Global ETD Search

1	Modeling and controlling thermoChemical nanoLithography Carroll, Keith Matthew 12 January 2015 (has links) Thermochemical Nanolithography (TCNL) is a scanning probe microscope (SPM) based lithographic technique modified with a semi-conducting cantilever. This cantilever is capable of locally heating a surface and with a well-engineered substrate, this spatially confined heating induces chemical or physical transformation. While previous works focused primarily on proof of principle and binary studies, there is limited research on controlling and understanding the underlying mechanisms governing the technique. In this thesis, a chemical kinetics model is employed to explain the driving mechanisms and to control the technique. The first part focuses on studying surface reactions. By coupling a thermally activated organic polymer with fluorescence microscopy, the chemical kinetics model is not only verified but also applied to control the surface reactions. The work is then expanded to include 3D effects, and some preliminary results are introduced. Finally, applications are discussed. Gradients ThermoChemical nanolithography Chemical kinetics Thermal cantilevers Nanoscale patterning
2	Fabrication and Testing of Heated Atomic Force Microscope Cantilevers Wright, Tanya Lynn 15 April 2005 (has links) The invention of the atomic force microscope (AFM) revolutionized the scientific world by providing researchers with the ability to make topographical maps of both conducting and non-conducting surfaces with nanometer resolution. As an alternative to optical AFM methods, thermal cantilevers have been investigated as a method to measure topography. This study reports the fabrication and testing of heated AFM cantilevers. This study transfers a fabrication process first developed at Stanford University to the Georgia Institute of Technology micro-fabrication facility and fabricates six different heated AFM cantilever designs. Selective impurity doping of a silicon cantilever allows it to become electrically conductive with a resistive element near the cantilever free end. Voltage applied across the cantilever legs induces current flow through the cantilever that generates heat in the resistive element. A deep understanding of the operational behavior and limits of the AFM cantilever is required to use the cantilever as an experimental tool. Characterization experiments determined the cantilever electrical resistance and temperature response. Experiments were conducted that electrically test heated AFM cantilevers at various system input voltages. Electrical and thermal responses of these cantilevers were compared against a theoretical model. The model utilizes heat transfer fundamentals and links the thermal response to the cantilever temperature-dependent electrical characteristics. Results of this study show that the fabricated heated AFM cantilevers have a tip with a radius of curvature as small as 20nm. Cantilever temperatures can exceed 700㠩n short pulses and, because the resistive heating element is also a temperature sensor, calibration of the cantilever temperature response is possible to within 1㮍 Thermal cantilevers Electrical characterization Fabrication Topology Atomic force microscopy Spectrum analysis
3	Nanolithography on thin films using heated atomic force microscope cantilevers Saxena, Shubham 01 November 2006 (has links) Nanotechnology is expected to play a major role in many technology areas including electronics, materials, and defense. One of the most popular tools for nanoscale surface analysis is the atomic force microscope (AFM). AFM can be used for surface manipulation along with surface imaging. The primary motivation for this research is to demonstrate AFM-based lithography on thin films using cantilevers with integrated heaters. These thermal cantilevers can control the temperature at the end of the tip, and hence they can be used for local in-situ thermal analysis. This research directly addresses applications like nanoscale electrical circuit fabrication/repair and thermal analysis of thin-films. In this study, an investigation was performed on two thin-film materials. One of them is co-polycarbonate, a variant of a polymer named polycarbonate, and the other is an energetic material called pentaerythritol tetranitrate (PETN). Experimental methods involved in the lithography process are discussed, and the results of lithographic experiments performed on co-polycarbonate and PETN are reported. Effects of dominant parameters during lithography experiments like time, temperature, and force are investigated. Results of simulation of the interface temperature between thermal cantilever tip and thin film surface, at the beginning of the lithography process, are also reported. Characterization Deflection Setpoint Grain rearrangement Array Precise positioning Metrology Explosion Explosives Data storage Material Image processing Slow scan disabled Temperature Tip Local In-situ Nanoscale Electrical circuit fabrication Repair Co-polycarbonate Polymers Polycarbonates Energetic materials PETN Simulation Interface Nano-manufacturing Experiment Calibration Raman Frequency Deflagration Decomposition Detonation Build up Pile-up End capped End capping Cross linked Cross-linked Conductivity Microscale MEMS Microcantilever NEMS DPN tDPN Silicon Glass Peak InVOLS Manipulation AFM Atomic force microscope Defense Nanoscale Surface Stiffness Force Scan size Thermal cantilevers Imaging Lithography Nanolithography Thin films Cantilevers Heaters Technology Nanotechnology Scan velocity Scan rate Bake Anneal Pentaerythritol tetranitrate Thin films Thermal properties Atomic force microscopy Microlithography Nanotechnology Surfaces (Technology) Analysis

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