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The Global ETD Search service is a free service for researchers
to find electronic theses and dissertations. This service is
provided by the
Networked Digital Library of Theses and Dissertations.
Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
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Showing 1 to 2 of 2 (0.03 seconds)Spelling suggestions: "subject:"zweiachsige anspannung"" "subject:"zweiachsige abspannung""
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On the determination of film stress from substrate bending: STONEY´s formula and its limitsSchwarzer, Norbert, Richter, Frank 08 February 2006 (has links) (PDF)
The paper examines the problem of film stress applying a correct three dimensional model. The results are compared with two different forms of Stoney´s equation existing in the Litera-ture and being widely used in the determination of stresses in thin films.
It is shown theoretically that only one of the forms is based on an adequate model and yields accurate results whereas the other causes errors of about 30-40 % for typical substrate materi-als. In addition limits for the applicability of the correct Stoney equation are given.
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| 2 |
On the determination of film stress from substrate bending: STONEY´s formula and its limitsSchwarzer, Norbert, Richter, Frank 08 February 2006 (has links)
The paper examines the problem of film stress applying a correct three dimensional model. The results are compared with two different forms of Stoney´s equation existing in the Litera-ture and being widely used in the determination of stresses in thin films.
It is shown theoretically that only one of the forms is based on an adequate model and yields accurate results whereas the other causes errors of about 30-40 % for typical substrate materi-als. In addition limits for the applicability of the correct Stoney equation are given.
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