Kyoto University (京都大学) / 0048 / 新制・課程博士 / 博士(工学) / 甲第16841号 / 工博第3562号 / 新制||工||1538(附属図書館) / 29516 / 京都大学大学院工学研究科マイクロエンジニアリング専攻 / (主査)教授 松原 厚, 教授 松久 寛, 教授 西脇 眞二 / 学位規則第4条第1項該当

This thesis deals with the design of a dynamic model of a harmonic drive. It includes a theoretical study aimed at the analysis of the harmonic drive gearing principle and its nonlinear properties. The first part of the practical section deals with the analytical calculation of the nondeformed geometry of the Flexspline. Based on these results, several simulations in ANSYS are created to identify torsional characteristics of a harmonic drive. These simulation models are further enhanced by the analysis of clearance, backlash and inaccuracies and their impact on torsional properties. By using MATLAB /Simulink, several dynamic submodels are created representing the individual characteristics of nonlinearities in harmonic drives. Furthermore, a comprehensive dynamic model is created of the mechatronic system which is describing all nonlinearities and kinematic error of the transmission. The dynamic model is also experimentally verified based on its damping properties.

Ultraprecision single point diamond turning is required to produce parts with sub-nanometer surface roughness and sub-micrometer surface profiles tolerances. These parts have applications in the optics industry, where tight form accuracy is required while achieving high surface finish quality. Generally, parts can be polished to achieve the desired finish, but then the form accuracy can easily be lost in the process rendering the part unusable. Currently, most mid to low spatial frequency surface finish errors are inspected offline. This is done by physically removing the workpiece from the machining fixture and mounting the part in a laser interferometer. This action introduces errors in itself through minute differences in the support conditions of the over constrained part on a machine as compared to the mounting conditions used for part measurement. Once removed, the fixture induced stresses and the part’s internal residual stresses relax and change the shape of the generally thin parts machined in these applications. Thereby, the offline inspection provides an erroneous description of the performance of the machine. This research explores the use of a single, high resolution, capacitance sensor to quickly and qualitatively measure the low to mid spatial frequencies on the workpiece surface, while it is mounted in a fixture on a standard ultraprecision single point diamond turning machine after a standard facing operation. Following initial testing, a strong qualitative correlation exists between the surface profiling on a standard offline system and this online measuring system. Despite environmental effects and the effects of the machine on the measurement system, the capacitive system with some modifications and awareness of its measurement method is a viable option for measuring mid to low spatial frequencies on a workpiece surface mounted on an ultraprecision machine with a resolution of 1nm with an error band of ±5nm with a 20kHz bandwidth. / Thesis / Master of Applied Science (MASc)