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Metallization and Modification of Low-k Dielectric MaterialsMartini, David M. 12 1900 (has links)
Aluminum was deposited onto both Teflon AF and Parylene AF surfaces by chemical vapor deposition of trimethylaluminum. This work shows that similar thin film (100 Angstroms) aluminum oxide adlayers form on both polymers at the low temperature dosing conditions used in the studies. Upon anneal to room temperature and above, defluorination of the polymer surfaces increased and resulted in fluorinated aluminum oxide adlayers; the adlayers were thermally stable to the highest temperatures tested (600 K). Angle-resolved spectra showed higher levels of fluorination toward the polymer/adlayer interface region. Copper films were also deposited at low temperature onto Teflon AF using a copper hexafluoroacetylacetonate-cyclooctadiene precursor. Annealing up to 600 K resulted in the loss of precursor ligands and a shift to metallic copper. As with aluminum adlayers, some polymer defluorination and resulting metal (copper) fluoride was detected. Parylene AF and polystyrene films surfaces were modified by directly dosing with water vapor passed across a hot tungsten filament. Oxygen incorporation into polystyrene occurred exclusively at aromatic carbon sites, whereas oxygen incorporation into parylene occurred in both aromatic and aliphatic sites. Oxygen x-ray photoelectron spectra of the modified polymers were comparable, indicating that similar reactions occurred. The surface oxygenation of parylene allowed enhanced reactivity toward aluminum chemical vapor deposition. Silicon-carbon (Si-Cx) films were formed by electron beam bombardment of trimethylvinylsilane films which were adsorbed onto metal substrates at low temperatures in ultra-high vacuum. Oxygen was also added to the films by coadsorbing water before electron beam bombardment; the films were stable to more than 700 K, with increasing silicon-oxygen bond formation at elevated temperatures. Copper metal was sputter deposited in small increments onto non-oxygenated films. X-ray photoelectric spectra show three-dimensional copper growth (rather than layer-by-layer growth), indicating only weak interaction between the copper and underlying films. Annealing at elevated temperatures caused coalescence or growth of the copper islands, with spectra indicating metallic copper rather than copper oxide.
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Příprava a charakterizace tenkých bariérových vrstev / Preparation and characterization of thin barrier layersBlahová, Lucie January 2018 (has links)
Combinations of different acrylic resins and microcrystalline waxes are most often used for the conservation and preservation of metallic archaeological artefacts these days. However, their properties are not sufficient and satisfactory in many ways. Therefore, the aim of this doctoral thesis is to develop a conservation system which will draw on the new knowledge gained in the field of advanced materials and technologies during last years. A conservation coating based on a thin barrier film appears the most promising. The conservation coating must fulfil particularly following rather contradictory requirements: good barrier function against oxygen, humidity and other corrosive agents; transparency because of colour appearance preservation; long term stability and easy removability; possibility to apply to more objects at the same time and reasonable financial requirements of a deposition process. Parylene C polymer was chosen as suitable material for this purpose. It was prepared via modified chemical vapour deposition. Parylene removability was ensured through the soluble interlayer made of Laksil silicone-acrylic lacquer which was applied between the protected metallic object and the parylene thin film. Initially, the deposition process of Laksil/parylene bilayer was optimized, then its physical and chemical characteristics were determined and eventually, they were compared with the conventional conservation coating composed of Paraloid B72 acrylic resin and Revax microcrystalline wax. Regarding to the demands of the conservation coating, we were interested especially in barrier properties, optical properties, surface morphology and removability of Laksil/parylene bilayer. The most useful method for description of coating barrier properties was corrosion testing in which coated metallic samples were exposed to highly corrosive environment of salt spray (made of 50 g•l–1 brine), 100% humidity and temperature of 35 °C (ISO 9227). The Laksil/parylene bilayer showed excellent barrier properties; samples treated this way sustained unchanged in the corrosion chamber for almost three months. The surface roughness measured by profilometry and surface morphology scanned by SEM illustrated the synergy between Laksil and parylene layer which leads to the exceptional barrier and anticorrosion function of bilayer. The Laksil layer is able to flatten out rough surface of a substrate. Furthermore, it can toughen the item surface which is, in case of a number of archaeological findings, created by corrosion product layers with variable mechanical strength. Thereon deposited parylene film becomes smooth and defect free and can act as a good diffusion barrier. The colouristic measurements confirmed that the Laksil/parylene bilayer does not almost change the appearance of protected item, in terms of colour. The caused colour difference (ISO 11664-4) ranged around 1 which value is defined as “perceivable only for experienced observers”. The Laksil/parylene bilayer is removable thanks to the Laksil solubility in xylene. It is necessary to carefully scratch the outer parylene film to enable access of xylene solvent to the lacquer. The successful removal of Laksil/parylene bilayer was first confirmed by the EDX on metallic iron samples. Afterwards, the possibility of bilayer complete removal even from a corroded surface of the original artefact was proved by TGA. Thus the conservation treatment can be considered fully reversible.
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Návrh, výroba a testování grafenových biosenzorů / Design, fabrication and testing of graphene biosensorsTripský, Andrej January 2020 (has links)
Pokrok ve vývoji nanotechnologií nám poskytuje dobrou příležitost k vývoji nových špičkových zařízení. Tato práce si klade za cíl vyrobit, popsat a změřit grafenové pH senzory na dvou různých substrátech - polymeru parylenu C a SiO2. Tento pH senzor je prvním krokem ve vývoji nositelné náplasti monitorující stav kůže a možné infekce. Grafen je 2D materiál na bázi uhlíku se zajímavými vlastnosti a nadějnými aplikacemi. Úspěšně jsme provedli dva různé experimenty sloužící k charakterizaci grafenových senzorů a jejich odezvu na různé hodnoty pH. V prvním experimentu jsme použili horní elektrolytické hradlo k určení bodu neutrality (Diracův bod). Druhý experiment popsal změnu rezistence grafenu jako funkce pH. Dále jsme také funkcionalizovali grafen polyanilinem, abychom zlepšili jeho vlastnosti. Prokázali jsme citlivost grafenových senzorů na pH pro oba substráty a objevili jsme několik výzev jako potřebu kontroly iontové síly, experimentů samotných a destrukce grafenu.
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Improvement of the substrate layer in a photovoltaic system for neural implantsVenckute Larsson, Justina January 2022 (has links)
Neural implants have been developed to aid with different neurological disorders. Although there are neural implants that are used to treat patients today, there is still room for improvement in the field. The material used in neuroprosthetics is of particular importance and could lead to problems, if the material stiffness does not match the one of the tissue. Hence, soft and flexible implants are important to decrease the discrepancy between the tissue and the implants. Different materials have been used as substrates to make the implants soft, some materials are even biodegradable. Further, the design of the implants is also of importance to make the devices flexible. In this thesis, optimisation of the substrate layer for a photovoltaic cortical implant was performed. The degradation of PLGA as a potential material used as a substrate layer, was investigated. Moreover, for improvement of the design Parylene C was used. Mechanical and electrical tests were done to investigate how the manipulation of the devices affects their performance. The results showed that the degradation of PLGA started after 600 h. Further, the best shape and the width of the bridges, that was the Parylene C strips connecting the photovoltaic cells were chosen, as well as the thickness of Parylene C. The mechanical and electrical results indicated that the number of cycles does not affect the material performance as much, where the highest number. of cycles was 10000 cycles. As compared to the effect of the manual handling of the devices. / Neurala implantat har utvecklats för att hjälpa till vid olika neurologiska sjukdomar. Även om neurala implantat används för att behandla patienter i dag finns det fortfarande utrymme för förbättringar på detta område. Materialet som används i neuroproteser är särskilt viktigt och kan leda till problem om materialets styvhet inte motsvarar vävnadens styvhet. Därför är mjuka och flexibla implantat viktiga för att minska klyftan mellan vävnaden och implantaten. Olika material har använts som substrat för att göra mjuka implantat, vissa material är till och med biologiskt nedbrytbara. Dessutom, är implantatens design också viktig för att göra enheterna flexibla. I den här rapporten optimerades substratskiktet för ett solcells kortikalimplantat. Nedbrytningen av PLGA som ett potentiellt material som kan användas som substratskikt undersöktes. Dessutom användes Parylen C för optimering av konstruktionen. Mekaniska och elektriska tester utfördes för att undersöka hur manipuleringen av enheterna påverkar deras prestanda. Resultaten visade att nedbrytningen av PLGA började efter 600 h. Vidare valdes den bästa formen och bredden på broarna, dvs. de Parylen C-remsor som förbinder solcellerna, samt tjockleken på Parylen C. De mekaniska och elektriska resultaten visade att antalet cykler inte påverkar materialets prestanda särskilt mycket, med det högsta antalet cykler på 10 000 cykler. Jämfört med effekten av den manuella hanteringen av enheterna.
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Advanced Theory, Materials and Applications for Electrowetting on Structured SurfacesDhindsa, Manjeet S. 19 April 2011 (has links)
No description available.
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Příprava poly-para-xylylenových vrstev a charakteriazace jejich vlastností / Poly-para-xylylene films preparation and characterization of their propertiesMenčík, Přemysl January 2012 (has links)
Poly-p-xylylene is a basic polymer of parylene family. It was discovered in 50s of the 20th century. In practical applications, there are used several derivates. Most of them are discussed in this thesis. Poly-p-xylylene has many utility properties, like barrier, thermal and mechanical properties. It can be used for conservation and protection of electronic equipments, medical tools and devices or museum exhibits. The most important property of parylene is its low dielectric constant which enables parylene to have good insulating properties in form of very thin layer. The most common precursor used for parylene coatings by Chemical Vapor Deposition (CVD) is [2,2]paracyclophane. Special device invented for this process was described in this thesis, including every part and assembly. The main aim of this thesis was to test properties of thin parylene layers on metal samples. High degree of polymer crystallinity was confirmed by confocal laser microscopy and optical microscopy in the polarized light measurements. Problems in the conventional method of production of parylene layers were found during the measurement of thickness of layers. Purity of deposited films was determined using Infrared spectroscopy (IR). Parylene barrier properties were quantified by the measurement of Oxygen Transmission Rate through a layer deposited on the surface of PP foil. Because the research has been mainly focused on protection of museum exhibits, the corrosion resistance test is the most important. Metal samples with thin parylene film were compared to samples with conventional restoration coating. The samples with parylene protection were slowly corroded by point corrosion. In contrast to them, the samples conserved by conventional restoration method were almost destroyed by corrosion.
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Optimalizace elektrochemického senzoru pro měření v kapce / Optimization of electrochemical sensor for detection in microvolumeGajdoš, Libor January 2014 (has links)
This thesis describes optimization and modification of standard thick-film electrochemical sensor to be able to be used for detection in microvolumes. In the theoretical part, the thick film technology is described. The work is then focused on the wettability of surfaces followed by introduction to electrochemistry and electro-analytical methods. In the experimental part, screen-printing of various types of thick film pastes on ceramic substrates for determination of their wettability and the following modification of the sensors with thick-film paste and with Parylene vaporization can be found, as well as the basic electrochemical measurements in microvolume using the modified sensor. Finally the results are summarized in conclusion.
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Mechanické a elektrické vlastnosti tenkých kovových vrstev nanášených vakuovým napařováním / Mechanical and Electrical Properties of Thin Metal Films Deposited by Vacuum EvaporationW. F. Yahya, Doaa January 2015 (has links)
Thin layers are widely used in many fields of technology and today we can say that they are found in all modern technologies. Thin layers can be created in two ways, namely by chemical or physical means. This work focuses on the latter method, more particularly a technology of thermal evaporation of thin layers in a vacuum. The work focuses on the process principles during and after the evaporation. Much of the work focuses on the development and design of experiments. These experiments illustrate some of the phenomena that take place on thin films produced by the aforementioned technology. Work helps to better understand processes during formation of thin layers and properties that influence the quality and stability of thin films. In conclusion we describe results of experiments and new developments in the field of thin films deposition using evaporation under vakuum are summarized.
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Mikrostruktury mimikující povrch tlapky gekona / Gecko mimicking surfacesFecko, Peter January 2019 (has links)
Adhezní schopnosti gekona byly předmětem mnoha studií a inspirací pro vytvoření mnoha napodobenin. Tato práce navrhuje vlastní verzi umělých gekoních struktur ve tvaru mikroskopických pilířů, které by vykazovaly adhezní vlastnosti srovnatelné s tlapkou gekona. Vyrobeny byli struktury z polymeru Parylen C pomocí fotolitografie a technik na leptání křemíku. Dalším cílem bylo různými metodami pro modifikaci povrchu a charakterizaci vytvořených struktur, které určí adhezní síly těchto povrchů, před a po modifikacích.
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