No description available.

Electron microscopy has become an essential component in many scientific fields, in which it contributes to new discoveries. The microscopy itself is continually being developed and the limits, which seemed to be insurmountable, have been overcome. The instruments have become user friendlier and their mobility enables flexible practical use in the field. The subject of this work is the design of a scanning electron microscope, the calculation of a magnetic curcuit of an immersion objective combined with standard lens, the theoretical calculation of a microscope resolution and the design solution of the mechanical parts of the microscope with a sample manipulator. The thesis includes a description of the electron microscopy development summarizing it briefly from the very beginning up to now. It also deals with electron sources, especially the Shottky cathode, which is to be the main object observed by the proposed device. The work also contains a description of the calculation of the microscope resolution as a function of the current density distribution. Another interesting issue included in the theoretical part is the signal detection, a description of several types of detectors and possible signal processing. The solution of the thesis includes a description of the concept of the scanning electron microscope with an explanation of the distribution of combined lens functions. The optical diagram shows the arrangement of the electron optics system and the distibution of pressure in the chamber of the microscope. The theoretical calculation is devoted to the magnetic curcuit design of the objective and to the resolution of the microscope for a given extent of working distances. Two modifications of the lens were designed – a standard simple objective and a combination of the standard objective with the immersion magnetic one. The results of both modifications are given for the parameters to be compared. The combined objective was designed with the possibility of use in two modes, as a standard and immersion lens. The deflection system is also divided into two modes, as a single deflection for the standard lens and as a two-dimension deflection for the immersion lens. Detectors for secondary electrons (SE) and detectors for back scattered electrons (BSE) will be used for the signal detection. The design of the microscope is another large part, which gives details on the most significant components of the microscope. The content of the technical solution is a three-dimensional computer model, created in Autodesk Inventor, which also includes a sample manipulator driven by piezoelectric actuators.

No description available.

Dizertační práce se zabývá problematikou výpočtu vlivu coulombovských interakcí částic na parametry emitovaného elektronového svazku v blízkosti Schottkyho a studené katody. Práce poskytuje základní předhled o problematice, popisuje vytvořené modely emisních zdrojů a metodu simulace Monte Carlo. Představuje novou metodu generování vstupních dat, která klade větší důraz na přesnou simulaci emisního procesu. Pozornost je zde věnována zejména vlivu interakcí na energiovou šířku, velikost virtuálního zdroje a jas katody v závislosti na velikosti poloměru hrotu a emisním proudu. Sledováním vývoje energiové šířky bylo zjištěno, že naprostá většina interakcí se odehrává v prostoru do několika mikrometrů od hrotu katody. Závislost spočtené celkové energiové šířky na úhlové intenzitě je ve shodě s dostupnými experimentálními daty. Spočtené energiové rozšíření vlivem coulombovských interakcí bylo srovnáno s hodnotami vypočtenými pomocí vzorců založených na analytických přiblíženích. Bylo zjištěno, že některé z nich přijatelně předpovídají trendy ale nemohou být použity pro kvantitativní odhad.

Submitted by Geandra Rodrigues (geandrar@gmail.com) on 2018-01-10T14:00:21Z No. of bitstreams: 1 humbertovargasduque (1).pdf: 2897920 bytes, checksum: 904a8ff36edd0079149dfe6e3be69aed (MD5) / Rejected by Adriana Oliveira (adriana.oliveira@ufjf.edu.br), reason: Favor corrigir: Membro da banca: Filho, Jayr de Amorim on 2018-01-23T11:49:04Z (GMT) / Submitted by Geandra Rodrigues (geandrar@gmail.com) on 2018-01-23T13:12:19Z No. of bitstreams: 1 humbertovargasduque (1).pdf: 2897920 bytes, checksum: 904a8ff36edd0079149dfe6e3be69aed (MD5) / Rejected by Adriana Oliveira (adriana.oliveira@ufjf.edu.br), reason: Favor verificar nome do arquivo, existe o número (1) humbertovargasduque (1).pdf on 2018-01-23T13:14:55Z (GMT) / Submitted by Geandra Rodrigues (geandrar@gmail.com) on 2018-01-23T13:22:21Z No. of bitstreams: 1 humbertovargasduque.pdf: 2897920 bytes, checksum: 904a8ff36edd0079149dfe6e3be69aed (MD5) / Approved for entry into archive by Adriana Oliveira (adriana.oliveira@ufjf.edu.br) on 2018-01-24T13:40:22Z (GMT) No. of bitstreams: 1 humbertovargasduque.pdf: 2897920 bytes, checksum: 904a8ff36edd0079149dfe6e3be69aed (MD5) / Made available in DSpace on 2018-01-24T13:40:22Z (GMT). No. of bitstreams: 1 humbertovargasduque.pdf: 2897920 bytes, checksum: 904a8ff36edd0079149dfe6e3be69aed (MD5) Previous issue date: 2012-06-19 / CAPES - Coordenação de Aperfeiçoamento de Pessoal de Nível Superior / Este trabalho consiste no desenvolvimento, implantação e caracterização de um Analisador Cilíndrico Dispersivo 1270 em um Espectrômetro de Perda de Energia de Elétrons (EPEE) operando na região de energia de impacto de 10 a 200 eV, que está sendo desenvolvido no Laboratório de Espectroscopia Atômica e Molecular – LEAM da UFJF. Além do analisador, foram também desenvolvidos diversos trabalhos para otimização do circuito de controle do canhão de elétrons monocromatizado do EPEE, o que gerou ótima estabilidade, acarretando em um ganho considerável em intensidade do feixe produzido e melhoria no manuseio do mesmo. É descrito a implementação da variação angular da plataforma giratória que apóia o Analisador Cilíndrico Dispersivo 1270, bem como a medida desta variação, e também, do sistema de injeção do feixe gasoso através de uma cânula de molibidênio isolada eletricamente, com movimento verticalem relação ao disco onde estão instalados o canhão e analisador. Os testes de desempenho do Espectrômetro foram feitos a partir da análise da resolução de Energia ΔE do EPEE. Obtivemos ótimos resultados quanto a transmissão do feixe de elétrons monocromatizado através da região de colisão chegando até a região de detecção do espectrômetro. É descrito, também, uma avaliação das melhorias feitas no Circuito de Controle do Canhão de Elétrons Monocromatizado, obtendo excelentes resultados quanto a intensidade do feixe de elétrons na faixa de energia de 0,1-100 eV. / This work describes the development, implementation and characterization of a Cylindrical Dispersive Analyzer 1270 on a Electron Energy Loss Spectrometer (EELS) operating in the region of impact energy from 10 to 200eV, which is being developed at the Laboratory of Atomic Spectroscopy and Molecular – LEAM UFJF. In the analyzer, several studies have also been developed to optimize the control circuit of the monochromatized electron gun of the EELS, which generated great stability, resulting in a considerable gain in intensity of the beam produced and improved handling. We describe the implementation of the angular variation of the turntable that supports the Cylindrical Dispersive Analyzer 1270, and the measure of variation, and also injection system of the gas through a beam cannula molybdenum electrically isolated, with vertical movement relative to disk where the monochromatized electron gun and the energy analyzer of electrons are installed. Performance tests of the spectrometer were made from the analysis of the energy resolution ΔE of the EELS. We obtained excellent results about transmission of the electron beam across the monochromatization region collision reaching the detection region of the spectrometer. We describe also an assessment of the improvements made in the Control Circuit of the Monochromatized Electron Gun, obtaining excellent results for the intensity of the electron beam in the energy range 0.1-100 eV.

科学研究費補助金 研究種目:一般研究(A) 課題番号:62420021 研究代表者:日比野 倫夫 研究期間:1987-1989年度