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An investigation into the effect of electrostatic actuation and mechanical shock on microstructuresIbrahim, Mahmoud Ibrahim. January 2009 (has links)
Thesis (M.S.)--State University of New York at Binghamton, Thomas J. Watson School of Engineering and Applied Science, Department of Mechanical Engineering, 2009. / Includes bibliographical references.
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Analysis And Design Of Micro-Opto-Electro-Mechanical Systems (MOEMS) Based Pressure And Vibration SensorsPattnaik, Prasant Kumar 07 1900 (has links) (PDF)
No description available.
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