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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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1

低応力X線吸収体の成膜とX線マスクのパターン位置精度の向上に関する研究

丸本, 健二 25 November 2013 (has links)
京都大学 / 0048 / 新制・論文博士 / 博士(工学) / 乙第12791号 / 論工博第4098号 / 新制||工||1583(附属図書館) / 30810 / (主査)教授 斧 髙一, 教授 田畑 修, 教授 琵琶 志朗 / 学位規則第4条第2項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DFAM
半導体デバイス
リソグラフィー
X線マスク
応力
吸収体
500

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