Six bis(silyl)acetylenes with the following varied silicon substituents were prepared: I (Me, Me); II (H, H); III (Cl, H); IV (Cl, Cl); V (OMe, H); VI (OMe, OMe). While I and II may be prepared by the reaction of dilithio- or bis(bromomagnesium)-acetylide with appropriate chlorosilane, similar reactions designed to give III - VI give oligomers, YMe_2Si(C≡C-SiMe_2)_nY, VII, Y = Cl, OMe, as the major products indicating that the acetylenic functionality on silicon activates the chlorosilane toward nucleophilic substitution. Compounds III and IV were prepared by free radical chlorination of II. Methanolysis of III and IV gave quantitative yields of V and VI, respectively. In the presence of mineral acid, VI readily cyclized to give high yields of the cyclic siloxane octamethyl-4,9-dioxa-3,5,8,10-tetrasila-cyclodeca-1,6-diyne, VIII, and the analogous triyne, IX. It was determined that V and VI could be prepared directly from II in high yield by methanolysis with palladium catalyst. Vaska's complex also accomplished the conversion. I attempted to prepare bis(ethoxydimethylsilyl)acetylene by using of Wilkinson 's catalyst for hydrosilylation with acetaldehyde. The principal product of this reaction was 1-(dimethylsilyl)-3,5,5-trimethyl-4-oxa-3-silacyclopent-1-ene, XI.