Orientador: Euripedes Guilherme de Oliveira Nobrega / Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Mecanica / Made available in DSpace on 2018-08-06T12:28:24Z (GMT). No. of bitstreams: 1 Costa_JulianoNunes_M.pdf: 1943364 bytes, checksum: 37bfdc87a8b3b47e435c8aadfe91806a (MD5) Previous issue date: 2006 / Resumo: Hoje em dia, os microssistemas eletromecânicos (MEMS) constituem uma das áreas mais promissoras e de rápido crescimento entre as novas tecnologias. Uma área de destaque na utilização de MEMS é a microfluídica, onde diversos tipos de equipamentos miniaturizados são necessários. As microbombas têm um papel fundamental neste tipo de microdispositivos, devido a sua função de prover quantidades muito pequenas de fluidos de maneira segura e uniforme. O presente trabalho apresenta o processo de desenvolvimento de uma microbomba de diafragma oscilante sem válvulas e com atuação pneumática. Para se construir a microbomba sem válvulas, primeiramente foi feito um estudo sobre os elementos bocaljdifusor, que representam na microbomba o papel das válvulas. Com o objetivo de se analisar o comportamento da microbomba, foi feita uma simulação numérica utilizando-se a analogia por circuitos elétricos equivalentes, reconhecidamente um método simples e eficiente' de simulação de sistemas multidomínios, onde a grande maioria dos microdispositivos podem ser classificados. Por fim, foram projetados e montados protótipos da microbomba utilizahdo-se a tecnologia de microfabricação Litografia Profunda em polímeros flexográficos, onde se faz o uso de radiação ultravioleta. Tal opção se deve a que esta é uma tecnologia de baixo custo e de fácil utilização. Foi feito em seguida o levantamento de desempenho da microbomba, onde vários testes foram realizados para se conhecer a relação de pressão versus vazão / Abstract: Nowadays, Micro-Electromechanical systems (MEMS) constitute one of the most promising and fast expanding fields among the new technologies. Microfiuidic systems are a noteworthy sub-area of MEMS, demanding several types of microdevices to be developed. Micropumps have a fundamental role in thee systems, due to the need of supplying minimal amounts of fiuid in a guaranteed and uniform way. This work presents the process of development of. prototypes of aval veless micropump based upon reciprocating diaphragm and pneumatic actuation. To construct the valveless micropump, firstly it was made a study on the nozzlej diffuser elements, which represent in these micropumps the valve function. Aiming to analyse the behavior of the micropump, a numeric simulation was studied using electrical equivalent networks, known as a simple and eflicient method of simulation of multidomain systems, a classification most MEMS follow. Finally, it was designed and constructed prototypes of the micropumps using the Deep Lithography in fiexographics polymers micro-manufacture technology. This option is due to the low cost characteristic of this technology and also because it is very easy to learn how to produce the prototypes. ln the sequence, the nerformance of the micropump was studied through several experimental tests in order to know its pressure and fiow behavior / Mestrado / Mecanica dos Sólidos e Projeto Mecanico / Mestre em Engenharia Mecânica

L'objectif de la thèse est la fabrication et caractérisation de microlasers 3D à base de polymères dopés par des colorants organiques et des nanoparticules d'erbium et Ytterbium. Au début, nous avons étudié des structures polymères avec de très bons facteurs d'aspect, ainsi que le déplacement de nanoparticules lors de l'exposition à un éclairement périodique. La réalisation majeure de cette thèse est l'obtention de microlasers 3D par lithographie UV. Ensuite nous avons comparé les seuils lasers de ces structures pour différentes méthodes de fabrication. Dans des micro-cubes, nous avons identifié des orbites périodiques planes en forme de carré. L'analyse des orbites périodiques dans des microlasers Fabry-Perot 3D a montré que leur forme dépend du colorant, de la nature du substrat et de la taille de la structure (largeur et épaisseur).La dernière partie de ce travail consiste en la synthèse de nanoparticules d'oxyde d'erbium et ytterbium à basse température et en milieu anhydre. Ces nano-particules ont ensuite été introduites dans des composites à base de polymères qui ont donné lieu à la fabrication de micro-lasers 3D et à leur caractérisation. / The aim of the thesis is the fabrication and optical characterization of three-dimensional organic microlasers based on organic dyes and luminescent erbium/ytterbium nanoparticles.At the beginning, we considered submicron polymer structures with high aspect ratio, as well as the phenomenon of redistribution of nanoparticles in the volume of the composite during the exposure by a periodic light field pattern.The main part of the work is devoted to obtaining three-dimensional polymer microlasers by UV-lithography. Comparison of the lasing threshold for microcavities obtained by different methods was performed. Periodic orbits in cuboid microlasers with square cross-section were identified. Analysis of possible periodic orbits in microlasers Fabry-Perot showed that the shape of the orbit depends on the dye, the type of substrate and the size of the microlaser (width, height).The last part of the work contains a study of low-temperature synthesis of luminescent nanoparticles of erbium and ytterbium oxides in a anhydrous medium, and polymer composites based on them. Three dimensional organic microlasers doped by these luminescent nanoparticles were obtained and investigated.