Due to size effects, the microtechnologies that are used to manufacture micro-sensors, allowed a drastic reduction of electrical power consumption. This feature contributed to the emergence of the concept of autonomous sensors, which have the ability to take the energy needed for their operation from the environment where they are located. Among the different energy sources, our choice was made on ambient mechanical vibrations. The electromechanical conversion is done within a transducer integrated with a micromechanical structure. In this work, we have designed and fabricated an electrostatic transducer based on silicon-glass technology, which required the development of a dedicated deep etching process. The device was tested experimentally and we have obtained a conversion of mechanical energy into electrical energy, corresponding to a power of 61 nW, with a device whose surface area is only 66 mm². This device is the first miniaturized silicon converter based on electrostatic transduction which does not use an electret
| Identifer | oai:union.ndltd.org:CCSD/oai:tel.archives-ouvertes.fr:tel-00584339 |
| Date | 11 December 2009 |
| Creators | Mahmood Paracha, Ayyaz |
| Publisher | Université Paris-Est |
| Source Sets | CCSD theses-EN-ligne, France |
| Language | English |
| Detected Language | English |
| Type | PhD thesis |
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