. The ability to bind material to the polymer films after deprotection was demonstrated using fluorescent protein and fluorescein isothiocyanate. Micron scale patterns of these fluorescent molecules were created and imaged, successfully demonstrating the viability of the system for patterning. Patterns of polyphenylene vinlyene were produced through the thermal decomposition of a tetrahydrothiophenium chloride salt precursor. Images of the patterns were obtained.

Thermochemical Nanolithography (TCNL) is a scanning probe microscope (SPM) based lithographic technique modified with a semi-conducting cantilever. This cantilever is capable of locally heating a surface and with a well-engineered substrate, this spatially confined heating induces chemical or physical transformation. While previous works focused primarily on proof of principle and binary studies, there is limited research on controlling and understanding the underlying mechanisms governing the technique. In this thesis, a chemical kinetics model is employed to explain the driving mechanisms and to control the technique. The first part focuses on studying surface reactions. By coupling a thermally activated organic polymer with fluorescence microscopy, the chemical kinetics model is not only verified but also applied to control the surface reactions. The work is then expanded to include 3D effects, and some preliminary results are introduced. Finally, applications are discussed.

Various solution-processed methods have been employed in this work. For the synthesis of graphene, a chemical exfoliation method has been used to generate large graphene flakes in the solution phase. In addition, chemical or electro polymerization has been used for synthesizing polyanthracene, which tends to form graphene nanoribbon through cyclodehydrogenation. For the device fabrication, graphene oxide (GO) thin films were deposited from solution phase on the vapor-silanzed aminosilane surface to make semiconducting active layer or conducting electrodes. Gold nanoparticles (AuNPs) were selectively self-assembled from solution phase to pattern nanowires.