Pages viii, xii, xiv, 32, 110, 182, 188, 194 were blank and therefore omitted. / <p> The functional density of photonic integrated circuits can be significantly increased by stacking multiple waveguide layers. These vertically-integrated devices require optical couplers to switch light signals between their layers. In this thesis, optical coupling between two stacked silicon-on-insulator slab waveguides has been demonstrated with a coupling efficiency of 68±4%, obtained with a coupler length of 3535 μm. The main advantage of using a silicon-based material system for photonic integrated circuits is its compatability with existing electronics manufacturing processes, facilitating cost-effective fabrication and the monolithic integration of both photonics and electronics on a single device. </p> <p> Coupling between more complex silicon-on-insulator waveguide structures with lateral confinement was then demonstrated. The coupling ratio between stacked silicon rib wavelengths was measured to be 54±4%, while ratios of 71±4% and 93±4% were obtained for stacked channel waveguide and multimode interferometer-based couplers respectively. The corresponding coupler lengths for these three designs were 572 μm, 690 μm and 241 μm respectively. The sensitivity of these couplers to the input wavelength and polarization state has also been evaluated. These vertical-integrated couplers, along with other structures, have been thoroughly simulated, including their tolerance to fabrication errors. Novel fabrication processes used to demonstrate coupling in proof-of-concept devices have been developed, including an in-house wafer bonding procedure. </p> / Thesis / Doctor of Philosophy (PhD)

This thesis aims at investigating the feasibility of realizing antireflection (AR) and high-reflection (HR) to the semiconductor waveguide end facet using monolithically integratable deep-etching technology to replace the conventional thin film dielectric coating counterpart. Conventional AR coating and HR coatings are the building blocks of semiconductor optical amplifier and semiconductor lasers. In this thesis, the AR coating and HR coating are first studied systematically and comprehensively using two computational electromagnetics approaches: plane wave transmission matrix method (TMM) and finite difference time domain (FDTD) method. The comparison of the results from the two approaches are made and discussed. A few concepts are clarified based on the different treatment between the AR coatings for bulk optics and those for semiconductor waveguide laser structure. The second part uses the same two numerical tools and more importantly, the knowledge gained from the first part to analyze and design deep-etched waveguide gratings for the advantage of ease of monolithic integration. A variational correction to the TMM is provided in order to consider effect of the finite etching depth also in the plane wave model. Specially, a new idea of achieving AR using deep-etched waveguide gratings is proposed and analyzed comprehensively. A preliminary design is obtained by TMM optimization and FDTD verifications, which provides a minimum power reflectivity in the order of 10-5 and a bandwidth of 45nm for the power reflectivity less than 10-3. In order to eliminate the nonphysical reflections from the boundary, the perfectly matched layer (PML) absorbing condition is employed and pre-tested for antireflection analysis. The effects of etching depth and number of etching grooves are specifically analyzed for the performance of proposed structures. Numerical results obtained by FDTD method indicate a promising potential for this alternative technologies. / Thesis / Master of Engineering (ME)

Coherent optical signal processing systems typically require dynamic, low-loss phase changes of an optical signal. Waveform generation employing phase modulation is an important application area. In particular, laser radar systems have been shown to perform better with non-linear frequency chirps. This work shows how dynamically tunable integrated optical ring resonators are able to produce such phase changes to a signal in an effective manner and offer new possibilities for the detection of phase-modulated optical signals. When designing and fabricating dynamically tunable integrated optical ring resonators for any application, system level requirements must be taken into account. For frequency chirped laser radar systems, the primary system level requirements are good long range performance and fine range resolution. These mainly depend on the first sidelobe level and mainlobe width of the autocorrelation of the chirp. Through simulation, the sidelobe level and mainlobe width of the autocorrelation of the non-linear frequency modulated chirp generated by a series of integrated optical ring resonators is shown to be significantly lower than the well-known tangent-FM chirp. Proof-of-concept experimentation is also important to verify simulation assumptions. A proof-of-concept experiment employing thermally tunable Silicon-Nitride integrated optical ring resonators is shown to generate non-linear frequency modulated chirp waveforms with peak instantaneous frequencies of 28 kHz. Besides laser radar waveform generation, three other system level applications of dynamically tunable integrated optical ring resonators are explored in this work. A series of dynamically tunable integrated optical ring resonators is shown to produce constant dispersion which can then help extract complex spectral information. Broadband photonic RF phase shifting for beam steering of a phased array antenna is also shown using dynamically tunable integrated optical ring resonators. Finally all-optical pulse compression for laser radar using dynamically tunable integrated optical ring resonators is shown through simulation and proof-of-concept experimentation.

The ability to fabricate semiconductor wafers with spatially selected regions of different bandgap material is required for the fabrication of monolithic photonic integrated circuits (PIC's). Although this subject has been studied for three decades and many semiconductor engineering approaches have been proposed, the problem of achieving reproducible results has constantly challenged scientists and engineers. This concerns not only the techniques relaying on multiple sequential epitaxial growth and selective area epitaxy, but also the conventional quantum well intermixing (QWI) technique that has been investigated as a post-growth approach for bandgap engineering. Among different QWI techniques, those based on the use of different lasers appear to be attractive in the context of high-precision and the potential for cost-effective bandgap engineering. For instance, a tightly focused beam of the infrared (IR) laser could be used for the annealing of small regions of a semiconductor wafer comprising different quantum well (QW) or quantum dot (QD) microstructures. The precision of such an approach in delivering wafers with well defined regions of different bandgap material will depend on the ability to control the laser-induced temperature, dynamics of the heating-cooling process and the ability to take advantage of the bandgap engineering diagnostics. In the frame of this thesis, I have investigated IR laser-induced QWI processes in QW wafers comprising GaAs/A1GaAs and InP/InGaAsP microstructures and in InAs QD microstructures grown on InP substrates. For that purpose, I have designed and set up a 2-laser system for selective area rapid thermal annealing (Laser-RTA) of semiconductor wafers. The advantage of such an approach is that it allows carrying out annealing with heating-cooling rates unattainable with conventional RTA techniques, while a tightly focused beam of one of the IR lasers is used for `spot annealing'. These features have enabled me to introduce a new method for iterative bandgap engineering at selected areas (IBESA) of semiconductor wafers. The method proves the ability to deliver both GaAs and InP based QW/QD wafers with regions of different bandgap energy controlled to better than « 1nm of the spectral emission wavelength. The IBESA technique could be used for tuning the optical characteristics of particular regions of a QW wafer prepared for the fabrication of a PIC. Also, this approach has the potential for tuning the emission wavelength of individual QDs in wafers designed, e.g., for the fabrication of single photon emitters. In the 1st Chapter of the thesis, I provide a short review of the literature on QWI techniques and I introduce the Laser - RTA method. The 2nd Chapter is devoted to the description of the fundamental processes related to the absorption of laser light in semiconductors. I also discuss the results of the finite element method applied for modeling and semi-quantitative description of the Laser - RTA process. Details of the experimental setup and developed procedures are provided in the 3rd Chapter. The results concerning direct bandgap engineering and iterative bandgap engineering are discussed in the 4th and 5th Chapters, respectively.

Depuis plusieurs années, le volume de données échangé à travers le monde augmente sans cesse. Pour gérer cette large quantité d’information, des débits élevés de transmission de données sur de longues distances sont essentiels. Puisque les interconnections à base de cuivre ne peuvent pas suivre cette tendance, des systèmes de transmission optique rapides sont requis dans les centre de données. Dans ce contexte, la photonique sur silicium est considérée comme une solution pour obtenir des circuits photoniques intégrés à un coût réduit. Bien que cette technologie ait connu une croissance significative au cours de la dernière décennie, les transmetteurs actuels à haut débit de transmission sont principalement basés sur des sources laser externes. Par conséquent, l’objectif de ce travail de thèse était de concevoir et produire un transmetteur à haut débit de transmission de données pour la photonique sur silicium, doté d’une source laser intégrée.Ce transmetteur se compose d’un modulateur silicium de type Mach-Zehnder, co-intégré sur la même plaque avec un laser hybride III-V sur silicium à réseaux de Bragg distribués, dont la longueur d’onde d’émission peut être contrôlée électriquement autour de 1.3μm. La conception des différents éléments constituant à la fois le laser (coupleurs adiabatique entre le III-V et le silicium, miroirs de Bragg) et le modulateur (jonctions p-n, électrodes à ondes progressives) est détaillée, de même que leur fabrication. Pendant la caractérisation des transmetteurs, des taux de transmission de données jusqu’à 25Gb/s, pour des distances allant jusqu’à 10km ont été démontrés avec succès, avec la possibilité de contrôler la longueur d’onde jusqu’à 8.5nm. Par ailleurs, afin d’améliorer l’intégration de la source laser avec le circuit photonique sur silicium, une solution basée sur le dépôt à basse température (en-dessous de 400°C) d’une couche de silicium amorphe pendant la fabrication est aussi évaluée. Des tests sur une cavité laser à contre-réaction distribuée ont montré des performances au niveau de l’état de l’art (avec des puissances de sortie supérieures à 30mW), prouvant ainsi la viabilité de cette approche. / For several years, the volume of digital data exchanged across the world has increased relentlessly. To manage this large amount of information, high data transmission rates over long distances are essential. Since copper-based interconnections cannot follow this tendency, high-speed optical transmission systems are required in the data centers. In this context, silicon photonics is seen as a way to obtain fully integrated photonic circuits at an expected low cost. While this technology has experienced significant growth in the last decade, the high-speed transmitters demonstrated up to now are mostly based on external laser sources. Thus, the aim of this PhD thesis was to design and produce a high-speed silicon photonic transmitter with an integrated laser source.This transmitter is composed of a high-speed silicon Mach-Zehnder, co-integrated on the same wafer with a hybrid III-V on silicon distributed Bragg reflector laser, which emission wavelength can be electrically tuned in the 1.3μm wavelength region. The design of the various elements constituting both the laser (III-V to silicon adiabatic couplers, Bragg reflectors) and the modulator (p-n junctions, travelling-wave electrodes) is thoroughly detailed, as well as their fabrication. During the characterization of the transmitters, high-speed data transmission rates up to 25Gb/s, for distances up to 10km are successfully demonstrated, with the possibility to tune the operating wavelength up to 8.5nm. Additionally, in order to further improve the integration of the laser source with the silicon photonic circuit, a solution based on the low-temperature (below 400°C) deposition of an amorphous silicon layer during the fabrication process is also evaluated. Tests on a distributed feed-back laser structure have shown performances at the state-of-the-art level (with output powers above 30mW), thus establishing the viability of this approach.

Tesis por compendio / [ES] El desarrollo científico y tecnológico de las últimas décadas ha dado lugar a sistemas sensores capaces de obtener, procesar y transmitir información sobre multitud de aspectos físicos y químicos, y utilizarla para mejorar aspectos clave de multitud de áreas de nuestra sociedad. Los sensores químicos son dispositivos compactos y miniaturizados capaces de ofrecer soluciones alternativas a las técnicas de análisis instrumental convencionales. En especial, los biosensores han adquirido gran relevancia por los avances que han supuesto para sectores estratégicos como el diagnóstico clínico, la industria alimentaria y el medio ambiente. Los biosensores ópticos se basan en interacciones entre la luz y la materia para transducir eventos de bioreconocimiento y presentan prestaciones importantes como la estabilidad, inmunidad a estímulos externos y versatilidad en el desarrollo de aproximaciones sin marcaje (label-free). Este último aspecto suele aprovechar fenómenos nanoscópicos y su desarrollo se encuentra muy ligado al progreso de la nanociencia y nanotecnología. Un aspecto clave en el biosensado sin marcaje consiste en descubrir y desarrollar nuevas estrategias de transducción. En este sentido, aunque se encuentren aun en una etapa temprana de desarrollo, los biosensores difractivos presentan un gran potencial en términos de simplicidad, miniaturización, y capacidad para minimizar señales no deseadas fruto de interacciones no específicas, entre otros aspectos. / [CA] El desenvolupament científic i tecnològic de les últimes dècades ha donat lloc a sistemes sensors capaços d'obtindre, processar i transmetre informació sobre multitud d'aspectes físics i químics, i utilizar-la per a millorar aspectes clau de multitud d'arees de la nostra societat. Els sensors químics són dispositius compactes i miniaturitzats capaços d'oferir solucions alternatives a les tècniques d'analisi instrumental convencionals. Especialment, els biosensors han adquirit gran rellevància pels avanços que han suposat per als sectors estratègics com el diagnòstic clínic, la industria alimentària i el medi ambient. Els biosensors òptics es basen en interaccions entre la llum i la matèria per a transduir esdeveniments de bioreconèixement i presenten prestacions importants com estabilitat, immunitat a estímuls externs i versatilitat en el desenvolupament d'aproximacions sense marcatge (label-free). Aquest últim aspecte sol aprofitat fenòmens nanoscòpics i el seu desenvolupament es troba molt lligat al progrés de la nanociència i nanotecnologia. Un aspecte clau en el biosensat sense marcatge consisteix a descobrir i desenvolupar noves estratègies de transducció. En aquest sentit, encara que es troben fins i tot en una etapa primerenca de desenvolupament, els biosensors difractius presenten un gran potencial en termes de simplicitat, miniaturització, i capacitat per a minimitzar senyals no desitjats fruit d'interaccions no específiques, entre altres aspectes. / [EN] The scientific and technological progress in recent decades has given rise to sensor systems capable of obtaining, processing, and transmitting information on a multitude of physical and chemical aspects and using it to improve key aspects of many areas of our society. Chemical sensors are compact, miniaturized devices capable of offering alternative solutions to conventional instrumental analysis techniques. In particular, biosensors have become highly relevant due to the progress they have brought to strategic sectors such as clinical diagnostics, the food industry, and the environment. Optical biosensors rely on interactions between light and matter to transduce biosensing events and provide important features such as stability, immunity to external stimuli, and versatility in the development of label-free approaches. This last aspect usually exploits nanoscopic phenomena and its development in closely linked to the progress in nanoscience and nanotechnology. A key aspect of label-free biosensing is the discovery and development of new transduction strategies. In this regard, although they are at an early stage of development, diffractive biosensors offer great potential in terms of simplicity, miniaturization, and the ability to minimize unwanted signals from non-specific interactions, among other aspects. / This work was financially supported by the Ministerio de Ciencia e Innovación/Agencia Estatal de Investigación (MCIN/AEI/10.13039/501100011033) co-funded by the European Union “ERDF A way of making Europe” (PID2019-110713RB-I00, TED2021-132584B-C21, PID2019-110877GB-I00), Ministerio de Economía y Competitividad (TEC2016-80385-P), Generalitat Valenciana (PROMETEO/2019/048 PROMETEO/2020/094, PROMETEO/2021/015, IDIFEDER/2021/046). A.J.D. ackowledges the FPI-UPV 2017 grant program. The authors acknowledge Instituto de Microelectrónica de Barcelona CNM-CSIC for the support in the fabrication of the measured chip samples on the Multiproject CNM-VLC silicon nitride technology platform. / Juste Dolz, AM. (2023). Biogratings: Diffractive Transducers for Biosensing in Photonic Platforms [Tesis doctoral]. Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/194251 / Compendio

This thesis presents an introduction to the design and simulation of a novel class of integrated photonic phased array switch elements. The main objective is to use nano-electromechanical (NEMS) based phase shifters of cascaded under-etched slot nanowires that are compact in size and require a small amount of power to operate them. The structure of the switch elements is organized such that it brings the phase shifting elements to the exterior sides of the photonic circuits. The transition slot couplers, used to interconnect the phase shifters, are designed to enable biasing one of the silicon beams of each phase shifter from an electrode located at the side of the phase shifter. The other silicon beam of each phase shifter is biased through the rest of the silicon structure of the switch element, which is taken as a ground. Phased array switch elements ranging from 2×2 up to 8×8 multiple-inputs/multiple-outputs (MIMO) are conveniently designed within reasonable footprints native to the current fabrication technologies. Chapter one presents the general layout of the various designs of the switch elements and demonstrates their novel features. This demonstration will show how waveguide disturbances in the interconnecting network from conventional switch elements can be avoided by adopting an innovative design. Some possible applications for the designed switch elements of different sizes and topologies are indicated throughout the chapter. Chapter two presents the design of the multimode interference (MMI) couplers used in the switch elements as splitters, combiners and waveguide crossovers. Simulation data and design methodologies for the multimode couplers of interest are detailed in this chapter. Chapter three presents the design and analysis of the NEMS-operated phase shifters. Both simulations and numerical analysis are utilized in the design of a 0º-180º capable NEMS-operated phase shifter. Additionally, the response of some of the designed photonic phased array switch elements is demonstrated in this chapter. An executive summary and conclusions sections are also included in the thesis.

This thesis presents an introduction to the design and simulation of a novel class of integrated photonic phased array switch elements. The main objective is to use nano-electromechanical (NEMS) based phase shifters of cascaded under-etched slot nanowires that are compact in size and require a small amount of power to operate them. The structure of the switch elements is organized such that it brings the phase shifting elements to the exterior sides of the photonic circuits. The transition slot couplers, used to interconnect the phase shifters, are designed to enable biasing one of the silicon beams of each phase shifter from an electrode located at the side of the phase shifter. The other silicon beam of each phase shifter is biased through the rest of the silicon structure of the switch element, which is taken as a ground. Phased array switch elements ranging from 2×2 up to 8×8 multiple-inputs/multiple-outputs (MIMO) are conveniently designed within reasonable footprints native to the current fabrication technologies. Chapter one presents the general layout of the various designs of the switch elements and demonstrates their novel features. This demonstration will show how waveguide disturbances in the interconnecting network from conventional switch elements can be avoided by adopting an innovative design. Some possible applications for the designed switch elements of different sizes and topologies are indicated throughout the chapter. Chapter two presents the design of the multimode interference (MMI) couplers used in the switch elements as splitters, combiners and waveguide crossovers. Simulation data and design methodologies for the multimode couplers of interest are detailed in this chapter. Chapter three presents the design and analysis of the NEMS-operated phase shifters. Both simulations and numerical analysis are utilized in the design of a 0º-180º capable NEMS-operated phase shifter. Additionally, the response of some of the designed photonic phased array switch elements is demonstrated in this chapter. An executive summary and conclusions sections are also included in the thesis.

[ES] La presente tesis se ha centrado en el modelado, diseño y demonstración experimental por primera vez del dispositivo Reconfigurable Reflective Arrayed Waveguide Grating (R-RAWG). Para la consecución de este dispositivo que tiene posibilidades de uso en la espectrometría, una plataforma de nitruro de silicio llamada CNM-VLC se ha usado, ya que este material permite operar en un gran ancho de banda. Esta plataforma posee ciertas limitaciones y los elementos necesarios para el funcionamiento de este dispositivo tenían un performance bajo. Por ello, se ha desarrollado y validado una metodología que ha permitido obtener mejores divisores. Además, se ha diseñado un inverted taper que ha mejorado considerablemente el acoplo de luz al chip. Esto ha sido gracias a un exhaustivo análisis de opciones existentes en la literatura que también ha permitido escoger la mejor opción para realizar un espejo reconfigurable en la plataforma sin cambiar ni añadir ningún proceso de fabricación. Se han demostrado espejos reconfigurables gracias a utilizar divisores ópticos realimentados y también se ha desarrollado códigos que predicen el comportamiento del dispositivo experimentalmente. Con todo el trabajo realizado, se ha diseñado un R-RAWG para que pudiera operar en un gran ancho de banda y que los actuadores de fase no tuvieran peligro de estropearse. También se ha desarrollado un código para el modelado del R-RAWG que permite imitar la fabricación de estos dispositivos y que, gracias a esto, se ha desarrollado un método o algoritmo llamado DPASTOR, que usa algoritmos usados en machine learning, para optimizar la respuesta con tan sólo la potencia óptica de salida. Finalmente, se ha diseñado una PCB para poder conectar eléctricamente el chip fotónico y se ha desarrollado un método de medida que ha permitido tener una respuesta estable consiguiendo demostrar multitud de respuestas de filtros ópticos con el mismo dispositivo. / [CAT] La present tesi s'ha centrat en el modelatge, disseny i demonstració experimental per primera vegada del dispositiu Reconfigurable Reflective Arrayed Waveguide Grating (R-RAWG). Per a la consecució d'aquest dispositiu que té possibilitats d'ús en l'espectrometria, una plataforma de nitrur de silici anomenada CNM-VLC s'ha usat ja que aquest material permet operar en una gran amplada de banda. Aquesta plataforma posseeix certes limitacions i els elements necessaris per al funcionament d'aquest dispositiu tenien un performance baix. Per això, s'ha desenvolupat i validat una metodologia que ha permés obtindre millors divisors i també, gràcies als processos de fabricació, s'ha dissenyat un acoplador que ha millorat considerablement l'acoble de llum al xip. Això ha sigut gràcies a un exhaustiu analisis d'opcions existents en la literatura que també ha permés triar la millor opció per a realitzar un espill reconfigurable en la plataforma sense canviar ni afegir cap procés de fabricació. S'han demonstrat espills reconfigurables gràcies a utilitzar divisors realimentats i també s'ha desenvolupat codis que prediuen el comportament del dispostiu experimentalment. Amb tot el treball realitzat, s'ha dissenyat un R-RAWG fent ús de determinades consideracions perquè poguera operar en una gran amplada de banda i que els actuadors de fase no tingueren perill de desbaratar-se. També s'ha desenvolupat un codi per al modelatge del R-RAWG que permet imitar la fabricació d'aquests dispositius i que, gràcies a això, s'ha desenvolupat un mètode o algorisme anomenat DPASTOR, que usa algorismes usats en machine learning, per a optimitzar la resposta amb tan sols la potència òptica d'eixida. Finalment, s'ha dissenyat una PCB per a poder connectar elèctricament el xip fotònic i s'ha desenvolupat un mètode de mesura que ha permés tindre una resposta estable aconseguint demostrar multitud de respostes de filtres òptics amb el mateix dispositiu. / [EN] This thesis is focused on the modelling, design and experimental demonstration for the first time of Reconfigurable Reflective Arrayed Waveguide Grating (R-RAWG) device. In order to build this device, that can be employed in spectrometry, a silicon nitride platform termed CNM-VLC has been chosen since this material allows to operate in broad range of wavelengths. This platform has the necessary elements, but some limitations because the operation of this device had a low performance. Therefore, a methodology has been developed and validated, which has allowed to obtain better splitters. Also an inverted taper has been designed, which has considerably improved the coupling of light to the chip. This has been possible thanks to an exhaustive analysis of existing options in the literature, that has allowed choosing the best option to make a reconfigurable mirror on the platform without changing or adding new manufacturing steps. Reconfigurable mirrors have been demonstrated by using feedback splitters. Furthermore, codes have been developed to predict the behaviour of the actual device. With all the work done, a R-RAWG has been designed by using certain considerations so that it can operate over a broad wavelength range and the phase actuators are not in danger of being damaged. A code has also been developed for the modelling of the R-RAWG, which allows manufacturing imperfections to be considered, thanks to this, a method or algorithm called DPASTOR has been developed. DPASTOR resembles machine learning to optimise the response by just using the optical output power. Finally, a PCB and an assembly with the chip interconnected to it have been made and designed. Moreover, a measurement method has been developed, which has made it possible to have a stable response and to demonstrate a multitude of optical filter responses with the same device. / Fernández Vicente, J. (2021). Reconfigurable Reflective Arrayed Waveguide Grating on Silicon Nitride [Tesis doctoral]. Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/165783 / TESIS