In this thesis, the development of a novel electro-thermally actuated bi-stable out-of-plane two way actuated buckled micro-bridge for a potential application in optical switching is presented. The actuator consists of a bridge supported by 'legs' and springs at its four corners. The springs and the bridge are made of a tri-layer structure comprising of 2.5??m thick low-stress PECVD oxide, 1??m thick high-stress PECVD oxide and 2??m thick heavily phosphorus doped silicon. The legs, on the other hand, are 2??m thick single layer heavily phosphorus doped silicon. Both legs and springs provide elastically constrained boundary conditions at the supporting ends, without of which important features of the micro-bridge actuator could not have been achieved. This microbridge actuator is designed, simulated using ANSYS, fabricated and tested. The results from the testing have shown a good agreement with analytical prediction and ANSYS simulation. The actuator demonstrated bi-stability, two-way actuation and 31??m out-of-plane movement between the two-states using low voltage drive. Buckled shape model, design method for bi-stability and thermo-mechanical model are developed and employed in the design of the micro-bridge. These models are compared with Finite Element (FE) based ANSYS simulation and measurements from the fabricated micro-bridge and have shown a good agreement. In order to demonstrate the potential application of this actuator to optical switching, ANSYS simulation studies have been performed on a micro-mirror integrated with the micro-bridge actuator. From these studies, the optimum micro-mirror size that is appropriate for the integration has been obtained. This optimal mirror size ensures the important features of the actuator. Mirror fabrication experiments in (110) wafer have been carried out to find out the appropriate compensation mask size for a given etch depth and the suitable wafer thickness that can be used to fabricate the integrated system.

Piezoelectric patch-type actuators are being considered for use in acoustic control and vibration control of complex mechanical structures such as aircraft fuselages and automobile interiors. For complex structures, it is often difficult to predict the best location of actuator-structure interaction. Currently, piezoelectric patch-type actuators are bonded permanently to the host structure using a technique that requires surface preparation. This technique is not well suited for actuator performance testing and model verification since attaching the actuator is time-consuming, removing the actuator is difficult, and the actuator is destroyed when it is removed. We present three alternate techniques for bonding flat piezoelectric patch-type actuators to structures. These techniques allow the actuator to be attached quickly, removed easily, and reused. The alternate techniques and a permanent bonding technique are used to attach actuators to a clamped-free beam. For each attachment technique, we obtain the frequency response functions, actuator authority levels, and damping ratios. We also obtain the degradation of the actuator authority and damping ratio as the actuator is reused. For each attachment technique, we compare the measured performance to the performance predicted from a pin-force model of that actuator attachment. The attachment techniques that allowed us to make removable, reusable piezoelectric actuators were shown to provide structural actuation very similar to actuation provided by permanently attached piezoelectric actuators. A small but statistically significant change in authority occurred as a result of removing the actuator. The confidence intervals of actuator authority increased in frequency regions of antiresonance and closely spaced modes. The pin-force model did not provide an accurate analysis method for predicting actuator authority. / Master of Science

Digital Clay is a next generation human-machine communication interface based on a tangible haptic surface. This thesis embraces this revolutionary concept and seeks to give it a physical embodiment that will confirm its feasibility and enable experimentation relating to its utility and possible improvements. Per the approach adopted in work, Digital Clay could be described as a 3D monitor whose pixels can move perpendicularly to the screen to form a morphing surface. Users can view, touch and modify the shape of the working surface formed by these pixels. In reality, the pixels are the tips of micro hydraulic actuators or Hapcel (i.e. haptic cell, since the Digital Clay supports the haptic interface). The user can get a feel of the desired material properties when he/she touches the working surface. The potential applications of Digital Clay cover a wide range from computer aided engineering design to scientific research to medical diagnoses, 3D dynamic mapping and entertainment. One could predict a future in which, by using Digital Clay, not only could the user watch an actor in a movie, but also touch the face of the actor! This research starts from the review of the background of virtual reality. Then the concept and features of the proposed Digital Clay is provided. Research stages and a 5x5 cell array prototype are presented in this thesis on the structural design and control of Digital Clay. The first stage of the research focuses on the design and control of a single cell system of Digital Clay. Control issues of a single cell system constructed using conventional and off-the-shelf components are discussed first in detail followed by experimental results. Then practical designs of micro actuators and sensors are presented. The second stage of the research deals with the cell array system of Digital Clay. Practical structural design and control methods are discussed which are suitable for a 100x 100 (even 1000X 1000) cell array. Conceptual design and detailed implementations are presented. Finally, a 5 x 5 cell array prototype constructed using the discussed design solutions for testing is presented.

Lead-lag dampers are present in most rotors to provide the required level of damping in all flight conditions. These dampers are a critical component of the rotor system, but they also represent a major source of maintenance cost. In present rotor systems, both hydraulic and elastomeric lead-lag dampers have been used. Hydraulic dampers are complex mechanical components that require hydraulic fluids and have high associated maintenance costs. Elastomeric dampers are conceptually simpler and provide a ``dry" rotor, but are rather costly. Furthermore, their damping characteristics can degrade with time without showing external signs of failure. Hence, the dampers must be replaced on a regular basis. A semi-active friction based lead-lag damper is proposed as a replacement for hydraulic and elastomeric dampers. Damping is provided by optimized energy dissipation due to frictional forces in semi-active joints. An actuator in the joint modulates the normal force that controls energy dissipation at the frictional interfaces, resulting in large hysteretic loops. Various selective damping strategies are developed and tested for a simple system containing two different frequency modes in its response, one of which needs to be damped out. The system reflects the situation encountered in rotor response where 1P excitation is present along with the potentially unstable regressive lag motion. Simulation of the system response is obtained to compare their effectiveness. Next, a control law governing the actuation in the lag damper is designed to generate the desired level of damping for performing adaptive selective damping of individual blade lag motion. Further, conceptual design of a piezoelectric friction based lag damper for a full-scale rotor is presented and various factors affecting size, design and maintenance cost, damping capacity, and power requirements of the damper are discussed. The selective semi-active damping strategy is then studied in the context of classical ground resonance problem. In view of the inherent nonlinearity in the system due to friction phenomena, multiblade transformation from rotating frame to nonrotating frame is not useful. Stability analysis of the system is performed in the rotating frame to gain an understanding of the dynamic characteristics of rotor system with attached semi-active friction based lag dampers. This investigation is extended to the ground resonance stability analysis of a comprehensive UH-60 model within the framework of finite element based multibody dynamics formulations. Simulations are conducted to study the performance of several integrated lag dampers ranging from passive to semi-active ones with varying levels of selectivity. Stability analysis is performed for a nominal range of rotor speeds using Prony's method.

A formable surface is part of an effort to create a haptic device that allows for a three dimensional human-computer interface called digital clay. As with real clay, digital clay allows a user to physically manipulate the surface into some form or orientation that is sensed and directly represented in a computer model. Furthermore, digital clay will allow a user to change the computer model by manipulating the inputs that are directly represented in the physical model. The digital clay device being researched involves a computer-interfaced array of vertically displacing actuators that is bound by a formable surface. The surface is composed of an array of unit cells that are constructed of compliant spherical joints and translational joints. As part of this thesis, a series of unit cells were developed and planar surfaces were fabricated utilizing the additive manufacturing process of stereolithography. The process of computing the resultant shape of a manipulated surface was modeled mathematically through energy minimization algorithms that utilized least squares analysis to compute the positions of the unit cells of the surface. Simulation results were computed and analyzed against the movement of a fabricated planar surface. Once the mathematical models were validated against the manufactured surface, a method for attaching the surface to an array of actuators was recommended.

We present a system architecture and a set of control techniques that allow heterogeneous software design tools to collaborate intelligently and automatically. One of their distinguishing features is the ability to perform concurrent processing. Systems based on this architecture are able to effectively solve large electromagnetic analysis problems, particularly those that involve loose coupling between several areas of physics. The architecture can accept any existing software analysis tool, without requiring any modification or customization of the tool. This characteristic is produced in part by our use of a neutral virtual representation for storing problem data, including geometry and material definitions. We construct a system based on this architecture, using several circuit and finite-element analysis tools, and use it to perform electromagnetic analyses of several different devices. Our results show that our architecture and techniques do allow practical problems to be solved effectively by heterogeneous tools. / On présente une architecture de système et un ensemble de techniquesde contrôle qui permettent aux logiciels d'analyse hétérogènes de collaborerde façon intelligente et automatique. Un de ses traits caractéristiques est sacapacité d'effectuer simultanément plusieurs traitements. Les systèmes baséssur cette architecture sont capables de résoudre de manière efficace des grandsproblèmes dans le domaine de l'analyse électromagnétique, particulièrementceux où existe un accouplement dégagé entre plusieurs domaines de physique.L'architecture peut accepter n'importe quel logiciel d'analyse existant; ellen'exige pas que les logiciels soyent modifiés ou fabriqués sur mesure. Cettecaractéristique est produite en partie par notre utilisation d'une représentationneutre virtuelle pour représenter les données du problème, y inclus sa géométrieet les proprietés de ses matériels. On construit un système basé sur cettearchitecture, comprenant plusieurs logiciels de simulation, et on l'emploie pourexécuter des analyses électromagnétiques de plusieurs appareils différents. Nosrésultats montrent que notre architecture et nos techniques permettent desproblèmes pratiques d'être résolus efficacement par les outils hétérogènes.

No description available.

Microvalves are essential components of the miniaturization of the fluidic systems to control of fluid flow in a variety of applications as diverse as chemical analysis systems, micro-fuel cells, and integrated fluidic channel arrangements for electronic cooling. Using microvalves, these systems offer important advantages: they can operate using small sample volumes and provide rapid response time. This PhD dissertation presents the world first electromagnetically actuated microvalve fabricated on a single wafer with CMOS compatibility. In this dissertation, the design, fabrication, and testing results of two different types of electromagnetic microvalves are presented: the on/off microvalve and the bistable microvalve with latching mechanism. The microvalves operate with power consumption of less than 1.5 W and can control the volume flow rate of DI water, or a 50% diluted methanol solution in the range 1 - 50 µL in. The leaking rate of the on/off microvalve is the order of 30 nL/min. The microvalve demonstrated a response time for latching of 10 ms in water and 0.2 ms in air. This work has resulted in a US patent, application no. 10/699,210.Other inventions that have been developed as a result of this research are bidirectional, and bistable-bidirectional microactuators with latching mechanism, that can be utilized for optical switch, RF relay, micro mirror, nano indenter, or nano printings.