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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
1

Bildgebende elektrochemische Untersuchungen an Grenzflächen mit metallzentrierten Elektronenübertragungen

Barkschat, Axel. January 2004 (has links)
Berlin, Freie Univ., Diss., 2004. / Dateiformat: zip, Dateien im PDF-Format. Computerdatei im Fernzugriff.
2

Characterization of deep UV photoresist properties by infrared near-field scanning optical microscopy and related methods

Preusser, Jan. January 1900 (has links) (PDF)
Clausthal, Techn. Univ., Diss., 2003. / Computerdatei im Fernzugriff.
3

Bildgebende elektrochemische Untersuchungen an Grenzflächen mit metallzentrierten Elektronenübertragungen

Barkschat, Axel. January 2004 (has links)
Berlin, Freie Universiẗat, Diss., 2004. / Dateiformat: zip, Dateien im PDF-Format.
4

Characterization of deep UV photoresist properties by infrared near-field scanning optical microscopy and related methods

Preusser, Jan. January 1900 (has links) (PDF)
Clausthal, Techn. University, Diss., 2003.
5

Photoresist-based polymer resonator antennas (PRAs) with lithographic fabrication and dielectric resonator antennas (DRAs) with improved performance

Rashidian, Atabak 09 May 2011
<p>The demand for higher bit rates to support new services and more users is pushing wireless systems to millimetre-wave frequency bands with more available bandwidth and less interference. However at these frequencies, antenna dimensions are dramatically reduced complicating the fabrication process. Conductor loss is also significant, reducing the efficiency and gain of fabricated metallic antennas. To better utilize millimetre-wave frequencies for wireless applications, antennas with simple fabrication, higher efficiency, and larger impedance bandwidth are required.</p> <p>Dielectric Resonator Antennas (DRAs) offer many appealing features such as large impedance bandwidth and high radiation efficiency due to the lack of conductor and surface wave losses. DRAs also provide design flexibility and versatility. Different radiation patterns can be achieved by different geometries or resonance modes, wideband or compact antennas can be provided by different dielectric constants, and DRAs can be excited by a wide variety of feeding structures. Nevertheless, compared to their metallic counterparts, fabrication of DRAs is challenging since they have traditionally been made of high permittivity ceramics, which are naturally hard and extremely difficult to machine and cannot be easily made in an automatic way. The fabrication of these three dimensional structures is even more difficult at millimetre-wave frequencies where the size of the antenna is reduced to the millimetre or sub-millimetre range, and tolerances to common manufacturing imperfections are even smaller. These fabrication problems restrict the wide use of DRAs, especially for high volume commercial applications.</p> <p>A new approach to utilize the superior features of DRAs for commercial applications, introduced in this thesis, is to exploit polymer-based resonator antennas (PRAs), which dramatically simplifies fabrication due to the natural softness and results in a wide impedance bandwidth due to the low permittivity of polymers. Numerous polymer types with exceptional characteristics can be used to fulfill the requirements of particular applications or achieve extraordinary benefits. For instance, in this thesis photoresist polymers facilitate the fabrication of PRAs using lithographic processes. Another advantage derived from this approach is the capability of mixing polymers with a wide variety of fillers to produce composite materials with improved or extraordinary characteristics.</p> <p>The key contributions of this thesis are in introducing SU-8 photoresist as a radiating material, developing three lithographic methods to fabricate photoresist-ceramic composite structures, introducing a simple and non-destructive measurement method to define electrical properties of the photoresist composites, and demonstrating these structures as improved antenna components.</p> <p>It is shown that pure SU-8 resonators can be highly efficient antennas with wideband characteristics. To achieve more advantages for RF applications, the microwave properties of photoresists are modified by producing ceramic composite materials. X-ray lithography fabrication is optimized and as a result one direct and two indirect methods are proposed to pattern ultra thick (up to 2.3 mm) structures and complicated shapes with an aspect ratio as high as 36:1. To measure the permittivity and loss tangent of the resulting materials, a modified ring resonator technique in one-layer and two-layer microstrip configurations is developed. This method eliminates the requirement to metalize the samples and enables characterization of permittivity and dielectric loss in a wide frequency range from 2 to 40 GHz. Various composite PRAs with new designs (e.g. frame-based and strip-fed structures) are lithographically fabricated, tested, and discussed. The prototype antennas offer -10 dB bandwidths as large as 50% and gain in the range of 5 dBi.
6

Photoresist-based polymer resonator antennas (PRAs) with lithographic fabrication and dielectric resonator antennas (DRAs) with improved performance

Rashidian, Atabak 09 May 2011 (has links)
<p>The demand for higher bit rates to support new services and more users is pushing wireless systems to millimetre-wave frequency bands with more available bandwidth and less interference. However at these frequencies, antenna dimensions are dramatically reduced complicating the fabrication process. Conductor loss is also significant, reducing the efficiency and gain of fabricated metallic antennas. To better utilize millimetre-wave frequencies for wireless applications, antennas with simple fabrication, higher efficiency, and larger impedance bandwidth are required.</p> <p>Dielectric Resonator Antennas (DRAs) offer many appealing features such as large impedance bandwidth and high radiation efficiency due to the lack of conductor and surface wave losses. DRAs also provide design flexibility and versatility. Different radiation patterns can be achieved by different geometries or resonance modes, wideband or compact antennas can be provided by different dielectric constants, and DRAs can be excited by a wide variety of feeding structures. Nevertheless, compared to their metallic counterparts, fabrication of DRAs is challenging since they have traditionally been made of high permittivity ceramics, which are naturally hard and extremely difficult to machine and cannot be easily made in an automatic way. The fabrication of these three dimensional structures is even more difficult at millimetre-wave frequencies where the size of the antenna is reduced to the millimetre or sub-millimetre range, and tolerances to common manufacturing imperfections are even smaller. These fabrication problems restrict the wide use of DRAs, especially for high volume commercial applications.</p> <p>A new approach to utilize the superior features of DRAs for commercial applications, introduced in this thesis, is to exploit polymer-based resonator antennas (PRAs), which dramatically simplifies fabrication due to the natural softness and results in a wide impedance bandwidth due to the low permittivity of polymers. Numerous polymer types with exceptional characteristics can be used to fulfill the requirements of particular applications or achieve extraordinary benefits. For instance, in this thesis photoresist polymers facilitate the fabrication of PRAs using lithographic processes. Another advantage derived from this approach is the capability of mixing polymers with a wide variety of fillers to produce composite materials with improved or extraordinary characteristics.</p> <p>The key contributions of this thesis are in introducing SU-8 photoresist as a radiating material, developing three lithographic methods to fabricate photoresist-ceramic composite structures, introducing a simple and non-destructive measurement method to define electrical properties of the photoresist composites, and demonstrating these structures as improved antenna components.</p> <p>It is shown that pure SU-8 resonators can be highly efficient antennas with wideband characteristics. To achieve more advantages for RF applications, the microwave properties of photoresists are modified by producing ceramic composite materials. X-ray lithography fabrication is optimized and as a result one direct and two indirect methods are proposed to pattern ultra thick (up to 2.3 mm) structures and complicated shapes with an aspect ratio as high as 36:1. To measure the permittivity and loss tangent of the resulting materials, a modified ring resonator technique in one-layer and two-layer microstrip configurations is developed. This method eliminates the requirement to metalize the samples and enables characterization of permittivity and dielectric loss in a wide frequency range from 2 to 40 GHz. Various composite PRAs with new designs (e.g. frame-based and strip-fed structures) are lithographically fabricated, tested, and discussed. The prototype antennas offer -10 dB bandwidths as large as 50% and gain in the range of 5 dBi.
7

Thermisches Nanoimprint in UV vernetzende Fotolacke

Wissen, Matthias January 2007 (has links)
Zugl.: Wuppertal, Univ., Diss., 2007
8

Design, synthesis, and application of lithographic resists and nonlinear optical materials

Long, Brian Keith 13 September 2010 (has links)
Fluorinated norbornene monomers exhibit the requisite properties for inclusion in 157 nm photoresists, but traditional addition and radical polymerizations with these monomers have failed. Norbornanediols provide an alternate route to these materials via condensation polymerization, and methods have been developed for the efficient synthesis of the exo-2-syn-7- and endo-2-exo-3-dihydroxynorbornanes. Synthesis of the fluorinated analogues is complicated by steric and electronic effects; however, a high-yielding synthesis of endo-2-exo-3-dihydroxynorbornane bearing a 5-endo-[2,2-bis(trifluoromethyl)hydroxyethyl] substituent as well as its corresponding polymer are reported. As an alternative to 157 nm and other optical lithographies, Step and Flash Imprint Lithography, or S-FIL®, was introduced in 1999 by The University of Texas at Austin. It has proven to be a cost effective, high resolution alternative to traditional optical lithography. Often in the S-FIL process, residual resist may become imbedded within the template features resulting in device defects due to the imprint and repeat nature of S-FIL. The high silicon and cross-linking content of the resist formulations are extremely difficult, if not impossible to remove from quartz imprint mold without template degradation. Our approach to this problem was the synthesis of a family of thermally reversible, cross-linkable monomers that will facilitate resist removal while maintaining template integrity. Our monomers utilize classic Diels-Alder chemistry to provide thermal reversibility, while pendant acrylate functionalities facilitate cross-linking. Herein we report the synthesis of several Diels-Alder compounds, incorporate them into resist formulations, and test their efficacy for resist removal. In an effort to develop unique patternable materials, our laboratory is currently engaged in the design and development of photonic crystals comprised of organic elements with highly stable electro-optic activity. Fabrication of these devices requires polymers that can be patterned at high resolution, have large second order nonlinear optical (NLO) coefficients, and that are thermally stable after poling. Our route to these materials involves the synthesis of a prepolymer that can be spin coated, poled, and then fixed by a photochemical cross-linking reaction. We now describe an efficient synthetic route to a new class of biscross-linkable monomers and the characteristics of their corresponding nonlinear optical polymers. / text
9

Photospaltbare (Cumarin-4-yl)methyl-Ester als Phototrigger für Nucleotide, Aminosäuren und Protonen

Geissler, Daniel January 2006 (has links)
Zugl.: Berlin, Humboldt-Univ., Diss., 2006
10

Entwicklung eines hochpräzisen Justagesystems für die UV-Nanoimprint-Lithographie /

Fuchs, Andreas. January 2006 (has links)
Zugl.: Aachen, Techn. Hochsch., Diss., 2006.

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