In this master thesis, the goal was to devise design patterns and a fabrication processfor manufacturing a 3-D rotationally symmetric converging-diverging cold gasmicronozzle in silicon.The report explains the theory of etching and the methods involved. The work beginswith calculations and simulations of the etching processes. The chosen etch techniqueutilizes so called microloading and reactive ion etching lag effects, which essentially arephenomena where the etch rate can be adjusted by breaking up mask features intosubpatterns, and the etch depth for a given recipe and time can be made to differlocally. The subpatterns consisted of very small rectangles and triangles withalternating concentration. Five different recipes for the reactive ion etching weretried, where the coil power, platen power, pressure, temperature and time wasvaried.Etch rates could be made to differ locally depending on the concentration ofsubpatterns within the mask feature. The etch rates were also affected by the recipeparameters such as coil power, platen power, and pressure. High coil and platenpower increased the etch rate, while high pressure reduced the etch rate. The platenpower also affected the surface roughness.A solution for reducing misalignment problems in the future for the fusion bondingprocess resulted in the proposed moiré patterns that were made to showmisalignments down to 0.2 μm.Through scanning electron microscopy, the Nozzle 5_4_2 was concluded to have themost rotationally symmetric cross section at both the throat and the outlet. It hasthroat diameter of 31.1 μm with a depth of 34.2 μm and an outlet diameter of146.4 μm with a depth of 113.2 μm

This is predominantly a qualitative study on the manufacturing of micronozzles with an additive manufacturing (AM) technique, namely the laser-powered powder bed fusion (PBF-LB).  Manufacturing of micronozzles with standard microelectromechanical system technology often results in 2.5-D or close to 3-D structures and does not yield a fully rotationally symmetric nozzle. For this reason, AM can be a better solution. However, the structures obtained with PBF-LB exhibit very rough surfaces which will impair the performance of the micronozzle. To improve the surface finish electropolishing was performed on the interior walls.  Given the shape and the scale of the components, uniformity of the polishing is a challenge, calling for an inventive electrode configuration and electrolyte feed solution. The approach was to integrate an electrode on the inside of the converging part of the nozzle, to serve as a cathode for the electropolishing, already in the process, and to make the nozzle itself the vital part of the fluidic system.  With this, titanium micronozzles were manufactured with throat diameters varying between 300 and 800 μm. With the resolution of the used AM technique, it was possible to integrate the internal electrode in the micronozzles with a designed throat diameter down to 600 μm. Below this, the anode, and cathode, sometimes made contact short-circuiting the cell. Profilometry showed a decrease of the average surface roughness (𝑅𝑅𝑎𝑎) with 15-60 % for the electropolished micronozzles. The Schlieren imaging showed an exhaust that followed the throat’s axial direction and also demonstrated pressure disks and, hence, a supersonic jet exhaust. This study has shown that AM is a viable choice for manufacturing of rotationally symmetric micronozzles, and that electropolishing could be used to decrease the surface roughness on their inside uniformly with the integration of a cathode.