As the boundaries of Moore's Law rapidly approach, research is increasingly turning to exotic materials and metamaterials to advance the capabilities of electronic and micromechanical systems. This thesis presents systems, models, and simulation techniques for novel microfabrication in the realms of silicon carbide (SiC) and metal mesh filters. Through the unification of femtosecond laser pulses, high numerical aperture (NA) objective lenses, and system power and motion control, a system capable of achieving arbitrary 3D features without line-of-sight with aspect ratios up to 109:1 in SiC is developed. Additionally, a model of a direct-write femtosecond-laser-ablation fabricated metal mesh filter (MMF) is simulated in ANSYS High Frequency Structure Simulator (HFSS) and validates the novel fabrication technique. Finally, a transmission-line-theory based MMF model is presented as an alternative to modelling multilayer filters in HFSS. This model produces comparable results to an HFSS simulation with dramatically reduced computational intensity.

Orientador: Jose Alexandre Diniz / Tese (doutorado) - Universidade Estadual de Campinas, Faculdade de Engenharia Eletrica e de Computação / Made available in DSpace on 2018-08-11T06:36:37Z (GMT). No. of bitstreams: 1 Melo_ArlineMaria_D.pdf: 17701586 bytes, checksum: b5160ad894463745fdeea0dae1f71065 (MD5) Previous issue date: 2007 / Resumo: Este trabalho apresenta importantes informações sobre tecnologia THz, atualmente considerada um desafio tecnológico e estado da arte em diversas áreas de desenvolvimento. Com o objetivo de formar um sistema imageador THz, ainda indisponível comercialmente, foram dispensados esforços em diferentes frentes. Câmeras para o infravermelho médio (8 ¿ 14 µm) foram adquiridas, caracterizadas e testadas, com resultados relevantes e inéditos em Física Solar, aplicação considerada para este trabalho. Filtros de malha ressonante para diversas bandas na região THz (centrados em 0,4, 0,67, 0,85, 2, 4 e 8,5 THz) foram projetados, fabricados e testados exibindo excepcional resposta. E finalmente um primeiro protótipo imageador foi montado acoplando os filtros de malha ressonante a câmera IV sem sua óptica original de germânio. As primeiras imagens THz de uma resistência aquecida é apresentada, provando a funcionalidade do conceito original. Os desenvolvimentos e estudos aqui apresentados estarão contribuindo para dois experimentos espaciais recentemente propostos, DESIR ( Detection of Solar eruptive Infrared Radiation) e SIRA (Submillimeter-wave to InfraRed solar Activity emissions), prevendo a utilização de sistemas THz em observações de transientes em plasmas ativos solares em diferentes freqüências, a partir do solo e no espaço / Abstract: This work presents important information on THz technology, currently considered a technological challenge and state of the art in different areas of development. To form a THz imaging system, still unavailable commercially, efforts in different fronts had been excused. Cameras for medium IR (8 - 14 µm) had been acquired, characterized and tested, with excellent and unknown results in Solar Physics, application considered for this work. Filters of resonant metal mesh for diverse bands in the THz region (centered in 0,4, 0,67, 0,85, 2, 4 and 8,5 THz) had been projected, manufactured and tested showing excellent results. Finally a first imaging system was mounted connecting the filters of resonant mesh to the IR camera without its original optics of germanium. The first THz images of a warm resistance are presented, proving the functionality of the original concept. The developments and studies presented here will contribute for two space experiments recently considered, DESIR ( Solar Detection of eruptive Infrared Radiation) and SIRA ( Submillimeter-wave you the solar InfraRed Activity emissions), requiring the use of THz systems for observations of transient in solar active plasmas in different frequencies, from the ground and in the space / Doutorado / Eletrônica, Microeletrônica e Optoeletrônica / Doutor em Engenharia Elétrica