The servo mechatronic system design process usually covers two different engineering domains: structure design and system control. The relationship between these two domains is much closed. In order to reduce the disturbance caused by parameters in either one, the domain knowledge from those two different fields needs to be integrated. Thus, in order to reduce the disturbance caused by parameters in either one, the mechanical and controller design domains need to be integrated. Therefore, the integrated design method Design For Control (DFC), will be employed in this thesis. In this connect, it is not only applied to achieve minimal power consumption but also enhance structural performance and system response at same time. To investigate for the integrated design method, there are two common servo mechatronic systems: feed drive system and legged servo mechatronic system are used as the design platform. 1. Mechatronic Feed Drive System To investigate the method for integrated optimization, a mechatronic feed drive system of the machine tools is used as a design platform. The 3D software, Pro/Engineer is first used to build the 3D model to analyze and design structure parameters such as elastic deformation, nature frequency and component size, based on their effects and sensitivities to the structure. Additionally, in order to achieve system robust, Quantitative Feedback Theory (QFT), will be applied to determine proper control parameters for the controller. Therefore, overall physical properties of the machine tool will be obtained in the initial stage. Following this Design Then Control process, the iterative design process is following to enhance some of system performance. Finally, the technology design for control will be carried out to modify the structural and control parameters to achieve overall system performance. Hence, the corresponding productivity is expected to be greatly improved. 2. Legged Servo Mechatronic System The goal of this study is to develop a one-degree-of-freedom (DOF) legged servo mechatronic system with DFC. For this system, the kinematics and control dynamic analysis of legged servo mechatronic system have been solved by using four bar linkage with symmetrical coupler point, pantograph, and common position and velocity controller. In addition, in order to improvement system dynamic performance and reduce the control cost, the counterweight, that base on mass redistribution is employed to integrate structure and control into one design step for reduce shaking moment. Additionally, in order to improvement the system performance, the complete force balance is not only to take advantage of control cost, but also easy to control.