In recent years, there has been increasing interest in the advancement of microrobotic systems in micro-engineering, micro-fabrication, biological research and biomedical applications. Untethered magnetic-based microrobotic systems are one of the most widely developing groups of microrobotic systems that have been extensively explored for biological and biomedical micro-manipulations. These systems show promise in resolving problems related to on-board power supply limitations as well as mechanical contact sealing and lubrication. In this thesis, a high precision magnetic untethered microrobotic system is demonstrated for micro-handling tasks. A key aspect of the proposed platform concerns the integration of magnetic levitation technology and bilateral macro-micro teleoperation for human intervention to avoid imperceptible failures in poorly observed micro-domain environments. The developed platform has three basic subsystems: a magnetic untethered microrobotic system (MUMS), a haptic device, and a scaled bilateral teleoperation system. The MUMS produces and regulates a magnetic field for non-contact propelling of a microrobot. In order to achieve a controlled motion of the magnetically levitated microrobot, a mathematical force model of the magnetic propulsion mechanism is developed and used to design various control systems. In the workspace of 30 ?? 32 ?? 32 mm ³, both PID and LQG\LTR controllers perform similarly the position accuracy of 10 ?? m in a vertical direction and 2 ?? m in a horizontal motion. The MUMS is equipped with an eddy-current damper to enhance its inherent damping factor in the microrobot's horizontal motions. This paper deals with the modeling and analysis of an eddy-current damper that is formed by a conductive plate placed below the levitated microrobot to overcome inherent dynamical vibrations and improve motion precision. The modeling of eddy-current distribution in the conductive plate is investigated by solving the diffusion equation for vector magnetic potential, and an analytical expression for the horizontal damping force is presented and experimentally validated. It is demonstrated that eddy-current damping is a crucial technique for increasing the damping coefficient in a non-contact way and for improving levitation performance. The damping can be widely used in applications of magnetic actuation systems in micro-manipulation and micro-fabrication. To determine the position of the microrobot in a workspace, the MUMS uses high-accuracy laser sensors. However, laser positioning techniques can only be used in highly transparent environments. A novel technique based on real-time magnetic flux measurement has been proposed for the position estimation of the microrobot in case of laser beam blockage, whereby a combination of Hall-effect sensors is employed to find the microrobot's position in free motion by using the produced magnetic flux. In free motion, the microrobot tends to move toward the horizontally zero magnetic field gradient, B_max location. As another key feature of the magnetic flux measurement, it was realized that the applied force from the environment to the microrobot can be estimated as linearly proportional to the distance of the microrobot from the B_max location. The developed micro-domain force estimation method is verified experimentally with an accuracy of 1.27 ?? N. A bilateral macro-micro teleoperation technique is employed in the MUMS for the telepresence of a human operator in the task environment. A gain-switching position-position teleoperation scheme is employed and a human operator controls the motion of the microrobot via a master manipulator for dexterous micro-manipulation tasks. The operator can sense a strong force during micro-domain tasks if the microrobot encounters a stiff environment, and the effect of hard contact is fed back to the operator's hand. The position-position method works for both free motion and hard contact. However, to enhance the feeling of a micro-domain environment in the human operator, the scaled force must be transferred to a human, thereby realizing a direct-force-reflection bilateral teleoperation. Additionally, a human-assisted virtual reality interface is developed to improve a human operator's skills in using the haptic-enabled platform, before carrying out an actual dexterous task.

Thesis (Ph. D.)--Case Western Reserve University, 2005. / Includes bibliographical references (p. 160-163). Available online via OhioLINK's ETD Center.

This dissertation presents two novel 6-axis magnetic-levitation (maglev) stages that are capable of nanoscale positioning. These stages have very simple and compact structure that is advantageous to meet requirements in the next-generation nanomanufacturing. The 6-axis motion generation is accomplished by the minimum number of actuators and sensors. The first-generation maglev stage is capable of generating translation of 300 ??m in x, y and z, and rotation of 3 mrad about the three orthogonal axes. The stage demonstrates position resolution better than 5 nm rms and position noise less than 2 nm rms. It has a light moving-part mass of 0.2126 kg. The total power consumption by all the actuators is only around a watt. Experimental results show that the stage can carry, orient, and precisely position an additional payload as heavy as 0.3 kg. The second-generation maglev stage is capable of positioning at the resolution of a few nanometers over a planar travel range of several millimeters. A novel actuation scheme was developed for the compact design of this stage that enables 6-axis force generation with just 3permanent-magnet pieces. Electromagnetic forces were calculated and experimentally verified. The complete design and construction of the second-generation maglev stage was performed. All the mechanical part and assembly fixtures were designed and fabricated at the mechanical engineering machine shop. The single moving part is modeled as a pure mass due to the negligible effect of the magnetic spring and damping. Classical as well as advanced controllers were designed and implemented for closed-loop feedback control. A nonlinear model of the force was developed and applied to cancel the nonlinearity of the actuators over the large travel range. Various experiments were conducted to test positioning, loading, and vibration-isolation capabilities. This maglev stage has a moving-part mass of 0.267 kg. Its position resolution is 4 nm over a travel range of 5 ?? 5 mm in the x-y plane. Its actuators are designed to carry and precisely position an additional payload of 2 kg. Its potential applications include semiconductor manufacturing, micro-fabrication and assembly, nanoscale profiling, and nano-indentation.

An electro-dynamic Magnetic Levitation vehicular system has been modelled and studied. In practice, a MagLev vehicle will consist of a number of cars which are mechanically coupled to each other. It is reasonable to assume that each of these cars will be independently controlled with the help of a supervisory controller. This thesis deals with the control aspects of one such car. The car is equipped with two control magnets one at the front end and the other at the rear end. The currents in these magnets can be varied to provide levitation and pitch-axis control. The rotational aspects of the vehicle about the yaw and roll axes is neglected here. The car has also a horizontal thrust producing mechanism, the dynamics of which has been neglected. A controller has been devised using frequency domain analysis. It is shown that the vehicle Can be controlled effectively to meet nominal ride specifications. These specifications are derived both from the point of practical implementation of the vehicle and from the need to ensure good ride quality. The controller needs to be robust in its operation. This thesis shows that a simple controller configuration is enough to maintain satisfactory operation for a variety of operating conditions. It is also shown that in the event of a disrupted magnet circuit, normal operation can be restored with a backup set, without having to stop the vehicle or endanger its occupants. This study is entirely conceptual and no attempt has been made to practically implement the system. It should also be noted that a reasonable choice was made for the parameters of the model, that compares closely to data from existing MagLev systems. / Graduation date: 1991

This dissertation presents two novel 6-axis magnetic-levitation (maglev) stages that are capable of nanoscale positioning. These stages have very simple and compact structure that is advantageous to meet requirements in the next-generation nanomanufacturing. The 6-axis motion generation is accomplished by the minimum number of actuators and sensors. The first-generation maglev stage is capable of generating translation of 300 ??m in x, y and z, and rotation of 3 mrad about the three orthogonal axes. The stage demonstrates position resolution better than 5 nm rms and position noise less than 2 nm rms. It has a light moving-part mass of 0.2126 kg. The total power consumption by all the actuators is only around a watt. Experimental results show that the stage can carry, orient, and precisely position an additional payload as heavy as 0.3 kg. The second-generation maglev stage is capable of positioning at the resolution of a few nanometers over a planar travel range of several millimeters. A novel actuation scheme was developed for the compact design of this stage that enables 6-axis force generation with just 3permanent-magnet pieces. Electromagnetic forces were calculated and experimentally verified. The complete design and construction of the second-generation maglev stage was performed. All the mechanical part and assembly fixtures were designed and fabricated at the mechanical engineering machine shop. The single moving part is modeled as a pure mass due to the negligible effect of the magnetic spring and damping. Classical as well as advanced controllers were designed and implemented for closed-loop feedback control. A nonlinear model of the force was developed and applied to cancel the nonlinearity of the actuators over the large travel range. Various experiments were conducted to test positioning, loading, and vibration-isolation capabilities. This maglev stage has a moving-part mass of 0.267 kg. Its position resolution is 4 nm over a travel range of 5 ?? 5 mm in the x-y plane. Its actuators are designed to carry and precisely position an additional payload of 2 kg. Its potential applications include semiconductor manufacturing, micro-fabrication and assembly, nanoscale profiling, and nano-indentation.

No description available.

No description available.

Magnetic levitation technology has shown a great deal of promise for micromanipulation tasks. Due to the lack of mechanical contact, magnetic levitation systems are free of problems caused by friction, wear, sealing and lubrication. These advantages have made magnetic levitation systems a great candidate for clean room applications. In this thesis, a new large gap magnetic levitation system is designed, developed and successfully tested. The system is capable of levitating a 6.5(gr) permanent magnet in 3D space with an air gap of approximately 50(cm) with the traveling range of 20x20x30 cubic millimeters. The overall positioning accuracy of the system is 60 micro meters. With the aid of finite elements method, an optimal geometry for the magnetic stator is proposed. Also, an energy optimization approach is utilized in the design of the electromagnets. In order to facilitate the design of various controllers for the system, a mathematical model of the magnetic force experienced by the levitated object is obtained. The dynamic magnetic force model is determined experimentally using frequency response system identification. The response of the system components including the power amplifiers, and position measurement system are also considered in the development of the force model. The force model is then employed in the controller design for the magnetic levitation device. Through a modular approach, the controller design for the 3D positioning system is started with the controller design for the vertical direction, i.e. z, and then followed by the controller design in the horizontal directions, i.e. x and y. For the vertical direction, several controllers such as PID, feed forward and feedback linearization are designed and their performances are compared. Also a control command conditioning method is introduced as a solution to increase the control performance and the results of the proposed controller are compared with the other designs. Experimental results showed that for the magnetic levitation system, the feedback linearization controller has the shortest settling time and is capable of reducing the positioning error to RMS value of 11.56μm. The force model was also utilized in the design of a model reference adaptive feedback linearization (MRAFL) controller for the z direction. For this case, the levitated object is a small microrobot equipped with a remote controlled gripper weighting approximately 28(gr). Experimental results showed that the MRAFL controller enables the micro-robot to pick up and transport a payload as heavy as 30% of its own weight without a considerable effect on its positioning accuracy. In the presence of the payload, the MRAFL controller resulted in a RMS positioning error of 8μm compared with 27.9μm of the regular feedback linearization controller. For the horizontal position control of the system, a mathematical formula for distributing the electric currents to the multiple electromagnets of the system was proposed and a PID control approach was implemented to control the position of the levitated object in the xy-plane. The control system was experimentally tested in tracking circular and spiral trajectories with overall positioning accuracy of 60μm. Also, a new mathematical approach is presented for the prediction of magnetic field distribution in the horizontal direction. The proposed approach is named the pivot point method and is capable of predicting the two dimensional position of the levitated object in a given vertical plane for an arbitrary current distribution in the electromagnets of the levitation system. Experimental results showed that the proposed method is capable of predicting the location of the levitated object with less than 10% error.

Magnetic levitation technology has shown a great deal of promise for micromanipulation tasks. Due to the lack of mechanical contact, magnetic levitation systems are free of problems caused by friction, wear, sealing and lubrication. These advantages have made magnetic levitation systems a great candidate for clean room applications. In this thesis, a new large gap magnetic levitation system is designed, developed and successfully tested. The system is capable of levitating a 6.5(gr) permanent magnet in 3D space with an air gap of approximately 50(cm) with the traveling range of 20x20x30 cubic millimeters. The overall positioning accuracy of the system is 60 micro meters. With the aid of finite elements method, an optimal geometry for the magnetic stator is proposed. Also, an energy optimization approach is utilized in the design of the electromagnets. In order to facilitate the design of various controllers for the system, a mathematical model of the magnetic force experienced by the levitated object is obtained. The dynamic magnetic force model is determined experimentally using frequency response system identification. The response of the system components including the power amplifiers, and position measurement system are also considered in the development of the force model. The force model is then employed in the controller design for the magnetic levitation device. Through a modular approach, the controller design for the 3D positioning system is started with the controller design for the vertical direction, i.e. z, and then followed by the controller design in the horizontal directions, i.e. x and y. For the vertical direction, several controllers such as PID, feed forward and feedback linearization are designed and their performances are compared. Also a control command conditioning method is introduced as a solution to increase the control performance and the results of the proposed controller are compared with the other designs. Experimental results showed that for the magnetic levitation system, the feedback linearization controller has the shortest settling time and is capable of reducing the positioning error to RMS value of 11.56μm. The force model was also utilized in the design of a model reference adaptive feedback linearization (MRAFL) controller for the z direction. For this case, the levitated object is a small microrobot equipped with a remote controlled gripper weighting approximately 28(gr). Experimental results showed that the MRAFL controller enables the micro-robot to pick up and transport a payload as heavy as 30% of its own weight without a considerable effect on its positioning accuracy. In the presence of the payload, the MRAFL controller resulted in a RMS positioning error of 8μm compared with 27.9μm of the regular feedback linearization controller. For the horizontal position control of the system, a mathematical formula for distributing the electric currents to the multiple electromagnets of the system was proposed and a PID control approach was implemented to control the position of the levitated object in the xy-plane. The control system was experimentally tested in tracking circular and spiral trajectories with overall positioning accuracy of 60μm. Also, a new mathematical approach is presented for the prediction of magnetic field distribution in the horizontal direction. The proposed approach is named the pivot point method and is capable of predicting the two dimensional position of the levitated object in a given vertical plane for an arbitrary current distribution in the electromagnets of the levitation system. Experimental results showed that the proposed method is capable of predicting the location of the levitated object with less than 10% error.

Thesis (M.A.)--University of Hong Kong, 2001. / Includes bibliographical references.