<p>There is a need for reliable valves and pumps in microfluidics. A good microactuator is the key for low cost and high performance of these components.</p><p>Paraffin wax is a promising material to be used as actuator material as is can produce large forces and large strokes. Further, the material is inexpensive and, none the less, the thermal heating of the material can be made with low voltages. All these properties are of interest in flow control components in microfluidics, and especially for disposables and in potable systems.</p><p>In this work, paraffin wax has been used in devices and concepts. A valve for high-pressures, a peristaltic pump, a multi-stable actuator, and injector has been shown. A material study was performed on binary mixtures of pure paraffin (n-alkanes), and a concept for loading fluid into a sealed reservoir was shown as well. Several injectors were demonstrated in a Lab-on-a-chip system with other microfluidic components.</p><p>High pressure applications in microfluidics along with the multi-stable actuator show good potential. However, the drive and control has to be further developed.</p>

For robotic manipulation tasks in uncertain environments, research typically revolves around developing the best possible software control strategy. However, the passive dynamics of the mechanical system, including inertia, stiffness, damping and torque limits, often impose performance limitations that cannot be overcome with software control. Discussions about the passive dynamics are often imprecise, lacking comprehensive details about the physical limitations. In the first half of this paper, we develop relationships between an actuator's passive dynamics and the resulting performance, to better understanding how to tune the passive dynamics. We characterize constant-contact physical interaction tasks into two different tasks that can be roughly approximated as force control and position control and calculate the required input to produce a desired output. These exact solutions provide a basis for understanding how the parameters of the mechanical system affect the overall system's bandwidth limit without limitations of a specific control algorithm. We then present our experimental results compared to the analytical prediction for each task using a bench top actuator. Our analytical and experimental results show what, until now, has only been intuitively understood: soft systems are better at force control, stiff systems are better at position control, and there is no way to optimize an actuator for both tasks. / Graduation date: 2012

There is a need for reliable valves and pumps in microfluidics. A good microactuator is the key for low cost and high performance of these components. Paraffin wax is a promising material to be used as actuator material as is can produce large forces and large strokes. Further, the material is inexpensive and, none the less, the thermal heating of the material can be made with low voltages. All these properties are of interest in flow control components in microfluidics, and especially for disposables and in potable systems. In this work, paraffin wax has been used in devices and concepts. A valve for high-pressures, a peristaltic pump, a multi-stable actuator, and injector has been shown. A material study was performed on binary mixtures of pure paraffin (n-alkanes), and a concept for loading fluid into a sealed reservoir was shown as well. Several injectors were demonstrated in a Lab-on-a-chip system with other microfluidic components. High pressure applications in microfluidics along with the multi-stable actuator show good potential. However, the drive and control has to be further developed.

The focus of this research is on the development of a novel multi-disciplinary design optimization scheme for micro-compliant devices. Topology optimization is a powerful tool that can address the need for a systematic method to design MEMS. It is expected that systematic design methods will make the design of micro devices transparent to the user and thus spur their use. Although topology optimization of MEMS devices with embedded actuation has received a great deal of attention among researchers recently, there is not a significant amount of literature available on the subject. The limited literature available addresses multi-physics topology optimization, which employs the homogenization method. However, the products of this method inherit the drawbacks of homogenized material discretization, including checkerboard pattern, gray-scale material and narrow flexural hinges in the optimum solution. In this thesis, a new topology optimization scheme is introduced that addresses the specific needs of MEMS domain. A new discretization approach with frame-ground structure is introduced. This approach offers significant conceptual and practical advantages to the compliant MEMS optimization problem, including compatibility with MEMS fabrication processes. The design spaces of compliant mechanisms are non-convex and it is critical to employ an algorithm capable of converging to the global optimum without the need to evaluate gradients of objective function. In this thesis, an efficient real-coded genetic algorithm is implemented, which shows a better repeatability and converges to very similar solutions in different runs. This new method of optimization facilitates the use of a coarse subdivision of the design domain rather than the homogenized material method, for the same resolution of shape definition. Therefore, the topology optimization scheme developed in this thesis significantly reduces the computational burden without compromising the sharpness of the shape definition. As the problem of compliant mechanism design is posed as a set of conflicting objectives, a well-posed multi-criteria objective function is introduced which avoids one objective dominating the solution. Moreover, the formulation is modified to incorporate electro-thermal boundaries and enables the optimization of the compliant mechanisms to transfer maximum motion or maximum force at the output. A number of design examples are used to demonstrate the ability of the procedure to generate non-intuitive topologies. Their performance is verified using ANSYS and compared with results from the homogenization method and designs reported in the available literature.

Piezoelectric actuators are well suited for high precision mechanical and electrical engineering applications. However, its performance in regulator configurations has been limited due to hysteresis. The hysteresis in these actuators means that multiple input states can result in the same output, which introduces a further design variable (initial state) in the regulation problem. It is proposed that certain initial states result in better regulation performance based on the structure of the Preisach model. These initial states are called “neutral states”. In this thesis, hysteresis and piezoelectric actuators are introduced as background information. The Preisach model is used in this work to describe the hysteresis behaviour of a customized shape control unit SS15 due to its convenient general structure and ability to model hysteresis. The representation tests are performed and a Preisach model is subsequently constructed and verified by comparing simulation and experimental results to ensure that the hysteresis inherent in the piezoceramic actuators of the SS15 is suitably described by this model. In order to evaluate the regulation performance for a given desired output, uniformly-distributed noise is injected at the input side of the SS15 in open- and closed-loop tests. It is demonstrated, by both simulation and experimental results, that the system output drifts less when it starts from the neutral state in open-loop tests. A PI regulator is implemented in the closed-loop tests. When the system is driven from the neutral state, both simulation and experimental results demonstrate that the system requires less control effort for closed-loop regulation.

The focus of this research is on the development of a novel multi-disciplinary design optimization scheme for micro-compliant devices. Topology optimization is a powerful tool that can address the need for a systematic method to design MEMS. It is expected that systematic design methods will make the design of micro devices transparent to the user and thus spur their use. Although topology optimization of MEMS devices with embedded actuation has received a great deal of attention among researchers recently, there is not a significant amount of literature available on the subject. The limited literature available addresses multi-physics topology optimization, which employs the homogenization method. However, the products of this method inherit the drawbacks of homogenized material discretization, including checkerboard pattern, gray-scale material and narrow flexural hinges in the optimum solution. In this thesis, a new topology optimization scheme is introduced that addresses the specific needs of MEMS domain. A new discretization approach with frame-ground structure is introduced. This approach offers significant conceptual and practical advantages to the compliant MEMS optimization problem, including compatibility with MEMS fabrication processes. The design spaces of compliant mechanisms are non-convex and it is critical to employ an algorithm capable of converging to the global optimum without the need to evaluate gradients of objective function. In this thesis, an efficient real-coded genetic algorithm is implemented, which shows a better repeatability and converges to very similar solutions in different runs. This new method of optimization facilitates the use of a coarse subdivision of the design domain rather than the homogenized material method, for the same resolution of shape definition. Therefore, the topology optimization scheme developed in this thesis significantly reduces the computational burden without compromising the sharpness of the shape definition. As the problem of compliant mechanism design is posed as a set of conflicting objectives, a well-posed multi-criteria objective function is introduced which avoids one objective dominating the solution. Moreover, the formulation is modified to incorporate electro-thermal boundaries and enables the optimization of the compliant mechanisms to transfer maximum motion or maximum force at the output. A number of design examples are used to demonstrate the ability of the procedure to generate non-intuitive topologies. Their performance is verified using ANSYS and compared with results from the homogenization method and designs reported in the available literature.

Piezoelectric actuators are well suited for high precision mechanical and electrical engineering applications. However, its performance in regulator configurations has been limited due to hysteresis. The hysteresis in these actuators means that multiple input states can result in the same output, which introduces a further design variable (initial state) in the regulation problem. It is proposed that certain initial states result in better regulation performance based on the structure of the Preisach model. These initial states are called “neutral states”. In this thesis, hysteresis and piezoelectric actuators are introduced as background information. The Preisach model is used in this work to describe the hysteresis behaviour of a customized shape control unit SS15 due to its convenient general structure and ability to model hysteresis. The representation tests are performed and a Preisach model is subsequently constructed and verified by comparing simulation and experimental results to ensure that the hysteresis inherent in the piezoceramic actuators of the SS15 is suitably described by this model. In order to evaluate the regulation performance for a given desired output, uniformly-distributed noise is injected at the input side of the SS15 in open- and closed-loop tests. It is demonstrated, by both simulation and experimental results, that the system output drifts less when it starts from the neutral state in open-loop tests. A PI regulator is implemented in the closed-loop tests. When the system is driven from the neutral state, both simulation and experimental results demonstrate that the system requires less control effort for closed-loop regulation.

In order to extend fluid-based flow control techniques that have been demonstrated at low subsonic speeds to high speed flows, it is necessary to develop actuators having sufficient momentum to control and manipulate high speed flows. Two fluidic actuation approaches are developed where the control jet may reach supersonic velocities and their performance is characterized. The first actuator is a compressible synthetic (zero net mass flux) jet. This is an extension of previous work on synthetic jets with an increase in driver power yielding substantial pressurization of the cavity such that the flow is compressible. The jet is generated using a piston/cylinder actuator, and the effects of variation of the orifice diameter, actuation frequency, and compression ratio are investigated. Operation in the compressible regime uniquely affects the time-dependent cylinder pressure in that the duty cycle of the system shifts such that the suction phase is longer than the blowing phase. The structure of the jet in the near-field is documented using particle image velocimetry and Schlieren flow visualization. In the range investigated, the stroke length is sufficiently long that the jet flow is dominated by a starting jet rather than a starting vortex (which is typical of low-speed synthetic jets). A simple, quasi-static numerical model of the cylinder pressure is developed and is in generally good agreement with the experimental results. This model is used to assess system parameters which could not be measured directly (e.g., the dynamic gas temperature and mass within the cylinder) and for predictions of the actuator performance beyond the current experimental range. Finally, an experiment is described with self-actuated valves mounted into the cylinder head which effectively icrease the orifice area in suction and overcome some of the limitations inherent to compressible operation. The second actuation concept is the combustion-driven jet actuator. This device consists of a small-scale (nominally 1 cc) combustion chamber which is filled with premixed fuel and oxidizer. The mixture is ignited using an integrated spark gap, creating a momentary high pressure burst within the combustor that drives a high-speed jet from an exhaust orifice. At these scales, the entire combustion process is complete within several milliseconds and the cycle resumes when fresh fuel/oxidizer is fed into the chamber and displaces the remaining combustion products. The actuator performance is characterized by using dynamaic measurements of the combustor pressure along with Schlieren flow visualization, limited dynamic thrust measurements, and flame photography. The effects of variation in the following system parameters are investigated: fuel type and mixture ratio, exhaust orifice diameter, chamber aspect ratio, chamber volume, fuel/air flow rate, ignition/combustion frequency, and spark ignition energy. The resulting performance trends are documented and the basis for each discussed. Finally, a proof-of-concept experiment demonstrates the utility of teh combustion-driven jet actuators at low-speed for transitory reattachment of a separated flow over an airfoil at high angles of attack.

This thesis analyzes the implementation of surface bonded piezoelectric actuators to control or minimize the deformation in elastic or viscoelastic cantilever beams due to simultaneous heat and moisture diffusion. The problem is addressed in the context of linearized elasticity and linearized viscoelasticity. The constitutive equations are derived from the balance laws for mass, linear and angular momenta, energy, entropy and the second law of thermodynamics. The constitutive equations for linearized elasticity are then obtained as a consequence of small deformation assumption. The temperature and moisture induced deformation is introduced through the coefficient of thermal expansion CTE and coefficient of moisture expansion CME. The constitutive equations for linearized viscoelasticity are obtained by correspondence principle. The coupled temperature and moisture diffusion equations are obtained as a consequence of Clausius-Duhem inequality. The extent of coupling between heat conduction and moisture diffusion phenomena is studied by varying the ratio of their diffusivities and a non-dimensional coupling parameter. The effect of coupled unsteady heat conduction and moisture diffusion phenomena on the short and long term response characteristics of the beam such as displacement, stress and strain fields is studied. Based on these response characteristics, the magnitude of external actuating voltage required to minimize deformation is predicted. This is followed by a comparative study of the field variables in cases of actuated and unactuated beams. Four materials are chosen for this study; aluminium, epoxy, carbon fiber reinforced polymer with fiber volume fraction of 60 percent, and an epoxy-like viscoelastic material. The viscoelastic material is assumed to be thermorheologically simple. The shift factor is assumed to be a linear function of temperature and moisture fields. To address this problem numerically, a finite difference formulation is presented for the field equations and boundary conditions. This numerical scheme is validated by solving the problem of uniformly loaded cantilever beam and comparing the results with the analytical solution known a priori. The results obtained numerically are validated by comparison with experimental results. It is observed that the under the effect of external actuation, the stress and displacement fields are largely minimized in all four cases chosen for study. The bending in the unactuated viscoelastic beam is more pronounced than bending in the unactuated elastic beam. This is due to the softening of the material with time due to evolving temperature and moisture fields. However, relatively lesser external actuating voltage is necessary to minimize bending in the former case compared to the latter. The magnitude of actuating electric field required in the piezoelectric layer suggests a need to address the problem with in a non-linear framework, no such attempt is made in this study.

Thesis (doctoral)--Helsinki University of Technology, 2009. / Includes bibliographical references. Also available on the World Wide Web.