Silicon carbide has many properties that make it a promising and desirable material for diverse applications. One such application for silicon carbide wafers is as a transparent cryogenic probe card. This thesis briefly describes the design of a probe card based on a silicon carbide wafer substrate. It includes a description of electroplating fundamentals and demonstrates the feasibility of electroplating copper onto a wafer for the formation of bond pads between the substrate and external PCB ring. The process for electroplating copper with good adhesion and quality based on metal alloy formation, current control, and materials selection is outlined. Results of this process are also presented. This work also demonstrates the ability to machine silicon carbide using electrical discharge machining, abrasive water jet machining, and diamond bit milling, proving diamond grinding to be the most versatile of the described methods for machining intricate patterns into the wafers.

This thesis presents a design technology of forming a shaped lid focused on cutting, bending, drawing, as well as trimming and making the required holes. There is described several basic variants of sheet metal forming based on the literature. Production of holes of specified cover, for an annual production of 100 pieces of shaped lid, is solved by unconventional technologies. From subsequent economic evaluation of selected technologies is chosen an appropriate technology to minimize production costs.

This diploma thesis is developed within my Master’s degree studies, branch mechanical engineering (M21 K), and specialization in M STM. The aim of this thesis is to solve the technology of mechanical production (machining, tooling) for the machine component called ‚shape lid‘. I execute the analysis of this technology from the perspective of the conventional machining process, and alternatively, some of the non conventional machining process, too. Conventional machining process is so far used for manufacturing of this sort of machine’s element. It‘s implying laborious work difficulties, even it’s economically disadvantageous. I suggest a new technology of manufacturing. At first, a semi-finished component could be sized by conventional machining process, and then it could be finished by the CNC (computer numerical control) milling machine. By the non-conventional machining process assume the usage of an electro-erosive machining, plasma machining, or water jet machining.Conventional technology suppose the usage of CNC milling machines. Thereinafter, feasibility aspects of this brand new technology are considered in technical and economical perspective.