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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"torsional test"" "subject:"torsional est""

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Mechanical Reliability Enhancement of Single Crystal Silicon Microstructures by Means of Diamond-Like Carbon Film Coating / ダイヤモンドライクカーボン膜の全面被覆による単結晶シリコン微細構造の機械的信頼性向上

Zhang, Wenlei 23 January 2019 (has links)
京都大学 / 0048 / 新制・課程博士 / 博士(工学) / 甲第21462号 / 工博第4537号 / 新制||工||1707(附属図書館) / 京都大学大学院工学研究科マイクロエンジニアリング専攻 / (主査)教授 田畑 修, 教授 鈴木 基史, 准教授 土屋 智由, 教授 平方 寛之 / 学位規則第4条第1項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DFAM
Tensile Test
Torsional Test
Diamond-Like Carbon
Silicon
Microstructure
500

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