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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
1

Systems, Models, and Simulation for Novel Microfabrication of Silicon Carbide and Metal Mesh Filters

Stevenson, Hunter R. J. 16 April 2024 (has links) (PDF)
As the boundaries of Moore's Law rapidly approach, research is increasingly turning to exotic materials and metamaterials to advance the capabilities of electronic and micromechanical systems. This thesis presents systems, models, and simulation techniques for novel microfabrication in the realms of silicon carbide (SiC) and metal mesh filters. Through the unification of femtosecond laser pulses, high numerical aperture (NA) objective lenses, and system power and motion control, a system capable of achieving arbitrary 3D features without line-of-sight with aspect ratios up to 109:1 in SiC is developed. Additionally, a model of a direct-write femtosecond-laser-ablation fabricated metal mesh filter (MMF) is simulated in ANSYS High Frequency Structure Simulator (HFSS) and validates the novel fabrication technique. Finally, a transmission-line-theory based MMF model is presented as an alternative to modelling multilayer filters in HFSS. This model produces comparable results to an HFSS simulation with dramatically reduced computational intensity.

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