Micro-mechanical sensors are typically fabricated both in large numbers and economically using the photolithographic processes that were originally developed in the integrated circuit industry. The magnitude of a change in resonant frequency of a micro-me chanical structure can be used to quantify a change in mass of such a device. Hence, when packaged with integrated measurement, actuation and control electronics, it is possible to deliver a low-cost and small system in a package using fabrication techniq ues that are both mature and widely available. A micro-mechanical resonator has been designed for this project and samples of the prototype resonator were used to investigate various methods for detecting a change in resonant frequency using discrete elec tronic components. The system that has been designed can eventually be integrated with a small micro-mechanical structure to create a mass sensor. Resonators have been fabricated at QinetiQ as part of the Europractice Foundry Access Program and characteri sation of typical devices is described in this thesis. A popular method for controlling the behaviour of resonant micro-mechanical sensors is a force feedback technique designed to increase the effective quality factor of the resonant system. In this thesis, an increase in the effective quality factor of the prototype system has been demonstrated. When the resonator operates in air at atmospheric pressure, an improvement in the effective quality factor of two orders of magnitude was achievable. This meant that it was possible to assess the potential benefits offered by the force feedback technique by testing the various detection schemes that have been implemented at the natural quality factor and also at a high effective quality factor. A prototype control system has been built using simple digital electroni cs, a key component of which is a direct digital frequency synthesis chip used to provide a stable and accurate driving frequency. Methods for determining a change in the resonant frequency of a micro-mechanical resonator using this control system have be en investigated. A method has been developed for determining the magnitude of a shift in resonance when the frequency of the excitation force is fixed. This thesis contains a description of the technique and also results demonstrating the corresponding de tection capability of the prototype sensor.

This dissertation demonstrates that a magnetic-levitation (maglev) stage has the capabilities to control movements and reject vibration simultaneously. The mathematical model and vibration control scheme with a 6-degree-of-freedom (6-DOF) maglev stage for nanoscale positioning are developed for disturbance rejection. The derived full nonlinear dynamic equation of motions (EOMs) of the maglev stage include translational and rotational motions with differential kinematics. The derived EOMs and the magnetic forces are linearized to design a multivariable controller, a Linear Quadratic Gaussian with Loop Transfer Recovery (LQG/LTR), for vibration disturbance rejection in a multi-input multi-output (MIMO) system. For a more accurate model, the dynamics of an optical table with a pneumatic passive isolation system is also considered. The model of the maglev stage with the optical table is validated by experiments. Dual-loop controllers are designed to minimize the influence of the vibration disturbance between the moving platen and the optical table in the x-, y-, and z-axes motions. The inner-loop compensator regulates the velocity to reject vibration disturbance and the outer-loop compensator tracks positioning commands. When the vibration disturbances of 10 to 100 Hz are applied, the vibration-reduction ratios are about 30 to 65 percent in horizontal motion and 20 to 45 percent in vertical motion. In addition, the vibration disturbances of 45.45 Hz are attenuated by about 4 to 40 percent in angular motions. The vibration control schemes are effective in not only translational but rotational motions. In step responses, the vibration control schemes reduce the wandering range in the travel from the origin to another location. Positioning and tracking accuracies with the vibration controller are better than those without the vibration controller. In summary, these dual-loop control schemes with velocity feedback control improved the nanopositioning and vibration/disturbance rejection capabilities of a maglev system.