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Estimation and measurement of the size of software is crucial for project management activities. Functional size measurement is one of the most frequently used methods to measure size of software and COSMIC is one of the popular methods for functional size measurement. Although precise size measurement is critical, the results may differ because of the errors made in the measurement process. The erroneous measurement results cause lack of confidence for the methods as well as reliability problems for effort and cost estimations. This research proposes an error prevention model for COSMIC Functional Size Measurement method to increase the reliability of the measurements. The prevention model defines data movement patterns for different types of the functional processes and a cardinality table to prevent errors. We validated the prevention model with two different case studies and observed that it can decrease errors up to 90% in our case studies.