This thesis is missing page i, all other copies are missing this page as well. - Digitization Centre / Emergence of efficient cooling techniques has been a crucial factor in development of faster and more powerful electronic equipment and ICs. One of the key obstacles towards further miniaturization is efficient heat removal from regions of high temperature to maintain continued operation of these devices below their maximum operating range. Recently, a significant amount of research has been directed to develop liquid based cooling techniques. For example, microchannel heatsinks have been designed to remove up to 1 kW/cm2. Developing microscale actuators that provide sufficient pressure head is essential for integrating these microscale cooling schemes with the electronic devices. Different techniques can be used to pump fluid in the microscale such as electroosmotic, magnetohydrodynamic, and electrohydrodynamic (EHD) pumping. Among these technologies, EHD pumps are particularly promising for microfluidic devices because they use no moving parts, and uses very small power and has low cost and maintenance requirements. This work presents the development and test of EHD micropumps with different electrode configurations. Four different electrode configurations: (1) planar symmetric electrodes, (2) planar asymmetric electrodes, (3) 3-D symmetric electrodes, and (4) 3-D asymmetric electrodes were investigated. In addition, the effect of different design specifications, such as the inter-electrode spacing and spanwise spacing of the micropillars were investigated. The electrodes were fabricated using a two mask process. First, a thin layer of chromium was deposited on glass as a seed layer for gold electrodes. Positive photoresist (AZ P4620) was patterned to form the mould for the micropillar electrodes. Nickel was electroplated to fill the mold. Subsequently, a Cr/Au layer was patterned to devise the electrode base connector and pads. The microfluidic channels were fabricated by casting polydimethylsiloxane (PDMS) on top of an SU-8 100 (MicroChem Corp.) mould which was patterned to delineate the microchannel structure. The PDMS microchannel was integrated on the electrode base by plasma oxidizing the PDMS and glass wafer, and sealing the connection with liquid PDMS. The pump performance was experimentally determined with Methoxynonafluorobutane (HFE-7100) as the working fluid. All of the micropumps were tested under a no net flow condition to find the maximum pressure generation. The micropumps with planar and asymmetric planar electrode configurations were also tested for maximum flow rate under no imposed back pressure. The results show that the micropumps with the 3D asymmetric electrode design generated a higher pressure head compared to the other micropumps with identical inter electrode spacing under no flow conditions. The micropumps with planar asymmetric design had a higher performance compared to the micropumps with planar asymmetric electric under both no flow condition and no back pressure condition. A maximum pressure head of 2240 Pa was generated at an applied voltage of 900 V by the micropump with 3D asymmetric electrode design. A maximum flow rate of 0.127 mL/min was achieved by the micropump with planar asymmetric electrode configurations. This is five times higher than the maximum flow rate generated by the micropump with the planar symmetric electrode design. / Thesis / Master of Science (MS)

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This thesis explores a method to fabricate magnetic membranes with asymmetric distribution of particles and their testing as actuators. Focus of this research is to fabricate thin polymeric sheets and thickness range of 120-125µm, with asymmetric distribution of magnetic nano particles, employing micromagnets during the fabrication. The micromagnets are used to localize the magnetic particles during the curing process at selected locations. The effect of the asymmetric distribution of magnetic particles in the membrane is used for the first time. Magnetite (Fe3O4) is used as the magnetic particles that is embedded into a polymeric membrane made of polydimethylsiloxane (PDMS); the membrane is then tested in terms of deflection observed by using a high-resolution camera. From the perspective of the biomedical application, PDMS is chosen for its excellent biocompatibility and mechanical properties, and Fe3O4 for its non-toxic nature. Since magnetic actuation does not require onboard batteries or other power systems, it is very convenient to use in embedded devices or where the access is made difficult. A comparative study of membranes with asymmetric and randomly distributed particles is carried out in this thesis. The asymmetric distribution of magnetic particles can benefit applications involving localized and targeted treatments and precision medicine.

Doctor of Philosophy / Department of Chemistry / Christopher T. Culbertson / Recent approaches in analytical separations are being advanced towards the “lab-on-a-chip” concept in which multiple lab functions are integrated into micro/nano fluidic platforms. Among the variety of separation techniques that can be implemented on microfluidic devices, capillary electrophoresis is the most popular as it provides high efficiency, simple, fast and low cost separations. In addition, integrating miniaturized fluid manipulation tools into microfluidic devices with separations is essential for a variety of biological applications. Chapter 1 discusses the fundamentals of capillary electrophoresis and miniaturized fluid manipulation tools and provides an over view of single cell analysis in microfluidics. In chapter 2, the integration of miniaturized peristaltic pumps into multilayer microfluidic platforms is discussed. In addition, device characterization, precise fluid control and high throughput single cell analysis are discussed. As a proof of principle, T-lymphocytes were loaded with two fluorescent probes Carboxyfluorescein diacetate (CFDA) and Oregon green (OG). Thousands of single cells were automatically transported, lysed on these devices and analytes from the lysate were electrophoretically separated. 1120 cells were analyzed over the course of 80 min (14 cells/min) and separation characteristics of analytes released from individual cells were investigated. In the third chapter, the development of microfluidic platforms for the electrochemical detection of nitric oxide (NO) and other reactive nitrogen species (RNS) at the single cell level is discussed. A microfluidic system was developed to perform rapid cell lysis followed by electrochemical detection. Miniaturized microband electrodes were designed and integrated with a microfluidic separation channel. Three alignment techniques (in-channel, end-channel and off-channel configurations) were used to detect the electrochemical response of the analyte of interest. Furthermore, a model analyte (CFDA) was used to demonstrate the potential of performing the simultaneous dual detection with electrochemical and laser induced fluorescence detection. In addition, the same microfluidic platform was adapted to detect intracellular superoxide using laser induced fluorescence. In the fourth chapter, the off-chip integration of optical fiber bridges with multilayer microfluidic chips is discussed. A multimode optical fiber (~10cm long) was integrated between the single cell lysing spot and a spot downstream of the separation channel in order to detect both intact cells and the analyte in the lysate. This technique was used to create two detection spots on the microfluidic platform with the use of a single excitation source and single detector. Fluorescently labeled T-lymphocytes were automatically transported and lysed in a manner similar to that described in chapter 2. Hundreds of single cells were analyzed and the absolute migration time was determined for the analytes in the lysate. In addition, the separation characteristics of fluorescently labeled protein kinase B peptide substrates were investigated. Furthermore, this technique was used to measure cell size and the velocity of intact cells (discussed in 5th chapter) by making use of a light tunneling concept available in multimode optical fibers. All the experiments presented in this dissertation exploit the use of multilayer microfluidic platforms to investigate intracellular components in single cells in a high throughput manner that has several advantages over current conventional techniques.

Orientador: Euripedes Guilherme de Oliveira Nobrega / Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Mecanica / Made available in DSpace on 2018-08-06T12:28:24Z (GMT). No. of bitstreams: 1 Costa_JulianoNunes_M.pdf: 1943364 bytes, checksum: 37bfdc87a8b3b47e435c8aadfe91806a (MD5) Previous issue date: 2006 / Resumo: Hoje em dia, os microssistemas eletromecânicos (MEMS) constituem uma das áreas mais promissoras e de rápido crescimento entre as novas tecnologias. Uma área de destaque na utilização de MEMS é a microfluídica, onde diversos tipos de equipamentos miniaturizados são necessários. As microbombas têm um papel fundamental neste tipo de microdispositivos, devido a sua função de prover quantidades muito pequenas de fluidos de maneira segura e uniforme. O presente trabalho apresenta o processo de desenvolvimento de uma microbomba de diafragma oscilante sem válvulas e com atuação pneumática. Para se construir a microbomba sem válvulas, primeiramente foi feito um estudo sobre os elementos bocaljdifusor, que representam na microbomba o papel das válvulas. Com o objetivo de se analisar o comportamento da microbomba, foi feita uma simulação numérica utilizando-se a analogia por circuitos elétricos equivalentes, reconhecidamente um método simples e eficiente' de simulação de sistemas multidomínios, onde a grande maioria dos microdispositivos podem ser classificados. Por fim, foram projetados e montados protótipos da microbomba utilizahdo-se a tecnologia de microfabricação Litografia Profunda em polímeros flexográficos, onde se faz o uso de radiação ultravioleta. Tal opção se deve a que esta é uma tecnologia de baixo custo e de fácil utilização. Foi feito em seguida o levantamento de desempenho da microbomba, onde vários testes foram realizados para se conhecer a relação de pressão versus vazão / Abstract: Nowadays, Micro-Electromechanical systems (MEMS) constitute one of the most promising and fast expanding fields among the new technologies. Microfiuidic systems are a noteworthy sub-area of MEMS, demanding several types of microdevices to be developed. Micropumps have a fundamental role in thee systems, due to the need of supplying minimal amounts of fiuid in a guaranteed and uniform way. This work presents the process of development of. prototypes of aval veless micropump based upon reciprocating diaphragm and pneumatic actuation. To construct the valveless micropump, firstly it was made a study on the nozzlej diffuser elements, which represent in these micropumps the valve function. Aiming to analyse the behavior of the micropump, a numeric simulation was studied using electrical equivalent networks, known as a simple and eflicient method of simulation of multidomain systems, a classification most MEMS follow. Finally, it was designed and constructed prototypes of the micropumps using the Deep Lithography in fiexographics polymers micro-manufacture technology. This option is due to the low cost characteristic of this technology and also because it is very easy to learn how to produce the prototypes. ln the sequence, the nerformance of the micropump was studied through several experimental tests in order to know its pressure and fiow behavior / Mestrado / Mecanica dos Sólidos e Projeto Mecanico / Mestre em Engenharia Mecânica

Orientador: Luiz Otavio Saraiva Ferreira / Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Mecanica / Made available in DSpace on 2018-08-06T16:27:32Z (GMT). No. of bitstreams: 1 Espindola_AlexeyMarques_M.pdf: 1293939 bytes, checksum: 66ab2d16dc552294762d6c3708cda71b (MD5) Previous issue date: 2006 / Resumo: Os sistemas microfluidicos estão evoluindo rapidamente, encontrando vastas aplicações na mais diversas áreas do conhecimento. Os Lab-on-Chips, LOCs, são dispositivos capazes de realizar análises químicas e bioquímicas em um único chip. Este dispositivo pode causar grande impacto no mercado de análises laboratoriais, por este motivo vem ganhando grande atenção Para realizar estas análises os LOCs necessitam de microbombas capazes de transportar quantidades ínfimas de fluidos em seus canais de maneira acurada e uniforme. Desta forma, o interesse em modelar e fabricar microbombas tomou-se uma área fértil para a pesquisa. Neste trabalho foi desenvolvida a modelagem de uma microbomba peristáltica de elastõmero, tipo de bomba mais conveniente para Lab-on-Chips, utilizando a técnica de analogias eletro-mecânicas que consiste em representar um dispositivo por um circuito elétrico equivalente. As análises das simulações podem ser realizadas usando programas de análise de circuitos elétricos. Dois modelos foram apresentados neste trabalho. O primeiro é a reprodução do modelo de bomba criado por Jacques Goulpeau, em que o modelo de uma válvula é extrapolando para toda a microbomba. O segundo contém o circuito elétrico equivalente da bomba completa mostrando a interações entre suas partes. Os resultados mostram que o comportamento da microbomba não pode ser completamente descrito pelo modelo extrapolado a partir de uma válvula, devido às interações entre três válvulas. As simulações do circuito equivalente da bomba completa mostraram que os efeitos das interações entre as válvulas explicam claramente a diferença entre a vazão prevista pelo modelo de Goulpeau e os dados experimentais por ele obtidos, sendo possível ajustar o modelo aos dados experimentais / Abstract: Microfluidies systems are growing rapidly, finding a large nwnber of applications in many fields. Lab-on-ehips, LOC, are deviees that ean perform ehemical and biochemical analyses in a ehip. This device ean cause high impact on laboratorial analyses market, and then it is gaining large attention. In order to execute these analyses on LOC, mieropumps are necessary to transport a tiny quantity of fluid between the channeIs with accuracy and uniformity. Thus, the interests of modeling and fabrication mieropwnps are increasing and become a fertile research field. The goal of this work were a modeling of elastomer peristaltic micropwnp, the most suitable pwnp for LOCs, using the electro- mechanical analogy technique that consist in represent the device in a electrical equivalent networks. Then the simulation analyses can be done on electrical simulation tools. Two models were presented in this work. The first is reproduction of the pwnp model made by Jacques Goulpeau et aI., where the valve model is extrapolated to the whole mieropwnp. The second contains the electrical equivalent circuit that represents the whole device showing the interactions between its eomponents. The results showed that micropump behavior eouldn't completely deseribe by the extrapolated model ftom a valve, because the interactions between the three valves. The simulations of electrical equivalent eircuit of the whole pwnp showed that the interaction between the valves explain the difference between of flow rate foreseen by Goulpeau model and his experimental data, being possible to adjust the model to the experimental data / Mestrado / Mecanica dos Sólidos e Projeto Mecanico / Mestre em Engenharia Mecânica