This thesis presents a Microwave Plasma Assisted Spray Deposition (MPASD) system design, characterization, and application to produce nano-sized particle coatings of metal oxides. A commercially available rectangular waveguide microwave power delivery system is utilized to initiate and sustain the plasma discharge within the customized plasma applicator where micron-sized droplets of a metal ion solution are heated to evaporate the solvent and thermally process the resulting nano-sized particles. The investigation of optimum conditions for oxygen, argon, and air plasma ignition in the MPASD system was presented. Measured electron temperature of the plasma was between 6000K and 40000K for the plasma conditions used in the MPASD process. Successful deposition of Y2O3:Eu nano-particles using the MPASD system was achieved. MPASD process allows control of the particle's properties, shown through XRD and photoluminescence studies of the Y2O3:Eu coatings. The MPASD process settings effect on particles activated doping concentration and, as a result, its photoluminescence was shown.