Silizide spielen ein wesentliche Rolle in den technologisch fortschrittlichsten CMOS Bauteilen. Sie finden Verwendung als Kontaktmaterial auf den Aktivgebieten und dem Silizium Gatter von Transistoren. Diese Arbeit beschäftigt sich mit den Systemen: Co-Si, Co-Ni-Si und Ni-Si. Sowohl in situ Hochtemperatur-SR-XRD Experimente als auch CBED wurden zur Phasenidentifikation herangezogen. AES erlaubte es, Elementverteilungen in Schichtstapeln zu bestimmen. Für Studien über Agglomerationserscheinungen wurde REM eingesetzt. TEM und analytisches TEM trugen nicht nur zu Einblicken in Schichtstrukturen und Kornformen bei, sondern lieferten auch Daten zu Elementverteilungen in Silizidschichten. Diese Dissertation gliedert sich in zwei Hauptteile. Der erste Teil beschäftigt sich mit den Phasenbildungsabfolgen und den Phasenbildungs- und Umwandlungstemperaturen in nanoskaligen dünnen Schichten. Als Trägermaterial wurden einkristalline und polykristalline Siliziumsubstrate verwendet. Der Einfluß verschiedener Dotierungen im Vergleich zu undotierten Substraten sowie die Beeinflussung der Silizidierung durch eine Deckschicht wurden untersucht. Im zweiten Teil waren Größeneffekte verschiedener Schichtdicken und Agglomerationserscheinungen Gegenstand von Untersuchungen. Unterschiede bei der Silizidierung in Zusammenhang mit unterschiedlichen Schichtdicken wurden bestimmt. Darüberhinaus wurde eine ternäre CoTiSi Phase gefunden und identifiziert. Außerdem konnte die stark eingeschränkte Mischbarkeit der Monosilizide CoSi und NiSi gezeigt werden. Der thermische Ausdehnungskoeffizient von NiSi im Temperaturbereich 400?700°C und sein nicht-lineares Verhalten wurden bestimmt. / Silicides are an essential part of state-of-the-art CMOS devices. They are used as contact material on the active regions as well as on the Si gate of a transistor. In this work, investigations were performed in the systems Co-Si, Co-Ni-Si, and Ni-Si. In situ high temperature SR-XRD and CBED techniques were used for phase identification. AES enabled the determination of elemental concentrations in layer stacks. SEM was applied to agglomeration studies. TEM imaging and analytical TEM provided insights into layer structures, grain morphology as well as information about the distribution of chemical elements within silicide layers. This thesis is divided into two main parts. The first part deals with the phase formation sequences and the phase formation and conversion temperatures in nanoscale thin films on either single crystal or polycrystalline Si substrates. The effect of different types of dopants vs. no doping and the impact of a capping layer on the phase formation and conversion temperatures were studied. In the second part, size effects and agglomeration of thin silicide films were investigated. The effect of different layer thicknesses on the silicidation process was studied. Additionally, the degree of agglomeration of silicide films was calculated. Furthermore, the ternary CoTiSi phase was found and identified as well as the severely limited miscibility of the monosilicides CoSi and NiSi could be shown. The CTE of NiSi between 400?700 ±C and its non-linear behavior was determined.

This diploma thesis deals with a basic description of dynamic and condenser microphone, its performance regarding polar patterns and a type of mechanical construction. It also describes a principle of operation of a triode. The thesis deals with selecting of a suitable type of microprocessor to control microphone preamplifier functions. Last part contains a power supply and microphone preamplifier circuits design using a semiconductor and vacuum tube technology.

Master‘s thesis deals with analysis solutions and construction of the devices for data collection. At the beginning, they describe the basic types of devices for data collection. In other parts of the work is compared few commercial devices for data collection, under which the requirements will be selected on the proposed device for data collection. In other chapters of the work devoted to the design of schemes and selecting components for their manufacture. The last chapters are devoted to describing the design of device for data collection.

Subject of this effort is development and realization of one-channel data acquisition unit of mechanical quantities and it’s PC software application. Usage of this data acquisition unit is aimed on applications, where resistive strain gages wired as Wheatstone bridge with AC excitation are used. Output voltage of Wheatstone bridge is amplięed, demodulated with excitation voltage, filtered and level shifted for analog to digital conversion via AD converter. Converted digital data are sent via serial bus into microprocessor which sends them into PC for further meaningful representation in software application. Besides sensing bridge output voltage, data acquisition unit also generates AC excitation of Wheatstone bridge. This excitation voltage is generated via DA converter which communicates with microprocessor and converts incoming digital data into analog sine waveform. There is precise voltage reference circuitry for both of these converters. PC application’s task is to visualize measured data in meaningful form and to give tools for further work with measured data. It’s programmed in Python language and it has one independent thread which does reading and computing of incoming data and there is also class which builds graphical user interface and plots measured data into live graph.

This Master's thesis deals with functional safety of electronic systems. Specifically, it focuses on self-testing of the microprocessor and its peripherals at the software level. The main aim of the thesis is to design and implement a set of functions written in programming language C or assembly language, which automatically test the selected areas of the microcontroller. Resources and methods used in the implemented solution also aim to meet the requirements according to the safety standard IEC 60730-1, Annex H, Software Class B. The microcontroller NXP LPC55S69 was chosen as a hardware platform. It consists of two ARM Cortex-M33 cores. As a result, the example application is provided, which uses implemented test functions at the run-time. Example application also contains a graphical user interface with fault injection ability.

The goal of this thesis was to design an end effector for a small robot for testing of devices with a touchscreen. The effector has to communicate with the robot via serial interface and provide feedback about used downforce. Another requirement was possibility of automatic tool change. Measuring of downforce, signal processing, and communication with robot ensures custom electronics based on STM32 microprocessor and piezoresistive sensor. The mechanism of tool change was inspired by the system used with industrial robots but customized for this application. The result of this thesis is a functional prototype of a stylus for devices with a touchscreen which provides feedback about the downforce on display and possibility of automatic tool change. The main benefit of this solution is the possibility of changing the tool for the one with one or more styluses for testing gesture-based interface what is indispensable in these days.

The thesis deals with problems of navigation blind in buildings, where is not possibility navigation by GPS (Global Positioning System). This thesis contain resolution through the use of communication units, placed in floor of buildings. This comunication units, equipped with receiver and transmitter, can give direction for blind by send own identification to transceiver in speciál stick (the thesis does not contain solving of the stick), which can information blind of position. Two comunication unit solution are available, that differs by using component part. The main difference is in use control unit of circuit. First circuit use as control unit ATAR862-3 (microprocessor and transmitter in one case) and the second one use microprocessor ATmega 8L. Both component made by Atmel corporation. Circuit with ATmega 8L is more exacting on curent consumption, but solving this problem is available and communication unit has low pretensions and long life. The part of thesis is program, which solving communication protocol for no-problem communication between unit in floor and special stick.

This work is engaged in ways of objects speed measuring mainly helped by Doppler Effect. The sensor HB410 is described in this work and its possible elaboration output heterodyne analog signal. The calculation of objects speed is deduced from frequency of heterodyne signal. In this work is projected circuit solution for elaboration of analog signal and its digitalization. Available types and nature of microcontrollers which are elaborating digital signal and communicating with PC are summarized in this work. In the last chapter is described microcontroller's driving software and PC software for speed measure.

This work deals with evaluation of equipment used for non-contact measurement of distance between vehicles. First are discussed various principles of measuring and after the selection of the most appropriate solution is proposed a detailed block diagram of modulation, demodulation and evaluation of the whole system and its mathematical description. Another part is devoted to describing the activities of the microprocessor controller, with which is controlled evaluation part and to the control program. It also analyzes the maximal attainable accuracy of measurement and the errors that affect it. The last part includes a circuit design and simulation of selected functional block, which is a coincidence /quadrature/ detector and construction documents for evaluation and demodulation part of the measurement instrument.

The thesis focuses on issues around communication system with the Direct Spread Spectrum Signal Signal. This work outlines the theoretical analysis of this technique and subsequently is created a communication system concept. The device concept is adjusted so that the device can be used as a laboratory device, presenting the spreading technique. This thesis offers a comprehensive and detailed description of the communication system construction, including design of transmitter, receiver and a common transmission channel. In conclusion are stated the results of devised communication system.