As the size of modern transistors is continuously scaled down, challenges rise in almost every component of a silicon device. Formation of ultra shallow junction (USJ) with high activation level is particularly important for suppressing short channel effects. However, the formation of low resistance USJ is made difficult by dopant Transient Enhanced Diffusion (TED) and clustering-induced deactivation. In this work, we proposed a novel point defect engineering solution to address the arsenic TED challenge. By overlapping arsenic doped region with silicon interstitials and vacancies, we observed enhanced and retarded arsenic diffusion upon anneal, respectively. We explain this phenomenon by arsenic interstitial diffusion mechanism. In addition, we implemented this interstitial-based mechanism into a kinetic Monte Carlo (kMC) simulator. The key role of interstitials in arsenic TED is confirmed. And we demonstrated that the simulator has an improved prediction capability for arsenic TED and deactivation. As a long time unsolved process challenge, arsenic segregation at SiO₂/Si interface was investigated using density functional theory (DFT) calculation. The segregation-induced arsenic dose loss not only increases resistance but also may induce interface states. We identified three arsenic complex configurations, [chemical formula] , [chemical formula] and [chemical formula], which are highly stabilized at SiO₂/Si interface due to the unique local bonding environments. Therefore, they could contribute to arsenic segregation as both initial stage precursors and dopant trapping sites. Our calculation indicates that arsenic atoms trapped in such interface complexes are electrically inactive. Finally, the formation and evolution dynamics of these interface arsenic-defect complexes are discussed and kMC models are constructed to describe the segregation effects. A potential problem for the p-type USJ formation is the recently found transient fast boron diffusion during solid phase epitaxial regrowth process. Using DFT calculations and molecular dynamics simulation, we identified an interstitial-based mechanism of fast boron diffusion in amorphous silicon. The activation energy for this diffusion mechanism is in good agreement with experimental results. In addition, this mechanism is consistent with the experimentally reported transient and concentration-dependent features of boron diffusion in amorphous silicon. / text

<p>The manufacturing of molecular-scale computing systems requires a scalable, reliable, and economic approach to create highly interconnected, dense arrays of devices. As a candidate substrate for nanoscale logic circuits, DNA self-assembled nanostructures have the potential to fulfill these requirements. However, a number of open challenges remain, including the scalability of DNA self-assembly, long-range signal propagation, and precise patterning of functionalized components. These challenges motivate the development of theory and experimental techniques to illuminate the connections among the physical, optical, and thermodynamic properties of DNA self-assembled nanostructures. </p> <p>In this thesis, three tools are developed, validated, and applied to study the thermo-mechanical properties of DNA nanostructures: 1) a method to quantitatively measure the quality of DNA grid self-assembly, 2) a spectrofluorometer capable of capturing fluorescence and absorbance data under simultaneous multi-wavelength excitation, and 3) a Monte Carlo simulator that models the ensemble response of DNA nanostructures as simple harmonic oscillators. </p> <p>The broad contributions of this dissertation are as follows: 1) insight into the thermo-mechanical properties of DNA grid nanostructures, and 2) a categorization of self-assembly defects and their impact on proposed logic circuits. </p> <p>The results of the work presented in this dissertation show that: 1) the quality of self-assembly of DNA grid nanostructures can be quantitatively calculated to demonstrate the impact of changes in temperature or structure, 2) the optical absorbance of complex DNA nanostructures can be modeled to capture their thermo-mechanical properties (i.e., worst case within 10% of experimental melting temperatures and 70% of experimental thermodynamic parameters), 3) the structural resilience of DNA nanostructures can be quantifiably improved by chemical cross-linking with up to 60% retaining their original structure, and 4) DNA self-assembly introduces structural defects which create new fault models with respect to conventional technologies for logic circuits.</p> / Dissertation

La spectrométrie gamma à haute résolution offre un outil d’analyse performant pour effectuer des mesurages environnementaux. Dans le cadre de la caractérisation radiologique d’un site (naturelle ou artificielle) ainsi que pour le démantèlement d’installations nucléaires, la cartographie des radionucléides est un atout important. Le principe consiste à déplacer un spectromètre HPGe sur le site à étudier et, à partir des données nucléaires et de positionnements, d’identifier, de localiser et de quantifier les radionucléides présents dans le sol. Le développement de cet outil fait suite à une intercomparaison où un exercice orienté intervention a montré les limites des outils actuels. Une partie de ce travail s’est portée sur la représentation cartographique des données nucléaires. La connaissance des paramètres d’un spectre in situ a permis la création d’un simulateur modélisant la réponse d’un spectromètre se déplaçant au-dessus d’un sol contaminé. Ce simulateur a lui-même permis de développer les algorithmes de cartographie et de les tester dans des situations extrêmes et non réalisables. Ainsi, ce travail ouvre sur la réalisation d’un prototype viable donnant en temps réel les informations nécessaires sur l’identité et la position possible des radionucléides. La recherche réalisée sur la déconvolution des données permet de rendre en post traitement une carte de l’activité du sol par radionucléide mais également une indication sur la profondeur de la source. Le prototype nommé OSCAR (Outil Spectrométrique de Cartographie de Radionucléides) a ainsi été testé sur des sites contaminés (Suisse et Japon) et les résultats obtenus sont en accord avec des mesures de référence. / The high-resolution gamma spectrometry currently provides a powerful analytical tool for performing environmental measurements. In the context of radiological characterization of a site (natural or artificial radioactivity) and for the dismantling of nuclear installations, mapping of radionuclides is an important asset. The idea is to move a HPGe spectrometer to study the site and from nuclear and position data, to identify, to locate and to quantify the radionuclides present in the soil. The development of this tool follows an intercomparaison (ISIS 2007) where an intervention / crisis exercise showed the limits of current tools. The main part of this research project has focused on mapping of nuclear data. Knowledge of the parameters of an in situ spectrum helped to create a simulator modeling the response of a spectrometer moving over contaminated soil. The simulator itself helped to develop algorithms for mapping and to test them in extreme situations and not realizable. A large part of this research leads to the creation of a viable prototype providing real-time information concerning the identity and locality as possible radionuclides. The work performed on the deconvolution of data can make in post processing a map of the activity of radionuclide soil but also an indication of the depth distribution of the source. The prototype named OSCAR was tested on contaminated sites (Switzerland and Japan) and the results are in agreement with reference measurements.

Les mesures fines des faibles radioactivités par la spectrométrie gamma nécessitent l’optimisation de la géométrie de détection et la connaissance du schéma de niveaux des raies gamma. Ainsi, on peut augmenter le taux de comptage et par conséquent, réduire l’incertitude statistique des pics spectraux exploités pour le calcul de l’activité des radio-isotopes en rapprochant le plus possible l’échantillon du détecteur. Cependant, l’augmentation du volume de l’échantillon demande une correction de l’auto-absorption des émissions par l’échantillon même, et le rapprochement du détecteur est à l’origine du phénomène de pic-somme. L’utilisation de MCNPX a permis de mettre en évidence les effets séparés de la densité de l’échantillon et le nombre atomique effectif dans l’atténuation des photons d’énergie inférieure à 100 keV. Les facteurs de correction du pic-somme sont obtenus par MCNPX, GESPCOR et ETNA. Ainsi, une base des données pour 244 radionucléides a été établie pour des géométries SG50 et SG500 au contact d’un détecteur. Dans une application à la radioprotection, des échantillons de matériaux de construction ont été analysés par la spectrométrie gamma. L’Uranium-238, le Thorium-232 et le Potassium-40 ont été identifiés et corrigés des effets sus-cités. La dosimétrie de leurs rayonnements gamma a permis d’évaluer les indices de risque, la dose absorbée et la dose efficace annuelle reçues provenant de ces matériaux. Les simulations par MCNPX corroborent le modèle de calcul de la dose absorbée. Il a permis aussi d'étudier la distribution de la dose dans les habitations de différentes dimensions. Les résultats obtenus sont en accord avec les limites règlementaires. / Precisely measuring weakly radioactive samples by gamma-ray spectrometry requires optimizing the detection geometry and knowledge of the gamma-ray decay scheme. One can thus increase the counting rate and reduce the statistical uncertainty of the spectral peaks used to determine radioisotope activities. However, an increased sample volume requires a correction for the self-absorption of y-rays in the sample itself, and approaching a sample to the detector gives rise to coincidence summing. MCNPX simulations permitted finding the separate influence of sample density and effective atomic number of the sample in the attenuation of photons with energies less than 100 keV. Peak-summing corrections were obtained with MCNPX, GESPCOR and ETNA. Thus a data base for 244 radionuclides could be established for SG50 and SG500 geometries in contact with a planar detector. In an application of the results to the health physics domain, construction materials were analyzed. Naturally-occurring Uranium-238, Thorium-232 and Potassium-40 activities were identified and corrected for the above-mentioned effects in order to evaluate the risk indexes, the absorbed dose and the annual effective dose received from different dimensions built of these materials. MCNPX simulations corroborated the model used to calculate the absorbed dose and gave its distribution in an enclosed space. The results obtained are within the recommended norms.