Micromirrors and diffraction gratings were developed for spectroscopy and magnetic field sensor in this thesis. MEMS blazed gratings were successfully fabricated in different grating periodicities to cover a wide infrared wavelength range. Lorentz force actuated micromirrors were investigated, and two types of mirrors were fabricated: rotating and pop-up micromirrors. The deflection angle of the mirrors was controllable by altering the driving current on the mirror. Deflection angle vs. driving current was studied for different mirror types and different spring dimensions. A Lorentz force based magnetic field sensor is also demonstrated. The sensor employs the rotating micromirror as a resonator. With an AC current flowing around the micromirror, a periodic Lorentz force is generated which drives the resonator. The rotational amplitude of the micromirror is measured with an optical positioning system and external circuits. The highest resolution of the magnetic field sensor is 0.4 nT at 50 mArms, and 53 mHz filter bandwidth. With appropriate current level, this sensor can measure a wide range of magnetic field, from nT to T. / October 2016

The objective of this work presented here is to extend the capabilities of siloxane waveguide technology in the field of biochemical sensing. Recent advances in the integration of polymeric optical waveguides with electronics onto standard printed circuit boards (PCBs) allow the formation of cost-effective lab-on-achip modules suitable for mass production. This technology has been primarily designed for on-board data communication. The focus of this research is to investigate the possibility of realising a Siloxane polymer based lab-on-chip sensor. Different siloxane-polymer-based optical waveguide sensor structures have been designed and analysed from the aspect of biochemical sensing. An evanescent-wave absorption sensor based on mode-selective asymmetric waveguide junctions is proposed for the first time. The device mitigates the common optical effect of spurious response in absorption sensors due to the analyte transport fluid. Head injury is the leading cause of death in the population of people under 40 years. Currently, 3 out of 5 deaths in emergency rooms are due to severe brain injuries in the developed world. Researchers at the Neurosciences Critical Care Unit (NCCU) at Addenbrooke's Hospital have managed to correlate biochemical changes with the severeness of the injury and the likelihood of patient recovery. Considerable progress has been made to develop a lab-on-chip sensor capable of continuously monitoring glucose, lactate and pyruvate concentrations in the brain fluid, hence the contribution to the current trend in the advancement of portable lab-on-chip technologies for the deployment of point-of-care diagnostic tools. A novel recognition layer has been developed based on porphyrin in combination with glucose, lactate and pyruvate oxidase for measuring all the analytes, enabling fast and reversible chemical reactions to be monitored by optical interrogation. The operational wavelength of the developed recognition layer is 425 nm, which required the formation of polymer features that were beyond the fabrication capabilities at the time. Through considerable process development and the adoption of nanoimprinting lithography, siloxane polymer based optical waveguides were fabricated allowing the realisation of highly sensitive optical sensors. Based on the results that are presented here, it can be concluded the functionalization of siloxane polymer waveguide have a potential for realising biochemical sensors in the future. The new fabrication technique will allow the formation of more robust and complex lab-on-chip sensors based on this material.

This work highlights slab coupled optical sensors (SCOS) and their ability to measure high voltages. Although other high voltage measurement techniques exist, most of these techniques are electrical devices and are therefore more susceptible to stray ground currents and other electromagnetic interferences (EMI), which may cause signal distortion. Optical sensors are less susceptible to such interferences and these sensors, such as the Pockels cell, have been used in measuring high voltage. SCOS offer an alternative method of measuring high voltage optically. Consisting of an optical fiber and an electro-optic slab waveguide, SCOS have the advantage of being very small in size (0.2 mm x 0.3 mm cross-section), simpler composition, and potentially less coupling losses. Issues associated with high voltage measurements are addressed such as unwanted corona, arcing, and EMI. Solutions are also explored which include insolating materials, electrode geometries, Faraday cages, and using optical sensors such as SCOS. Although the SCOS has been traditionally used to measure electric field, the SCOS is able to measure high voltage through the use of an electrode structure. The SCOS' ability to measure high voltage is showcase through the construction and output measurements of several high voltage systems: an ignition coil-based circuit, a dual ignition coil circuit, a Marx generator, and a 200 kV generator used in a capacitor discharge configuration. These measurements show the SCOS' ability to measure at least 111 kV capacitor discharges with 6.6 ns rise times and other various high voltage waveforms.

In the first study, superconducting 2D NbSe₂ was examined towards its prototypical demonstration as a transition-edge sensor, where photoexcitation caused a thermodynamic phase transition in NbSe₂ from the superconducting state to the normal state. The efficacy of the optical absorption was found to depend on the wavelength of the incoming radiation used, which ranged from the ultra-violet (405 nm), visible (660 nm), to the infrared (1060 nm). In the second case involving WSe₂, the UV-ozone treatment revealed the presence of localized excitonic emission in 1L WSe₂ that was robust and long-lived. Our third material platform dealt with hybrid 0D-2D ensembles based on graphene and WSe₂, specifically graphene–endohedral, WSe₂–fullerene (C₆₀), and WSe₂–Au nanoparticles, and exhibited exceptional performance gains achieved with both types of hybrid structures. Next, we investigated WSe₂ based mixed dimensional hybrids. Temperature T-dependent and wavelength λ-dependent optoelectronic transport measurements showed a shift in the spectral response of 1L WSe₂ towards the SPR peak locations of Au-Sp and Au-BP, fostered through the plexciton interactions. Models for the plexcitonic interactions are proposed that provide a framework for explaining the photoexcited hot charge carrier injection from AuNPs to WSe₂ and its influence on the carrier dynamics in these hybrid systems. Last, we studied interactions of vdWs hybrid structures composed of WSe₂ with 0D buckminsterfullerene (C₆₀) spheres. Our results indicate that the C₆₀-WSe₂ vdWs hybrid heterostructure appears to be an attractive architecture for enabling charge transfer and high performance photodetection capabilities. T-dependent electrical transport measurements after C₆₀ deposition revealed a dominant p-type conduction behavior and a significant ×10³ increase in WSe₂ field-effect mobility, with a maximum field-effect mobility of 281 cm²V⁻¹s⁻¹ achieved at 350 K and room-T mobility of 119.9 cm²V⁻¹s⁻¹ for the C₆₀-WSe₂ hybrid.

Silicon Nanowires (SiNWs) with ability to confine carriers and photons in two directions while allowing propagation in third dimension offer interesting modified optical properties such as increased material absorption and optical non-linearities with regard to that of bulk silicon. Enhanced optical properties in SiNWs open a window not only to improve the performance of existing devices but also to realize novel structures. As such, I chose to investigate SiNWs for their applications in photonics, especially for sensing and non-linear devices. My goal was to conduct fundamental research on the optical properties of these SiNWs, and then develop an integration platform to realize practical devices. The platform should be compatible with IC manufacturing. Electron Beam Lithography (EBL) using a Poly Methyl Methacrylate (PMMA) resist followed by Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) is used for SiNWs fabrication. Now we are able to fabricate nanowires as small as 15 nm in diameter with the smallest separation of 50 nm. In addition, the interface between SiNWs and Si substrate is optically smooth enabling us to fundamentally understand optical properties of these structures. During the course of this project, I have contributed new fundamental knowledge about SiNWs. For example, Second Harmonic Generation (SHG) is demonstrated in SiNWs, which is absent in bulk silicon. This is achieved by self-straining the nanowires and is the first demonstration of this kind. Second-order non-linearities are more efficient for optical signal processing than third-order ones (which have been used for silicon photonics devices so far). Therefore, these results open a new area of research in silicon. In addition to second order nonlinearity, high enhancement of Raman scattering is achieved in SiNWs fabricated on Silicon on Insulator (SOI) substrate. This can find promising applications in sensing and nonlinear based devices such as optical switches and logic gates. Further, polarization resolved reflections from these nanowire arrays were measured and significant differences were observed for the reflection characteristics for the sand p-polarized beams. In order to understand these reflections, an effective index model is proposed based on calculations using Finite Difference Time Domain (FDTD) method. Results of this analysis provide useful information for designing of many optical devices using SiNWs such as solar cells and photodetectors. As another part of this thesis, vivid colors in mutually coupled SiNWs is demonstrated where nanowire diameters range from 105 nm to 345 nm. A simple sensor is demonstrated by observing the change in the reflected color with changing refractive index of the surrounding medium. A refractive index resolution of 5×10−5 is achieved using a simple charge coupled device (CCD) camera. Although, there were some paradigm shifting results during my fundamental studies, it became very apparent that SiNWs suffer from a major issue inhibiting their use in photonics devices. Below the diameter of 100 nm where these enhanced material properties were observed, SiNW is a poor optical waveguide with less than 1 % of light confined. The low confinement factor means that though the intrinsic properties of SiNWs increase, the overall device performance is not significantly enhanced. To overcome this issue, a new platform technology is invented, called Silicon Nanowire Optical Waveguide (SNOW). It combines the material advantages of nanostructures with the optical properties of conventional waveguides, and consists of arrays of nanowires in close proximity. It is shown that such a structure can guide an optical mode using the FDTD method. This waveguide structure can be used as a versatile platform to manufacture various devices such as sensors, switches, modulators, grating, and delay lines. For instance, a novel bio-sensor is proposed and designed whose sensitivity is enhanced by a factor of 20, compared to conventional silicon-wire waveguides.

Optical trapping enables the non-contact manipulation of micro and nanoparticles with extremely high precision. Recent research on integrated optical trapping using the evanescent fields of photonic devices has opened up new opportunities for the manipulation of nano- and microparticles in lab-on-a-chip devices. Considerable interest has emerged for the use of optical microcavities as “sensors-on-a-chip”, due to the possibility for the label-free detection of nanoparticles and molecules with high sensitivity. This dissertation focuses on the demonstration of an on-chip optical manipulation system with multiple functionalities, including trapping, buffering, sorting, and sensing. We demonstrate the optically trapping of polystyrene particles with diameters from 110 nm to 5.6 \(\mu m\) using silicon microrings and photonic crystal cavities. By integrating multiple microrings with different resonant wavelengths, we show that tuning the laser wavelength to the resonance wavelengths of different rings enables trapped particles to be transferred back and forth between the rings in a controllable manner. We term this functionality “buffering”. We furthermore demonstrate an integrated microparticle passive sorting system based on the near-field optical forces exerted by a 3-dB optical power splitter that consists of a slot waveguide and a conventional channel waveguide. In related work, we demonstrate an ultra-compact polarization splitter design leveraging the giant birefringence of silicon-on-insulator slot waveguides to achieve a high extinction ratio over the entire C band. We demonstrate trapping-assisted particle sensing, using the shift in the microcavity resonance induced by the trapped particle. We show that this permits the sensing of proteins via a binding assay approach, in which the presence of green fluorescent protein causes the particles to bind. By detecting the size distribution of particles clusters using the microcavity, we quantitatively detect the GFP concentration. In a complementary approach, we demonstrate a reusable and reconfigurable surface-enhanced Raman scattering (SERS) sensing platform. We use a photonic crystal cavity to trap silver nanoparticles in a controllable manner, and measure SERS from molecules on their surfaces. We anticipate that the on-chip sensing approaches we introduce could lead to various applications in nanotechnology and the environmental and life sciences. / Engineering and Applied Sciences

Silicon Nanowires (SiNWs) with ability to confine carriers and photons in two directions while allowing propagation in third dimension offer interesting modified optical properties such as increased material absorption and optical non-linearities with regard to that of bulk silicon. Enhanced optical properties in SiNWs open a window not only to improve the performance of existing devices but also to realize novel structures. As such, I chose to investigate SiNWs for their applications in photonics, especially for sensing and non-linear devices. My goal was to conduct fundamental research on the optical properties of these SiNWs, and then develop an integration platform to realize practical devices. The platform should be compatible with IC manufacturing. Electron Beam Lithography (EBL) using a Poly Methyl Methacrylate (PMMA) resist followed by Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) is used for SiNWs fabrication. Now we are able to fabricate nanowires as small as 15 nm in diameter with the smallest separation of 50 nm. In addition, the interface between SiNWs and Si substrate is optically smooth enabling us to fundamentally understand optical properties of these structures. During the course of this project, I have contributed new fundamental knowledge about SiNWs. For example, Second Harmonic Generation (SHG) is demonstrated in SiNWs, which is absent in bulk silicon. This is achieved by self-straining the nanowires and is the first demonstration of this kind. Second-order non-linearities are more efficient for optical signal processing than third-order ones (which have been used for silicon photonics devices so far). Therefore, these results open a new area of research in silicon. In addition to second order nonlinearity, high enhancement of Raman scattering is achieved in SiNWs fabricated on Silicon on Insulator (SOI) substrate. This can find promising applications in sensing and nonlinear based devices such as optical switches and logic gates. Further, polarization resolved reflections from these nanowire arrays were measured and significant differences were observed for the reflection characteristics for the sand p-polarized beams. In order to understand these reflections, an effective index model is proposed based on calculations using Finite Difference Time Domain (FDTD) method. Results of this analysis provide useful information for designing of many optical devices using SiNWs such as solar cells and photodetectors. As another part of this thesis, vivid colors in mutually coupled SiNWs is demonstrated where nanowire diameters range from 105 nm to 345 nm. A simple sensor is demonstrated by observing the change in the reflected color with changing refractive index of the surrounding medium. A refractive index resolution of 5×10−5 is achieved using a simple charge coupled device (CCD) camera. Although, there were some paradigm shifting results during my fundamental studies, it became very apparent that SiNWs suffer from a major issue inhibiting their use in photonics devices. Below the diameter of 100 nm where these enhanced material properties were observed, SiNW is a poor optical waveguide with less than 1 % of light confined. The low confinement factor means that though the intrinsic properties of SiNWs increase, the overall device performance is not significantly enhanced. To overcome this issue, a new platform technology is invented, called Silicon Nanowire Optical Waveguide (SNOW). It combines the material advantages of nanostructures with the optical properties of conventional waveguides, and consists of arrays of nanowires in close proximity. It is shown that such a structure can guide an optical mode using the FDTD method. This waveguide structure can be used as a versatile platform to manufacture various devices such as sensors, switches, modulators, grating, and delay lines. For instance, a novel bio-sensor is proposed and designed whose sensitivity is enhanced by a factor of 20, compared to conventional silicon-wire waveguides.

Long-range surface plasmon-polaritons are transverse-magnetic polarized optical surface waves formed through the interaction of photons with free electrons at the surface of metal slabs or stripes. They play important roles in a variety of field such as integrated optics, amplifiers and lasers, optical sensing, modulation, etc. Due to their longer propagation length and deeper penetration depth compared to those of single-interface surface plasmon-polaritons, they have become increasingly promising in optical sensing. In sensing applications, it is necessary to reduce the noise level in order to obtain a lower detection limit. One way to achieve this is to use dual- or triple-output Mach-Zehnder interferometers so that the common perturbations among the outputs can be suppressed. The objective of this thesis is to provide deeper insights on the performances of dual- and triple-output Mach-Zehnder interferometers in thermo-optic and optical bulk sensing applications, theoretically and experimentally, and to demonstrate their ability to suppress common perturbations and lower the detection limit. On the theoretical side, the objective is approached by constructing a model for the transfer characteristic. For dual-output Mach-Zehnder interferometers, the plane-wave model is used to develop a general model for thermo-optic sensing and an unbalanced model for optical bulk sensing. For triple-output ones, local normal mode theory is used with modal analysis for the 3×3 coupler portion of the structure. Quantitative methods to analyze and compare different detection schemes are developed. The minimum detectable phase shift is determined for the case of thermo-optic sensing while the detection limit is determined for optical bulk sensing. On the experimental side, the objective is approached by providing a direct experimental demonstration of the transfer characteristics at an optimized operating wavelength for the coupler portion of the device, then comparing to theory. Time traces are carried out and various detection schemes are applied to suppress common perturbations among the outputs, and to improve the minimum detectable phase shift or the detection limit.

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