Since micro machining technologies are dramatically improved, many kinds of meso-to-micro scale products are developed. The Coordinate Measuring Machine(CMM) and the Scanning Probe Microscope(SPM) are the most commonly used instrument for precision measurement. To acquire geometric characteristic of products in meso scale, the CMM is not adequate due to the minimum diameter of ruby-ball head probes are 300 to 500£gm; while the SPM will be a time-consuming process. Thus, proper probes for meso-scale coordinate measuring machines are necessarily developed. The commercial fusion splicers are available to fabricate glass probes with spherical head. However, the commercial fusion splicers are expensive and the fiber clamps can not fit the diameter of probe stylus in this study. Therefore, instruments are implemented to fabricate the glass probe with spherical head for the meso-scale coordinate measuring machine. The