Delamination and cracks within the multilayer structure are typical failure modes observed in microelectronic and micro electro mechanical system (MEMS) devices and packages. As destructive detection methods consume large numbers of devices during reliability tests, non-destructive techniques (NDT) are critical for measuring the size and position of internal defects throughout such tests. There are several established NDT methods; however, some of them have significant disadvantages for detecting defects within multilayer structures such as those found in MEMS devices. This thesis presents research into the application of transient infrared thermography as a non-destructive method for detecting and measuring internal defects, such as delamination and cracks, in the multilayer structure of MEMS devices. This technique works through the use of an infrared imaging system to map the changing temperature distribution over the surface of a target object following a sudden change in the boundary conditions, such as the application of a heat source to an external surface. It has previously been utilised in various applications, such as damage assessment in aerospace composites and verification of printed circuit board solder joint manufacture, but little research of its applicability to MEMS structures has previously been reported. In this work, the thermal behaviour of a multilayer structure containing defects was first numerically analysed. A multilayer structure was then successfully modelled using COMSOL finite element analysis (FEA) software with pulse heating on the bottom surface and observing the resulting time varying temperature distribution on the top. The optimum detecting conditions such as the pulse heating energy, pulse duration and heating method were determined and applied in the simulation. The influences of thermal properties of materials, physical dimensions of film, substrate and defect and other factors that will influence the surface temperature gradients were analytically evaluated. Furthermore, a functional relationship between the defect size and the resulting surface temperature was obtained to improve the accuracy of estimating the physical dimensions and location of the internal defect in detection. Corresponding experiments on specimens containing artificially created defects in macro-scale revealed the ability of the thermographic method to detect the internal defect. The precision of the established model was confirmed by contrasting the experimental results and numerical simulations.

[pt] Nas últimas décadas, perfis pultrudados de polímeros reforçados com fibra (PRF) vêm despertando grande interesse na indústria civil devido a sua alta relação entre resistência e peso e sua aplicabilidade em ambientes agressivos. Apesar de apresentar grande resistência às intempéries, a degradação dos PRF foi notada após anos de exposição em campo. A utilização de ensaios não destrutivos (END) se mostra como uma boa alternativa para avaliar a integridade deste material, havendo especial interesse para controle de qualidade de baixo custo em campo. Dessa forma, este trabalho utilizou ensaios de vibração livre com duas técnicas de excitação por impulso para detectar danos em polímeros reforçados com fibra de vidro envelhecidos em câmaras com elevada temperatura, umidade e salinidade. Através da avaliação das frequências naturais e amortecimentos, foi observado o impacto das condições ambientais na integridade do material, resultado corroborado pela variação das propriedades elásticas obtidas através da resposta dinâmica acústica. / [en] In the last decades, pultruded profiles of fiber-reinforced polymers (FRP) have been attracting great interest in the civil industry due to their high strength-to-weight ratio and their applicability in aggressive environments. Despite showing great resistance to weathering, the degradation of FRP was noticed after years of exposure in the field. The use of non-destructive techniques (NDT) has been shown to be a good alternative to evaluate the integrity of this material, with special interest for low-cost quality control in the field. Thus, this work used free vibration tests with two impulse excitation techniques to detect damage in glass fiber reinforced polymers aged in chambers with high temperature, humidity and salinity. Through the evaluation of natural frequencies and damping, the impact of environmental conditions on the integrity of the material was observed, a result corroborated by the variation of elastic properties obtained through the acoustic dynamic response.

Neste trabalho, medimos o perfil 3D de superfícies (microtopografia) utilizando uma técnica de interferometria óptica: Phase-Shi,ftzng (Deslocamento de Fase). Utilizamos um interferômetro do tipo Twyman-Green para produzir fi.guras de interferência da superfície analisada. Essas imagens foram armazenadas usando-se uma câmera CCD ligada à um microcomputador. Para obter a microtopografia, calculamos o Mapa de Fase a partir das imagens digitalizadas usando um programa de microcomputador. Posteriormente um outro programa removeu a ambiguidade da função tangente (unwrapping), pela Técnica do Autômato Celular, usada no cáiculo do Mapa de Fase. Então efetuamos os cálculos para determinar a microtopografia da superfície. Depois fizemos a análise da microtopografia, levantando informações relevantes para a sua caracterização. Analisamos objetos com alta refletividade (espelhos planos e redes de Ronchi) e obtivemos bons resultados. Também comparamos alguns dos resultados obtidos com a técnica de Deslocamento de Fase com os resultados obtidos pela análise de Franjas de Igual Espessura. / In this work we measured the 3D profile of surfaces (microtopography) using a optical interferometric technique: Phase-Shifting. We used a interferometer of type Twyman-Green to produce interferograms from analyzed surface. These images was captured using a CCD camera that was linked to a microcomputer. To obtain a microtopography, we calculated the Phase Map using the digitalized images and a software of microcomputer. Then another program removed the wrapping of tangent fuction, using the Cellular-Automata Technique, that was used to calculate the Phase Map. So we calculated the microtopography of the surface. After we did the analyses of the microtopography, find out some important informations of its description. We studied objects with high reflectivity (plane mirrors and Ronchi ruting) and we obtained good results. Also we compared some results with that obtained by analyses of Fringes of Equal Thickness\'

Neste trabalho, medimos o perfil 3D de superfícies (microtopografia) utilizando uma técnica de interferometria óptica: Phase-Shi,ftzng (Deslocamento de Fase). Utilizamos um interferômetro do tipo Twyman-Green para produzir fi.guras de interferência da superfície analisada. Essas imagens foram armazenadas usando-se uma câmera CCD ligada à um microcomputador. Para obter a microtopografia, calculamos o Mapa de Fase a partir das imagens digitalizadas usando um programa de microcomputador. Posteriormente um outro programa removeu a ambiguidade da função tangente (unwrapping), pela Técnica do Autômato Celular, usada no cáiculo do Mapa de Fase. Então efetuamos os cálculos para determinar a microtopografia da superfície. Depois fizemos a análise da microtopografia, levantando informações relevantes para a sua caracterização. Analisamos objetos com alta refletividade (espelhos planos e redes de Ronchi) e obtivemos bons resultados. Também comparamos alguns dos resultados obtidos com a técnica de Deslocamento de Fase com os resultados obtidos pela análise de Franjas de Igual Espessura. / In this work we measured the 3D profile of surfaces (microtopography) using a optical interferometric technique: Phase-Shifting. We used a interferometer of type Twyman-Green to produce interferograms from analyzed surface. These images was captured using a CCD camera that was linked to a microcomputer. To obtain a microtopography, we calculated the Phase Map using the digitalized images and a software of microcomputer. Then another program removed the wrapping of tangent fuction, using the Cellular-Automata Technique, that was used to calculate the Phase Map. So we calculated the microtopography of the surface. After we did the analyses of the microtopography, find out some important informations of its description. We studied objects with high reflectivity (plane mirrors and Ronchi ruting) and we obtained good results. Also we compared some results with that obtained by analyses of Fringes of Equal Thickness\'