The work detailed here is the development of simulations and fabrication techniques used for the construction of thin-film acoustic transducers for use in the parametric pumping of spin waves. The Mason Model, a 1-D equivalent circuit simulating the responses of multilayer acoustic transducers, is implemented using ABCD-parameters in MATLAB to determine the expected response from fabricated devices. The simulation is tested by varying device parameters and comparing the changes in device resonance response to those of prior published results. Three-layer thin-film acoustic transducers were also fabricated. These transducers use zinc oxide (ZnO) as a piezoelectric layer with aluminum (Al) electrodes. Construction is accomplished using the common thin-film fabrication techniques of sputtering, thermal evaporation, etching, and lift-off patterning processes. The response of the fabricated transducers is compared to that of the simulated response by observing the transducer's resonance frequency and characteristics. These results are used to validate the simulation and the transducer fabrication process. Finally, their usefulness for the design and fabrication of an acoustic spin wave amplification system is considered. / Graduation date: 2013

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In materials evaluation applications requiring the interrogation of modified far field patterns of an ultrasonic transducer, it is desirable to use a transducer which produces a beam with a Gaussian profile. A transducer with a velocity profile which is Gaussian as a function of radius and independent of angle is described. The transducer has been constructed by depositing a circularly symmetric metallic multiple electrode array on a 12. 7 mm diameter x-cut quartz disk. Each electrode is independently connected to an impedance network optimized to produce the Gaussian distribution with less than two percent maximum error. A computer aided electrode design and normalized three dimensional ultrasonic measurements of the far field distribution are presented. / Master of Science

Health monitoring of aeronautic structures and human beings is becoming crucial because of the human safety issues. In this thesis integrated (IUTs) and flexible ultrasonic transducers (FUTs) have been developed using a sol-gel spray piezoelectric film fabrication technology. IUTs can be fabricated directly onto the structures with curved surfaces even on-site. FUTs were made using membrane substrates of thickness less than 75 mum. In-situ monitoring of AI airframe thickness was carried out and the thickness measurement accuracy was better than 36 mum and 41 mum for IUT and FUT, respectively. The thickness of the ice on top of the AI airframe was also measured. Two crucial piezoelectric constants d33 and d31 of the composite film were measured with laser interferometer and optical coherence tomography system, respectively. Pulse and breath of a human being were also monitored using flexible piezoelectric membrane sensors. In addition, bones in human body were observed using FUTs as well and their performance is comparable to that of commercial ultrasonic transducers.

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A new gage which can measure skin friction and heat flux simultaneously was designed, constructed, and tested. This gage is the combination of a non-nulling type skin friction balance and a heat flux microsensor. By mounting the heat flux microsensor directly on the surface of the floating element of the skin friction balance, it was possible to perform simultaneous measurements of the skin friction and the heat flux. The total thickness of the heat flux microsensor is less than 2 μm, so the presence of this microsensor creates negligible disruption on the thermal and the mechanical characteristics of the air flow. Tests were conducted in the Virginia Tech supersonic wind tunnel. The nominal Mach number was 2.4, and Reynolds number per meter was 4.87 x 10⁷ with total pressure of 5.2 atm and total temperature of 300 °K. Results of the tests showed that this new gage was quite reliable and could be used repeatably in the supersonic flow. This gage also has an active heating system inside of the cantilever beam of the skin friction balance so that the surface temperature of the floating element can be controlled as desired. With these features, the effects of a temperature mismatch between the gage surface and the surrounding wall on the measurements of the skin friction and the heat flux were investigated. An infrared radiometer was used to measure the surface temperature distributions. Without the active heating, the amount of temperature mismatch generated by the gage itself was from 2.5 °K to 4.5 °K. The active heating produced the temperature mismatch of 18.7 °K. The largest temperature mismatch corresponds to the levels typically found in high heat flux cases when it is expressed in dimensionless terms. This temperature mismatch made sizable effects — a 24 % increase in the skin friction measurement and a 580 % increase in the heat flux measurements. These experimental results were compared with the computational results using the Computational Fluid Dynamics code GASP. The input flow conditions were obtained from the boundary layer measurements. The temperature mismatch was input by specifying the density and the pressure at each grid point on the wall. The Baldwin-Lomax algebraic turbulence model was used with the thin layer approximations. The comparison showed that the difference in the skin friction and heat flux was less than 10 % of the measured data when the temperature mismatch was less than 8.5 °K, but the difference was increased as the amount of the temperature mismatch increased. It is presumed that the disagreement between the measurements and the calculations was caused mainly by deficiencies in the turbulence model for this complex, developing viscous flow, because the Baldwin-Lomax model cannot account for the multiple length scale in this flow. / Ph. D.

A local heat-flux measurement system was built, calibrated and tested for use in unsteady flows. The system was designed to maintain constant wall temperature boundary conditions. The measuring element is a thin-film heat flux gage made by sputter-coating gold on a substrate. A constant-temperature anemometer is used to maintain the thin-film gage at a specified temperature under fluctuating conditions. A separate temperature control system maintains the surrounding boundary at the gage temperature. The system was calibrated for both steady and unsteady flows using a specially designed calibrator for local heat flux gages. The steady calibration was done with predominantly convective heat transfer . The unsteady calibration was achieved by adding oscillating radiant energy to the surface. Consequently, quantitative results can be obtained for both mean and fluctuating components of the heat transfer. The frequency response was good to 92 hertz. Sample results are presented for unsteady heat transfer caused by the vortex shedding from a cylinder in a steady crossflow. The shedding frequency was 82 hertz. / M.S.

The goal of this research was to develop acoustic sensors and actuators for microfluidic applications. To this end, capacitive micromachined ultrasonic transducers (cMUTs) were developed which generate guided acoustic waves in fluid half-spaces and microchannels. An interdigital transducer structure and a phased excitation scheme were used to selectively excite guided acoustic modes which propagate in a single lateral direction. Analytical models were developed to predict the geometric dispersion of the acoustic modes and to determine the sensitivity of the modes to changes in material and geometric parameters. Coupled field finite element models were also developed to predict the effect of membrane spacing and phasing on mode generation and directionality. After designing the transducers, a surface micromachining process was developed which has a low processing temperature of 250C and has the potential for monolithically integrating cMUTs with CMOS electronics. The fabrication process makes extensive use of PECVD silicon nitride depositions for membrane formation and sealing. The fabricated interdigital cMUTs were placed in microfluidic channels and demonstrated to sense changes in fluid sound speed and flow rate using Scholte waves and other guided acoustic modes. The minimum detectable change in sound speed was 0.25m/s, and the minimum detectable change in flow rate was 1mL/min. The unique nature of the Scholte wave allowed for the measurement of fluid properties of a semi-infinite fluid using two transducers on a single substrate. Changes in water temperature, and thus sound speed, were measured and the minimum detectable change in temperature was found to be 0.1C. For fluid pumping, interdigital cMUTs were integrated into microchannels and excited with phase-shifted, continuous wave signals. Highly directional guided waves were generated which in turn generated acoustic streaming forces in the fluid. The acoustic streaming forces caused the fluid to be pumped in a single, electronically-controlled direction. For a power consumption of 43mW, a flow rate of 410nL/min was generated against a pressure of 3.4Pa; the thermodynamic efficiency was approximately 5x10-8%. Although the efficiency and pressure head are low, these transducers can be useful for precisely manipulating small amounts of fluid around microfluidic networks.