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Improved understanding and control of the properties of PECVD silicon nitride and its applications in multicrystalline silicon solar cells

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1. http://hdl.handle.net/1853/15468
2. 444389

Identifer	oai:union.ndltd.org:GATECH/oai:smartech.gatech.edu:1853/15468
Date	05 1900
Creators	Cai, Li
Publisher	Georgia Institute of Technology
Source Sets	Georgia Tech Electronic Thesis and Dissertation Archive
Detected Language	English
Type	Dissertation
Rights	Access restricted to authorized Georgia Tech users only.