Conventional liquid lubricants are faced with limitations under extreme cyclic operating conditions, such as in applications that require lubrication when changing from atmospheric pressure to ultrahigh vacuum and ambient air to dry nitrogen (e.g., satellite components), and room to elevated (>500°C) temperatures (e.g., aerospace bearings). Alternatively, solid lubricant coatings can be used in conditions where synthetic liquid lubricants and greases are not applicable; however, individual solid lubricant phases usually perform best only for a limited range of operating conditions. Therefore, solid lubricants that can adequately perform over a wider range of environmental conditions are needed, especially during thermal cycling with temperatures exceeding 500°C. One potential material class investigated in this dissertation is lubricious oxides, because unlike other solid lubricant coatings they are typically thermodynamically stable in air and at elevated temperatures. While past studies have been focused on binary metal oxide coatings, such as ZnO, there have been very few ternary oxide and no reported quaternary oxide investigations. The premise behind the addition of the third and fourth refractory metals Ti and Zr is to increase the number of hard and wear resistant phases while maintaining solid lubrication with ZnO. Therefore, the major focus of this dissertation is to investigate the processing-structure-tribological property relations of composite ZnO, TiO2 and ZrO2 phases that form ternary (ZnTi)xOy and quaternary (ZnTiZr)xOy nanocrystalline coatings. The coatings were processed by atomic layer deposition (ALD) using a selective variation of ALD parameters. The growth structure and chemical composition of as-deposited and ex situ annealed ternary and quaternary oxide coatings were studied by combined x-ray diffraction/focused ion beam microscopy/cross-sectional transmission electron microscopy, and x-ray photoelectron spectroscopy/Auger electron spectroscopy, respectively. It was determined that the structure varied from purely nanocrystalline (ternary oxides) to composite amorphous/nanocrystalline (quaternary oxides) depending on ALD parameters and annealing temperatures. In particular, the ZnTiO3 ilmenite phase with (104) textured nanocolumnar grains, exhibiting high stacking fault/partial dislocation densities >1012/cm2, was responsible for the excellent tribological behavior. Steady-state sliding friction coefficients down to 0.12 in humid air and 0.2 in dry nitrogen were measured along with sliding and fretting wear factors in the range of 10-6 to 10-7 mm3/N·m, even after ex situ annealing to 550°C. Additionally, the quaternary oxide phase Zn(Ti,Zr)O3 in solid solution exhibited a low fretting wear rate of 1x10-6 mm3/N·m. In contrast, certain phases, such as Zn2TiO4 cubic spinel, that form at annealing temperatures >550°C were responsible for high friction and wear. Mechanistic studies using the above techniques revealed low friction and wear-reducing surfaces and subsurfaces were due to different velocity accommodation modes (VAM). In the case of the ternary system, sliding-induced plastic deformation was possible when ZnTiO3 (104) stacking faults, bordered by partial dislocations, serve as a pathway for the dislocations to glide parallel to the sliding direction and hence achieve low friction and wear via an intrafilm shear VAM. It was evident that the individual nanocolumnar ZnTiO3 grains were plastically sheared as opposed to being fractured during wear. Conversely for the quaternary system, an interfacial sliding VAM between the counterface and a mechanically mixed layer (tribofilm) composed of the refined coating and counterface material, that also served as a source for the formation of cylindrical rolls, was responsible for wear reduction. Therefore, these lubricious oxides are a potential candidate for solid lubrication at high temperatures (up to 550 °C) and in space environments.