In the past decades, the miniaturization in optics led to new devices with structural sizes in the range of the light wavelength, where the photonic modes are con- fined and the number of states is limited. In the smallest microcavities, i.e. micrometer sized optical resonators, the propagation of only one mode is permitted that is simultaneously amplified internally. This particularly strong enhancement of the electric field is directly related to the quality factor of the cavity. By introducing an optical dipole into a high-Q microcavity, the spontaneous emission is amplified at the cavity mode frequency enabling stimulated emission in an inverted system. Although some of theses cavity e®ects can only be understood by quantum elec- trodynamic theory, most mechanisms are accessible by classical and semi-classical approaches. In this thesis, one-dimensional planar microcavities with quality factors up to 4500 have been fabricated by physical vapor deposition of dielectric thin films and organic active materials. A new cavity design based on anisotropic dielectric mirrors grown by oblique angle deposition microcavities with two energetically shifted orthogonally polarized modes is presented. The application of these anisotropic structures for terahertz di®erence signal generation is demonstrated in spectrally and time resolved transmission experiments, where optical beats with repetition rates in the terahertz range are observed. Optically pumped organic vertical cavity surface emitting lasers (VCSELs) have been realized by applying an organic solid state laser compound and high reflectance distributed Bragg reflectors. These lasers combine a very low laser threshold with small beam divergence and good stability. A transfer of the anisotropic design towards an organic VCSEL results in the generation of two perpendicularly polarized laser modes with a splitting adjustable by the fabrication conditions. The observation of an oscillation of two laser modes in a photomixing experiment proves a phase coupling mechanism. This demonstrates the potential of the anisotropic cavity design for a passive or active component in a terahertz radiation source or frequency generator. Furthermore, microcavities with two and three coupled resonators are investigated. By the application of time-resolved transmission experiments, spatial oscil- lations of the internal electric field - photonic Bloch oscillations - are successfully demonstrated. In combination with the anisotropic microcavities, this is a second concept for the modulation of transmitted light with terahertz frequencies. All experiments are accompanied by numerical or analytical models. Transmission experiments of continuously incident light and single laser pulses are compared with transfer matrix simulations and Fourier transform based approaches. For the modeling of emission experiments, a plane wave expansion method is successfully used. For the analysis of the organic VCSEL dynamics, we apply a set of rate equations that explains the gain switching process.

Electromagnetic metamaterials have emerged as a powerful tool to tailor the electromagnetic material properties and control wave propagation using artificial sub-wavelength structures. During the past fifteen years, metamaterials have been intensively studied over the electromagnetic spectrum (from microwave to visible), giving rise to extraordinary phenomena including negative refractive index, invisibility cloaking, sub-diffraction-limit focusing, perfect absorption, and numerous novel electromagnetic devices and optical components. The terahertz regime, between 0.3 THz and 10 THz, is of particular interest due to its appealing applications in imaging, chemical and biological sensing and security screening. Metamaterials foster the development of terahertz sources and detectors and expand the potential applications of the terahertz technology through the realization of dynamic and tunable devices. The objective of this thesis is to present different mechanisms to implement active terahertz metamaterial devices by incorporating advanced microelectromechanical system technology. First, an optical mechanism is employed to create tunable metamaterials and perfect absorbers on flexible substrates. A semiconductor transfer technique is developed to transfer split ring resonators on GaAs patches to ultrathin polyimide substrate. Utilizing photo-excited free carriers in the semiconductor patches, a dynamic modulation of the metamaterial is demonstrated. Additionally, this thesis investigates how sufficiently large terahertz electric fields drive free carriers resulting in nonlinear metamaterial perfect absorbers. Second, a mechanically tunable metamaterial based on dual-layer broadside coupled split ring resonators is studied with the help of comb drive actuators. One of the layers is fixed while the other is laterally moved by an electrostatic voltage to control the interlayer coupling factors. As demonstrated, the amplitude and phase of the transmission response can be dynamically modulated. Third, a microcantilever array is used to create a reconfigurable metamaterial, which is fabricated using surface micromachining techniques. The separation distance between suspended beams and underlying capacitive pads can be altered with an electrostatic force, thereby tuning the transmission spectrum. The tuning mechanisms demonstrated in this thesis can be employed to construct devices to facilitate the development and commercialization of new compact and mechanically robust metamaterial-based terahertz technologies. / 2017-11-05T00:00:00Z

In the past decades, the miniaturization in optics led to new devices with structural sizes in the range of the light wavelength, where the photonic modes are con- fined and the number of states is limited. In the smallest microcavities, i.e. micrometer sized optical resonators, the propagation of only one mode is permitted that is simultaneously amplified internally. This particularly strong enhancement of the electric field is directly related to the quality factor of the cavity. By introducing an optical dipole into a high-Q microcavity, the spontaneous emission is amplified at the cavity mode frequency enabling stimulated emission in an inverted system. Although some of theses cavity e®ects can only be understood by quantum elec- trodynamic theory, most mechanisms are accessible by classical and semi-classical approaches. In this thesis, one-dimensional planar microcavities with quality factors up to 4500 have been fabricated by physical vapor deposition of dielectric thin films and organic active materials. A new cavity design based on anisotropic dielectric mirrors grown by oblique angle deposition microcavities with two energetically shifted orthogonally polarized modes is presented. The application of these anisotropic structures for terahertz di®erence signal generation is demonstrated in spectrally and time resolved transmission experiments, where optical beats with repetition rates in the terahertz range are observed. Optically pumped organic vertical cavity surface emitting lasers (VCSELs) have been realized by applying an organic solid state laser compound and high reflectance distributed Bragg reflectors. These lasers combine a very low laser threshold with small beam divergence and good stability. A transfer of the anisotropic design towards an organic VCSEL results in the generation of two perpendicularly polarized laser modes with a splitting adjustable by the fabrication conditions. The observation of an oscillation of two laser modes in a photomixing experiment proves a phase coupling mechanism. This demonstrates the potential of the anisotropic cavity design for a passive or active component in a terahertz radiation source or frequency generator. Furthermore, microcavities with two and three coupled resonators are investigated. By the application of time-resolved transmission experiments, spatial oscil- lations of the internal electric field - photonic Bloch oscillations - are successfully demonstrated. In combination with the anisotropic microcavities, this is a second concept for the modulation of transmitted light with terahertz frequencies. All experiments are accompanied by numerical or analytical models. Transmission experiments of continuously incident light and single laser pulses are compared with transfer matrix simulations and Fourier transform based approaches. For the modeling of emission experiments, a plane wave expansion method is successfully used. For the analysis of the organic VCSEL dynamics, we apply a set of rate equations that explains the gain switching process.