The dissertation thesis is focused on research and development in the field of microfabrication by the technology of electron beam lithography. In the first part of this work, the extensive study is conducted in the field of technology of electron beam lithography in terms of physical principles, writing strategies and resist materials. This is followed with description of physical principles of etching for the transfer of relief structures into substrates. The thesis describes innovative techniques in modelling, simulation, data preparation and optimization of manufacturing technology. It brings new possibilities to record deep binary or multilevel microstructures using electron beam lithography, plasma and reactive ion etching technology. Experience and knowledge in the large area of microlithography, plasma and anisotropic wet-etching of silicon have been capitalized to the design process of manufacturing of nano-patterned membranes. It was followed with practical verification and optimization of the microfabrication process.

This paper deals with data warehouses and OLAP. These technologies are defined and described here. Then an introduction of the architecture of product MS SQL Server and its tools for work with data warehouses and OLAP folow. The knowledge gained is used for creation of sample application.

Diploma thesis focuses on effect of the bypass factor on design and geometry of the evaporator for the cooling unit of data centre. Effect of the bypass factor on individual design parameters is solved in detail. All dependendecies are captured by using graphs in which s placed a cement on that parameter. In part C, mathematical and physical solutions are demonstrated calculations and processes leading to the design of the exchanger. In the end, evaluation of the calculations is done and there is also showed possible improvements for the practise.