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Numerical heat transfer during partially-confined, confined, and free liquid jet impingement with rotation and chemical mechanical planarization process modeling

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Identiferoai:union.ndltd.org:USF/oai:scholarcommons.usf.edu:etd-3053
Date01 June 2009
CreatorsLallave-Cortes, Jorge C
PublisherScholar Commons
Source SetsUniversity of South Flordia
Detected LanguageEnglish
Typetext
Formatapplication/pdf
SourceGraduate Theses and Dissertations
Rightsdefault

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