L’activation à basse température est prometteuse pour l’intégration 3D séquentielle où lebudget thermique du transistor supérieur est limité (<650 ºC) pour ne pas dégrader letransistor inférieur, mais aussi dans le cas d’une intégration planaire afin d’atteindre des EOTultra fines et de contrôler le travail de sortie de la grille sans recourir à une intégration de type« gate-last ». Dans ce travail, l’activation par recroissance en phase solide (SPER) a étéétudiée afin de réduire le budget thermique de l’activation des dopants.L’activation à basse température présente plusieurs inconvénients. Les travauxprécédents montrent que les fuites de jonctions sont plus importantes dans ces dispositifs.Ensuite, des fortes désactivations de dopants ont été observées. Troisièmement, la faiblediffusion des dopants rend difficile la connexion des jonctions source et drain avec le canal.Dans ce travail, il est montré que dans un transistor FDSOI, l’augmentation des fuites dejonctions et la désactivation du Bore peuvent être évités grâce à la présence de l’oxyde enterré.De plus les conditions d’implantation ont été optimisées et les transistors activés à650 ºC atteignent les performances des transistors de référence. / Low temperature (LT) process is gaining interest in the frame of 3D sequentialintegration where limited thermal budget (<650 ºC) is needed for top FET to preserve bottomFET from any degradation and also in the standard planar integration for achieving ultra-thinEOT and work function control with high-k metal gate without gate-last integration scheme.In this work, LT Solid Phase Epitaxial Regrowth (SPER) has been investigated for reducingthe most critical thermal budget which is dopant activation.From previous works, LT activated devices face several challenges: First, higher junctionleakage limits their application to high performance devices. Secondly, strong deactivation ofthe metastable activated dopants was observed with post anneals. Thirdly, the dopant weakdiffusion makes it difficult to connect the channel with S/D.In this work, it is shown that the use of FDSOI enables to overcome junction leakage andBoron deactivation issues thanks to the defect cutting off and sinking effect of buried oxide.As a consequence, dopant deactivation in FDSOI devices is no longer an issue. Finally,implants conditions of LT transistors have been optimized to reach similar performance thanits standard high temperature counterparts.

Orientador: Hildebrando Herrmann / Dissertação (mestrado) - Universidade Estadual de Campinas, Instituto de Geociências / Made available in DSpace on 2018-08-07T02:46:39Z (GMT). No. of bitstreams: 1 Poveda_ElianePereiraRodrigues_M.pdf: 837454 bytes, checksum: 728458f062c05129a3b75012a128f19d (MD5) Previous issue date: 2006 / Resumo: A presente dissertação analisa a necessidade de compatibilização das políticas mineral e ambiental, com vistas ao aproveitamento adequado dos recursos minerais, bens indisponíveis e de natureza difusa, com a análise jurídica de todo o ciclo de vida do empreendimento minerário, desde a sua concepção até o planejamento do fechamento da mina com sua desativação. Após uma breve abordagem dos princípios que norteiam as políticas públicas, critica-se a ausência de um tratamento sistemático à desativação dos empreendimentos minerários. Os recursos não-renováveis devem ser tutelados pelos órgãos competentes dentro do seu poder de polícia administrativa, com vistas à obtenção das Licenças Ambientais e suas respectivas renovações. A desativação da atividade seria considerada mais uma etapa do licenciamento, sendo devidamente acompanhada desde a fase de pesquisa, com ênfase na proteção dos recursos naturais (ar, águas - superficiais e subterrâneas -, solo, subsolo, fauna e flora) até a sua exaustão. Ao final, propõe um novo modelo legislativo de regulação do tema com a cooperação dos instrumentos previstos nas políticas públicas analisadas, com vistas à eficácia legal e social do licenciamento ambiental, objetivando a prevenção de passivos ambientais oriundos da atividade, por meio da propositura da Licença de Desativação. A desativação é analisada como mais uma etapa do licenciamento ambiental no ordenamento jurídico, a ser planejada durante a renovação da licença de operação, objetivando sistematizar os conflitos de interesses do aproveitamento dos recursos minerais, de fundamental importância para o mercado nacional para assegurar trabalho e qualidade de vida ao homem na sociedade, com a devida proteção dos bens ambientais / Abstract: The present study analyzes the importance of compatibilization of the administration of mineral and environmental sectors, aiming at an adequate management of mineral resources, providing legal analysis of the mineral business from its conception until its closing plan and desactivation. Shortly after a brief introduction to the public policies, there is a criticism against the absence of a systematic measure for the desactivation of the mineral industry in the Brazilian jurisdiction. The resources that are not renegotiable should be managed by the appropriate sectors within the policy of administration in order to prevent environmental damage. The desactivation of its activities would be considered one more step is the licensing that should be monitored since its research phase, emphasizing the preservation of natural resources such as air, water ¿ superficial and underground, earth, fauna and flora and their exhaustion. Finally, a new legislative model of regulation has been proposed, with the cooperation of instruments foreseen in the public administration policies analyzed, as to their legal and social efficacies for an environmental license, aiming towards the prevention of environmental damage that could be originated by the mineral activities from the periods of research until their closure plan by proposing a License of Desactivation. From a legal aspect, the desactivation is mostly analyzed as an environmental license measure that envisions maintaining and preserving the environment as well as exploring its mineral resources, bringing business and revenues to the domestic market, providing jobs and a better quality of life for the local community / Mestrado / Administração e Politica de Recursos Minerais / Mestre em Geociências