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Systems, Models, and Simulation for Novel Microfabrication of Silicon Carbide and Metal Mesh Filters

As the boundaries of Moore's Law rapidly approach, research is increasingly turning to exotic materials and metamaterials to advance the capabilities of electronic and micromechanical systems. This thesis presents systems, models, and simulation techniques for novel microfabrication in the realms of silicon carbide (SiC) and metal mesh filters. Through the unification of femtosecond laser pulses, high numerical aperture (NA) objective lenses, and system power and motion control, a system capable of achieving arbitrary 3D features without line-of-sight with aspect ratios up to 109:1 in SiC is developed. Additionally, a model of a direct-write femtosecond-laser-ablation fabricated metal mesh filter (MMF) is simulated in ANSYS High Frequency Structure Simulator (HFSS) and validates the novel fabrication technique. Finally, a transmission-line-theory based MMF model is presented as an alternative to modelling multilayer filters in HFSS. This model produces comparable results to an HFSS simulation with dramatically reduced computational intensity.

Identiferoai:union.ndltd.org:BGMYU2/oai:scholarsarchive.byu.edu:etd-11342
Date16 April 2024
CreatorsStevenson, Hunter R. J.
PublisherBYU ScholarsArchive
Source SetsBrigham Young University
Detected LanguageEnglish
Typetext
Formatapplication/pdf
SourceTheses and Dissertations
Rightshttps://lib.byu.edu/about/copyright/

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