A high-precision mixed-signal mismatch measurement technique for metal-oxide metal (MoM) capacitors as well as the design of a 13-GHz 5-bit 360-degree phase shifter are presented. This thesis presents a high-precision, mixed-signal mismatch measurement technique for metal-oxide–metal capacitors. The proposed technique incorporates a switched-capacitor op amp within the measurement circuit to significantly improve the measurement precision while relaxing the resolution requirement on the backend analog-to-digital converter (ADC). The proposed technique is also robust against multiple types of errors. A detailed analysis is presented to quantify the sensitivity improvement of the proposed technique over the conventional one. In addition, this thesis proposes a multiplexing technique to measure a large number of capacitors in a single chip and a new layout to improve matching. A prototype fabricated in 180 nm CMOS technology demonstrates the ability to sense capacitor mismatch standard deviation as low as 0.045% with excellent repeatability, all without the need of a high-resolution ADC. The 13-GHz 5-bit 360-degree phase shifter consists of 2 stages. The first stage utilizes a delay line for 4-bit 180-degree phase shift. A second stage provides 1-bit 180-degree phase shift. The phase shifter includes gain tuning so as to allow a gain variation of less than 1 dB. The design has been fabricated in 180 nm CMOS technology and measurement results show a complete 360◦ phase shift with an average step size of 10.7◦ at 13-GHz. After calibration the phase shifter presented an output gain S21 of 0.5 dB with a gain variation of less than 1 dB across all codes at 13-GHz. The remaining s-parameter testing showed a S22 and S11 below -11 dB and a S12 below -49 dB at 13 GHz.