The primary target of this paper is to fabricate triplexer modules based on Si-bench technology. The triplexer modules were formed by hybrid integration of single mode lensed fibers and ultra-thin thin-film filters (TFF) on silicon bench as using V-groove and U-groove techniques. The output light at 1.31 µm was launched into the input lensed fiber of the module. After passing through two filters, the light was received by the output lensed fiber of the module. The insertion loss of the module at the 1.31 µm light was 1.25 dB. On the other hand, incoming lights at 1.49µm and 1.55µm were received from the output lensed fiber. Lights at 1.49µm will pass through the first filter, and be reflected by the second filter, and eventually be collected into the second multimode fiber. The insertion loss of the module at the 1.49 µm light was 1.14 dB. The 1.55µm wavelength lights received at the lensed fiber are reflected by the first filter and collected by the first multimode fiber. The insertion loss of the module at the 1.55 µm light was 0.68 dB.