This thesis presents three kinds of novel structural design of SDA-based micromotors(£g-motors), including out-side cover structure, flange cover structure and flange rib structure. In order to verify the feasibility of these structures, the device is fabricated by MUMPs micro-electro-mechanical system (MEMS) foundry. According to the experimental results, SDA £g-motor of flange cover structure is comparatively more ideal than the other structures. The ideal structure operates at 100 Hz when the voltage is added to 75 Vop, which results in resonant vibration on the SDA plate, and begins to rotate when the voltage reaches 100 Vop.
The secondary goal of this thesis is using SDA £g-motor of flange cover structure to build surface micromachining process integration. The fabrication processes include eight photolithography masks, and the total fabrication procedure takes 62 steps. According to the experimental result, the device is made and succeeded or not, except that receiving the alignment technology influences, etching phosphorus silicon glass to define anchor is also an important process. Though processing technology of SDA £g-motor researched and developed by Taiwan has not reached high yield yet, but intact process module develop and integration has already appeared specifically through the research of this thesis.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0902110-165314 |
| Date | 02 September 2010 |
| Creators | Chan, Chih-Hsien |
| Contributors | Yu-Cheng Lin, I-Yu Huang, Ruey-Shing Huang, Jin-Chern Chiou, Wei-Leun Fang |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0902110-165314 |
| Rights | not_available, Copyright information available at source archive |
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